Abstract
Frequency and phase agile microwave components such as tunable filters and phase shifters will require ferroelectric thin films that exhibit a nonlinear dependence of dielectric permittivity (ɛ r) with dc electric bias, as well as a high material (Δɛ r/tan δ) and device (or K-factor in phase shift/dB) figure of merits (FOM). Therefore, voltage tunable (Pb0.3Sr0.7)TiO3 (PST) thin films (90–150 nm) on (0001) sapphire were deposited by metalorganic chemical vapor deposition at rates of 10–15 nm/min. The as-deposited epitaxial PST films were characterized by Rutherford backscattering spectroscopy, X-ray methods, field emission scanning electron microscope, high resolution transmission electron microscopy, Raman spectroscopy, and electrical methods (7–17 GHz) using coplanar waveguide test structures. The epitaxial relationships were as follows: out-of-plane alignment of [111] PST//[0001] sapphire, and orthogonal in-plane alignments of \( [1\bar 10] \) PST//\( [10\bar 10] \) sapphire and \( [\bar 1\bar 12] \) PST//\( [1\bar 210] \) sapphire. The material FOM and device FOM (or K-factor) at 12 GHz were determined to be 632 and ∼13 degrees/dB, respectively. The results are discussed in light of the nanostructure and stress in epi-PST films. Finally, a rational basis for the selection of PST composition, substrate, and process parameters is provided for the fabrication of optimized coplanar waveguide (CPW) phase shifters with very high material and device FOMs.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
M. J. DALBERTH, R. E. STAUBER J. C. PRICE, C. T. ROGERS, and D. GALT, Appl. Phys. Lett. 72 (1998) 507.
H.-D. WU and F. S. BARNES, Integr. Ferroelectr. 22 (1998) 291.
D. S. KORN and H.-D. WU, ibid. 24 (1999) 215.
G. SUBRAMANYAM, F. W. VAN KEULS, and F. A. MIRANDA, IEEE Microwave Guided Wave Lett. 8 (1998) 78.
F. W. VAN KEULS, R.R. ROMANOFSKY, D. Y. BOHMAN, M. D. WINTERS, F. A. MIRANDA, C. H. MUELLER, R. E. TREECE, T. V. RIVKIN, and D. GALT, Appl. Phys. Lett. 71 (1997) 3075.
S. S. GEVORGIAN, D. I. KAPARKOV and O. G. VENDIK, IEEE Proc. Microwave, Antennas and Propagation 141 (1994) 501.
A. T. FINDIKOGLU, Q. X. JIA, X. D. WU, G. J. CHEN, T. VENKATESAN and D. W. REAGOR, Appl. Phys. Lett. 68 (1996) 1651.
W. WILBUR et al., Integr. Ferroelectr. 19 (1998) 149.
Y. SOMIYA, A. S. BHALLA and L. E. CROSS, Int. J. of Inorg. Mater. 3 (2001) 709.
W. J. KIM, W. CHANG, S. B. QADRI, J. M. POND, S. W. KIRCHOEFER, D. B. CHRISEY and J. S. HORWITZ, Appl. Phys. Lett. 76 (2000) 1185.
R. A. YORK, A. S. NAGRA, P. PERIASWAMY, O. AUCIELLO, S. K. STREIFFER and J. IM, Integr. Ferroelectr. 34 (2001) 177.
E. CARLSSON and S. GEVORGIAN, IEEE T. Micro. Theory 47 (1999) 1544.
S. GEVORGIAN, T. MARTINSSON, A. DELENIV, E. KOLLBERG and I. VENDIK, IEEE Proc. Microwave, Antennas and Propagation 144 (1997) 145.
S. NOMURA and S. SAVADA, J. Phys. Soc. Jpn. 10 (1955) 108.
W. J. KIM, H. D. WU, W. CHANG, S. B. QADRI, J. M. POND, S. W. KIRCHOEFER, D. B. CHRISEY and J. S. HORWITZ, J. Appl. Phys. 88 (2000) 5448.
K. WASA and S. HAYAKAWA, in “Handbook of Sputter Deposition Technology” (Noyes Publications, Park Ridge, New Jersey, 1992) p. 175.
