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Properties of Photoresist Polymers

  • Qinghuang Lin

Keywords

Dissolution Rate Etch Rate Maleic Anhydride Optical Engineer Onium Salt 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media, LLC 2007

Authors and Affiliations

  • Qinghuang Lin
    • 1
  1. 1.IBM Thomas J. Watson Research CenterYorktown Heights

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