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© 2009 Springer-Verlag US
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Solgaard, O. (2009). Optical Displacement Sensors. In: Photonic Microsystems. MEMS Reference Shelf. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-68351-5_12
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DOI: https://doi.org/10.1007/978-0-387-68351-5_12
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Publisher Name: Springer, Boston, MA
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Online ISBN: 978-0-387-68351-5
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