Frequency and Time Response of MEMS

Part of the Microsystems book series (MICT, volume 17)

Microelectromechanical systems are discussed in this chapter by taking into account the forcing factor and therefore the forced response. When actuation is produced by harmonic (sinusoidal, cosinusoidal) factors, the frequency response needs to be analyzed, which, essentially, consists of characterizing the response amplitude and phase shift over the excitation frequency range. The Laplace transform and the transfer function approach are used to study topics such as transmissibility, coupling, mechanical-electrical analogies, as well as applications such as microgyroscopes and tuning forks. When excitation is not harmonical, the time response of MEMS has to be addressed. The Laplace transform method, the state-space approach, and time-stepping schemes are discussed in connection with the time response of MEMS. Nonlinear problems, such as those generated by large deformations, and dedicated modeling/solution methods, such as time-stepping schemes or the approximate iteration method are presented, all in the context of MEMS applications.


Transfer Function Frequency Response Function Tuning Fork Proof Mass Harmonic Excitation 
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