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Semiconductor Process Technologies

  • Hermann Clauss
Chapter

Abstract

Approximately up to the year 1970 integrated circuits were realized mainly in bipolar technology. Though the basics of MOS technology already were known, the reproducibility of the threshold voltages of MOS-Field Effect Transistors (MOSFET) was insufficient. The problem could be solved, however, with the breakthrough of the ionimplantation technology. Since that time MOS is the dominating technology for the production of integrated circuits.

Keywords

Breakdown Voltage Gate Oxide Doping Atom Junction Depth Local Oxidation 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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© Springer Science+Business Media New York 2003

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  • Hermann Clauss

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