T. ZHELEVA, K. JAGANNADHAM and J. NARAYAN, J. Appl. Phys. 75 (1994) 860.
K. ABE, N. YANASE, K. SANO and T. KAWAKUBO, Integr. Ferroelectr. 21 (1998) 197.
J. MENG, G. ZOU, Y. MA, X. WANG and M. ZHAO, J. Phys.-Condens. Mat. 6 (1994) 6549.
O. G. VENDIK and L. T. TER-MARTIROSYAN, Sov. Phys.-Solid State 36 (1994) 1778.
K. ABE and S. KOMATSU, Jap. J. Appl. Phys. 32 (1993) L1157.
C. ZHOU and D.M. NEWNS, J. Appl. Phys. 82 (1997) 3081.
C. BASCERI, S.K. STREIFFER, A. I. KINGON and R. WASER, J. Appl. Phys. 82 (1997) 2497.
H.C. LI, W. SI, A.D. WEST and X.X. XI, Appl. Phys. Lett. 73 (1998) 464.
G.W. DIETZ, W. ANTPOHLER, M. KLEE and R. WASER, J. Appl. Phys. 78 (1995) 6113.
G. W. DIETZ and R. WASER, Thin Solid Films 299 (1997) 53.
S. STREIFFER, C. BASCERI, C.B. PARKER, S.E. LASH, and A. I. KINGON, J. Appl. Phys. 86 (1999) 4565.
N. A. PERTSEV, A. G. ZEMBILGOTOV and A. K. TAGANTSEV, Phys. Rev. Lett. 80 (1998) 1988.
N. A. PERTSEV, A. G. ZEMBILGOTOV, S. HOFFMANN, R. WASER and A.K. TAGANTSEV, J. Appl. Phys. 85 (1999)
N. A. PERTSEV, A. K. TAGANTSEV and N. SETTER, Phys. Rev. B 61 (2000) R825.
B. DESU, V. P. DUDKEVICH, P. V. DUDKEVICH, I. N. ZAKHARCHENKO and G.L. KUSHLYAN, MRS Symp. Proc. 401 (1996) 195.
E. HEGENBARTH and C. FRENZEL, Cryogenics 7 (1967) 331.
T. M. SHAW, Z. SUO, M. HUANG, E. LINIGER, R. B. LAIBOWITZ and J. D. BANIECKI, Appl. Phys. Lett. 75 (1999) 2129.
V. L. GUREVICH and A. TAGANTSEV, Adv. Phys. 40 (1991) 719.
A. K. TAGANTSEV, in “Ferroelectric Ceramics: Tutorial Reviews, Theory, Processing, and Applications,” edited by N. Setter and E. L. Colla (Springer-Verlag, New York, LLC, 1992) p. 127.
O. VENDIK, L. TER-MARTIROSYAN and S. ZUBKO, J. Appl. Phys. 84 (1998) 993.
J. O. GENTNER, P. GERTHSEN, N. A. SCHMIDT and R.E. SEND, ibid.. 49 (1978) 4595.
K.H. HÄRDTL, Ceram. Int. 8 (1982) 121.
G. ARLT, U. BOTTGER, and S. WITTE, Appl. Phys. Lett. 63 (1993) 602.
S. MAHAJAN, Prog. Mater. Sci. 42 (1997) 341.
Q. X. JIA, A.T. FINDIKOGLU, D. REAGOR and P. Lu, Appl. Phys. Lett. 73 (1998) 897.
C. K. BARLINGAY and S. K. DEY, Thin Solid Films, 272 (1996)
Author information
Authors and Affiliations
Rights and permissions
Copyright information
© 2006 Springer Science + Business Media, Inc.
About this chapter
Cite this chapter
Dey, S.K., Wang, C.G., Cao, W., Bhaskar, S., Li, J., Subramanyam, G. (2006). Voltage tunable epitaxial PbxSr(1−x)TiO3 films on sapphire by MOCVD: Nanostructure and microwave properties. In: Frontiers of Ferroelectricity. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-38039-1_7
Download citation
DOI: https://doi.org/10.1007/978-0-387-38039-1_7
Publisher Name: Springer, Boston, MA
Print ISBN: 978-0-387-38037-7
Online ISBN: 978-0-387-38039-1
eBook Packages: Chemistry and Materials ScienceChemistry and Material Science (R0)