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Nano-Structuring Using Pulsed Laser Radiation

  • Costas P. Grigoropoulos
  • Anant Chimmalgi
  • David J. Hwang
Part of the Springer Series in Optical Sciences book series (SSOS, volume 129)

7. Conclusions and Outlook

Surface nanostructuring of various films at high spatial resolutions was performed with great accuracy and reproducibility by using two near-field optical methods. Nanostructures were defined with minimum lateral feature dimensions of ~10 nm and various complex nanopatterns were produced on metal thin-film samples. Experimental ablation results on Au thin-films and numerical simulation results for the electric field intensity and temperature distribution in the films provided useful insight into the laser thin-film interaction dynamics at the nanoscale. Nanoscale melting and rapid crystallization of a-Si films using a nanosecond laser source was demonstrated using the both apertured and apertureless NSOM schemes. The ability to nucleate and produce these single nanostructures in a controlled fashion could open up a number of potential applications. Further, LCVD based nanodeposition study results were presented using the apertured NSOM scheme which provides us with a useful tool to produce arbitrary shaped three-dimensional nanostructures. Use of thin metal films as effective masking layers was demonstrated wherein ablated nanopatterns generated on metal masking layers were effectively transferred on to the underlying transparent quartz substrate.

Using arrays of scanning microprobe tips with integrated actuator and sensor mechanisms could lead to increased throughput of these surface nanostructuring schemes. Furthermore, by incorporating improved probe designs with dedicated waveguide structures or using switching devices like digital micromirror arrays, precise optical delivery schemes could be devised for coupling the beam with the microprobe tips. Possible applications of these nanostructuring processes are envisioned in high-resolution nanolithography, controlled nanodeposition, ultrahigh density data storage, mask repair, nanoelectronics, nanophotonics, and various nanobiotechnology applications.

