Microcantilevers and Microbridges: Bending and Torsion Resonant Frequencies
Microcantilevers and microbridges are the simplest mechanical devices that operate as standalone systems in a variety of microelectromechanical systems (MEMS) applications, such as nano-scale reading/writing in topology detection/ creation, optical detection, material properties characterization, resonant sensing, mass detection, or micro/nano electronic circuitry components such as switches or filters.
This chapter studies the bending and torsion resonant responses of microcantilevers (fixed-free flexible members) and microbridges (fixed-fixed flexible members) by mainly utilizing the distributed-parameter approach and the related Rayleigh’s quotient approximate method, which enable direct derivation of the resonant frequencies. The lumped-parameter modeling, which permits separate calculation of equivalent stiffness and inertia properties en route of obtaining the above-mentioned resonant frequencies, is also used in this chapter for certain configurations.
KeywordsResonant Frequency Frequency Ratio Landing Position Distribution Function Model Elastic Modulii
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