Scanning Transmission Electron Microscopy
The scanning transmission electron microscope (STEM) is a very powerful and highly versatile instrument capable of atomic resolution imaging and nanoscale analysis. The purpose of this chapter is to describe what STEM is, to highlight some of the types of experiments that can be performed using a STEM, to explain the principles behind the common modes of operation, to illustrate the features of typical STEM instrumentation, and to discuss some of the limiting factors in its performance.
KeywordsScanning Transmission Electron Microscope Spherical Aberration Transmission Electron Micro Chromatic Aberration Scanning Transmission Electron Microscope Imaging
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