Keywords

Femtosecond Laser Laser Fluence Finite Difference Time Domain Pulse Laser Radiation Ablate Crater 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. Ash, E. A., Nicholls, G, 1972, Super-resolution Aperture Scanning Microscope, Nature, 237:510–512CrossRefADSGoogle Scholar
  2. Bachelot, R., H’Dhili, F., Barchiesi, D., Lerondel, G., Fikri, R., Royer, P., Landraud, N., Peretti, J., Chaput, F., Lampel, G., Boilot, J., and Lahlil, K., 2003, Apertureless Near-Field Optical Microscopy: A Study of the Local Tip Field Enhancement using Photosensitive Azobenzene-containing Films, Journal of Applied Physics, 94:2060–2072.CrossRefADSGoogle Scholar
  3. Bäuerle, D., 1998, Laser-Induced Fabrication and Processing of Semiconductors: Recent Developments, Physica Status Solidus (a), 166:543–554.CrossRefADSGoogle Scholar
  4. Bethe, H. A., 1944, Theory of Diffraction by Small Holes, Physical Review, 66:163–182.CrossRefMathSciNetADSzbMATHGoogle Scholar
  5. Betzig, E., Trautman, J. K., Harris, T. D., Weiner, J.S., and Kostelak, R.L., 1991, Breaking the Diffraction Barrier: Optical Microscopy at Nanometric Scale, Science, 251:1468–1470.CrossRefADSGoogle Scholar
  6. Betzig, E., and Trautman, J. K., 1992, Near-Field Optics: Microscopy, Spectroscopy and Surface Modification Beyond the Diffraction Limit, Science, 257:189–195.CrossRefADSGoogle Scholar
  7. Boneberg, J., Munzer, H. J., Tresp, M., Ochmann, M., and Leiderer, P., 1998, The Mechanism of Nanostructuring upon Nanosecond Laser Irradiation of a STM Tip, Applied Physics A, 67:381–384.CrossRefGoogle Scholar
  8. Chen, G., and Hui, P., 1999, Thermal Conductivities of Evaporated Gold Films on Silicon and Glass, Applied Physics Letters, 74:2942–2944.CrossRefADSGoogle Scholar
  9. Chen, J. K., Latham, W. P., and Beraun, J. E., 2002, Axisymmetric Modeling of Femtosecond-pulse Laser Heating on Metal Films, Numerical Heat Transfer B, 42:1–17.CrossRefADSGoogle Scholar
  10. Chimmalgi, A., Choi, T.-Y., Grigoropoulos, C. P., and Komvopoulos, K., 2003, Femtosecond Laser Apertureless Near-Field Nanomachining of Metals Assisted by Scanning Probe Microscopy, Applied Physics Letters, 82:1146–1148.CrossRefADSGoogle Scholar
  11. Chimmalgi, A., Grigoropoulos, C. P., and Komvopoulos, K., 2005a, Surface Nanostructuring by Nano-/femtosecond Laser-assisted Scanning Force Microscopy, Journal of Applied Physics, 97:104319(1)–104319(12).CrossRefADSGoogle Scholar
  12. Chimmalgi, A., Hwang, D.J., and Grigoropoulos, C.P., 2005b, “Nanoscale Rapid Melting and Crystallization of Semiconductor Thin Films,” to appear in Nanoletters, published on-line at http://pubs.acs.org/journals/nalefd/.Google Scholar
  13. Dickmann, K., Jersch, J., and Demming, F., 1997, Focusing of Laser Radiation in the Near-field of a Tip (FOLANT) for applications in Nanostructuring, Surface and Interface Analysis, 25:500–504.CrossRefGoogle Scholar
  14. Ebbesen, T. W., Lezec, H. J., Ghaemi, H. F., Thio, T., and Wolff, P. A., 1998, Extraordinary Optical Transmission through Sub-wavelength Hole Arrays, Nature, 391:667–669.CrossRefADSGoogle Scholar
  15. Gilgen, H. H., Cacouris, T., Shaw, P. S., Krchnavek R. R., and Osgood, R.M., 1987, Direct Writing of Metal Conductors with near-UV Light, Appl. Phys. B, 42:55–66.CrossRefADSGoogle Scholar
  16. Gorbunov, A. A., and Pompe, W., 1994, Thin Film Nanoprocessing by Laser/STM Combination, Physica Status Solidus A, 145:333–338.CrossRefADSGoogle Scholar
  17. Hecht, B., Sick, B., Wild, U. P., Deckert, V., Zenobi, R., Martin, O. J. F., and Pohl, D. W. 2000, Scanning Near-Field Optical Microscopy with Aperture Probes: Fundamentals and Applications, Journal of Chemical Physics, 112:7761–7774.CrossRefADSGoogle Scholar
  18. Huang, S. M., Hong, M. H., Lu, Y. F., Lukyanchuk, B. S., Song, W. D., and Chong, T. C., 2002, Pulsed-Laser Assisted Nanopatterning of Metallic Layers combined with Atomic Force Microscopy, Journal of Applied Physics, 91:3268–3274.CrossRefADSGoogle Scholar
  19. Huber, R., Koch, M., and Feldmann, J., 1998, Laser-induced Thermal Expansion of a Scanning Tunneling Microscope Tip Measured with an Atomic Force Microscope Cantilever, Applied Physics Letters, 73:2521–2523.CrossRefADSGoogle Scholar
  20. Jersch, J., and Dickmann, K., 1996, Nanostructure Fabrication using Laser Field Enhancement in the Near Field of a Scanning Tunneling Microscope Tip, Applied Physics Letters, 68:868–870.CrossRefADSGoogle Scholar
