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Applications of Functional Thin Films and Nanostructures in Gas Sensing

  • Audrey Nelson
Chapter
Part of the Integrated Analytical Systems book series (ANASYS)

Abstract

Thin-film technology plays a very important role in a variety of instrumentation used for gas sensing, such as optical nondispersive infrared (NDIR) sensors. Because of recent developments in thin-film and nanostructure technologies, optical NDIR systems have become reliable and accurate instruments that are both easy to use and economically viable. The author discusses various gas-sensing technologies in general terms before narrowing the scope to infrared absorption technologies and the significant role that functional thin films played in bringing numerous infrared products to the market. The bulk of this chapter is used to discuss the design and fabrication of an NDIR sensor as an example of a successful product using functional optical thin films. The market for such sensors has grown rapidly and more consumer products use them today.

Keywords

Molecular Beam Epitaxy Michelson Interferometer Noise Equivalent Power Thermal Detector Pyroelectric Detector 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media, LLC 2009

Authors and Affiliations

  1. 1.GE Sensing, TelAireGoletaCA

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