Part of the Microtechnology And Mems book series (MEMS)

The third part of this book concerns the experimental aspects, which essentially covers three points, i.e., characterization, validation, and results. The characterization step consists in measuring the inputs of the models, that is, the contact angles, the surface tension, and the volume of liquid. The validation stage is the experimental verification of the proposed models and simulations, mainly done by comparing two possible outputs, i.e., the capillary force and the meniscus shape. Thirdly, we present in this part a collection of results based on computations on the one hand and on experiments on the other hand.


Surface Tension Contact Angle Capillary Force Design Rule Experimental Aspect 
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© Springer Science+Business Media, LLC 2007

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