Direct Synthesis and Integration of SWNT Devices
The unique properties of carbon nanotubes (as mentioned in Chapter 1) have attracted enormous attention during the past two decades. Significant progress and understanding have been made in this field, owing to the successful development of effective strategies for the fabrication of CNT-based electronic devices. Nevertheless, many challenges still need to be overcome, such as simple and reliable control over single-walled nanotube (SWNT) diameter, chirality, length, and orientation for the large-scale integration of nanotube devices and circuits.
In this chapter, we will describe the past progress and on-going efforts on the various aspects of SWNT synthesis and integration for electronic devices. There have been two parallel approaches for making SWNTs electronic devices: One is to produce bulk amount of SWNT materials first, and then followed by purification of the material and dispersion into solutions. After that the SWNTs are deposited on the substrate for device...
KeywordsChemical Vapor Deposition Electron Beam Lithography Chemical Vapor Deposition Process Radial Breathing Mode Chemical Vapor Deposition Growth
Most part of the work presented in this chapter was based on Dr. Jing Kong’s thesis with Professor Hongjie Dai at Stanford University. We deeply appreciate the valuable advices and contribution from Prof. Dai. The authors would also like to thank Prof. Angela Belcher at MIT for her support of this work. This work was funded in part by the MARCO IFC Focus Research Center Program.
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