Abstract
Planar-integrated free-space optics (PIFSO) is an integration concept for classical free-space optics that was proposed in 1989 [1] and has since evolved into an open integration platform for micro-opto-electro-mechanical systems (MOEMS), sometimes also called optical MEMS. This chapter aims at providing an overview of this development that is characterized by a shift from component-related design and fabrication issues to system- and application-related ones. We will discuss the potential of PIFSO within the fast-growing field of microsystems engineering and compare it with that of alternative integration approaches.
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Gruber, M., Jahns, J. (2004). Planar-Integrated Free-Space Optics: From Components to Systems. In: Jahns, J., Brenner, KH. (eds) Microoptics. Springer Series in Optical Sciences, vol 97. Springer, New York, NY. https://doi.org/10.1007/978-0-387-34725-7_13
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DOI: https://doi.org/10.1007/978-0-387-34725-7_13
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