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Three Dimensional Material Processing with Femtosecond Lasers

  • Aleksandr Ovsianikov
  • Sven Passinger
  • Ruth Houbertz
  • Boris N. Chichkov
Chapter
Part of the Springer Series in Optical Sciences book series (SSOS, volume 129)

5. Summary and Outlook

Recent progress in three-dimensional microstructuring of photosensitive materials by femtosecond lasers has been reviewed. Due to the nonlinear nature of multiphoton laser-activated processing, application of ultrashort laser systems allows one to overcome the diffraction limit and to produce high-quality 3D microstructures with a subwavelength resolution. This is very powerful technology with many potential applications which have been briefly discussed in this chapter.

This 3D nonlinear laser processing technique is still in a rapidly developing phase and represents a very exciting field of laser physics and novel laser material processing technologies.

Keywords

Photonic Crystal Femtosecond Laser Negative Photoresist Positive Photoresist Photosensitive Material 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media LLC 2007

Authors and Affiliations

  • Aleksandr Ovsianikov
    • 1
  • Sven Passinger
    • 1
  • Ruth Houbertz
    • 2
  • Boris N. Chichkov
    • 1
  1. 1.Laser Zentrum Hannover e. V.HannoverGermany
  2. 2.Fraunhoffer-Institut für SilicatforschungWürzburgGermany

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