  21. Jersch, J., Demming, F., and Dickmann, K., 1997, Nanostructuring with Laser Radiation in the Nearfield of a Tip from a Scanning Force Microscope, Applied Physics A, 64:29–32.CrossRefGoogle Scholar
  22. Kawata, Y., Xu, C., and Denk, W., 1999, Feasibility of Molecular-resolution Fluorescence Near-field Microscopy using Multi-photon Absorption and Field Enhancement near a Sharp Tip, Journal of Applied Physics, 85:1294–1301.CrossRefADSGoogle Scholar
  23. Lee, M., Moon, S., Hatano, M., Suzuki, K., and Grigoropoulos, C. P., 2000, Relationship between Fluence Gradient and Lateral Grain Growth in Spatially Controlled Excimer Laser Crystallization of Amorphous Silicon Films, Journal of Applied Physics, 88:4994–4999.CrossRefADSGoogle Scholar
  24. Lee M., Moon S., and, Grigoropoulos C.P., 2001, In Situ Visualization of Interface Dynamics during the Double Laser Recrystallization of Amorphous Silicon Thin Films, J. Cryst. Growth, 226:8–10.CrossRefADSGoogle Scholar
  25. Lewis, A., Isaacson, M., Harootunian, A., and Muray, A., 1984, Development of a 500 Å Spatial Resolution Light Microscope I. Light is Efficiently Transmitted through lambda /16 Diameter Apertures, Ultramicroscopy, 13:227–231.CrossRefGoogle Scholar
  26. Lieberman, K., Shani, Y., Melnik, I., Yoffe, S., and Sharon, Y., 1999, Near-field optical photomask repair with a femtosecond laser, J. of Microscopy, 194:537–541.CrossRefGoogle Scholar
  27. Lu, Y. F., Mai, Z. H., Qiu, G., and Chim, W. K., 1999, Laser-induced Nano-oxidation on Hydrogen-Passivated Ge (100) Surfaces under a Scanning Tunneling Microscope Tip, Applied Physics, Letters, 75:2359–2361.CrossRefADSGoogle Scholar
  28. Lu, Y. F., Hu, B., Mai, Z. H., Wang, W. J., Chim, W. K., and Chong, T. C., 2001, Laser-Scanning Probe Microscope based Nanoprocessing of Electronics Materials, Japanese Journal of Applied Physics, 40:4395–4398.CrossRefADSGoogle Scholar
  29. Nolte, S., Chichkov, B. N., Welling, H., Shani, Y., Lieberman, K., and Terkel, H., 1999, Nanostructuring with Spatially Localized Femtosecond Laser Pulses, Opt. Lett., 24:914–916.ADSCrossRefGoogle Scholar
  30. Ohtsu, M., 1998, Near-Field Nano/Atom Optics and Technology, Springer-Verlag, Tokyo, Japan.Google Scholar
  31. Pistor, T. V., 2001, Electromagnetic Simulation and Modeling with Applications in Lithography, Memorandum No. UCB/ERL M01/19.Google Scholar
  32. Pohl, D. W., Denk, W., and Lanz, M., 1984, Optical Stethoscopy: Image Recording with Resolution γ/20, Applied Physics Letters, 44:651–653.CrossRefADSGoogle Scholar
  33. Quate, C. F., 1997, Scanning Probes as a Lithography Tool for Nanostructures, Surface Science, 386: 259–264.CrossRefADSGoogle Scholar
  34. Sanchez, J., Novotny, L., and Xie, X. S., 1999, Near-field Fluorescence Microscopy based on Two-Photon Excitation with Metal Tips, Physical Review Letters, 82:4014–4017.CrossRefADSGoogle Scholar
  35. Smith, A. N., Hostetler, J. L., and Norris, P. M., 1999, Nonequilibrium Heating in Metal Films: An Analytical and Numerical Analysis, Numerical Heat Transfer A, 35:859–873.CrossRefADSGoogle Scholar
  36. Stöckle, R., Setz, P., Deckert, V., Lippert, T., Wokaun, A., and Zenobi, R., 2001, Nanoscale atmospheric pressure laser ablation-mass spectrometry, Anal. Chem., 73:1399–1402.CrossRefGoogle Scholar
  37. Stolk P. A., Polman A., and, Sinke W.C., 1993, Experimental Test of Kinetic Theories for Heterogeneous Freezing in Silicon, Phys. Rev. B, 47:5–13.CrossRefADSGoogle Scholar
  38. Sun, J., and Longtin, J. P., 2001, Inert gas beam delivery for ultrafast laser micromachining at ambient pressure, J. Appl. Phys., 89:8219–8224.CrossRefADSGoogle Scholar
  39. Synge, E. H., 1928, A Suggested Method for Extending Microscopic Resolution into the Ultra-microscopic Region, Phil. Mag., 6:356–362.Google Scholar
  40. Ukraintsev, V. A., and Yates, J. T., 1996, Nanosecond Laser Induced Single Atom Deposition with Nanometer Spatial Resolution using a STM, Journal of Applied Physics, 80:2561–2571.CrossRefADSGoogle Scholar
  41. Wanke, M. C, Lehmann, O., Muller, K., Qingzhe W., and Stuke, M., 1997, Laser Rapid Prototyping of Photonic Band-gap Microstructures, Science, 275:1284–1286.CrossRefGoogle Scholar
  42. Wegscheider, S., Kirsch, A., Mlynek, J., and Krausch, G., 1995, Scanning Near-field Optical Lithography, Thin Solid Films, 264:264–267.CrossRefADSGoogle Scholar
  43. Yamada N., Ohno E., Nishiuchi K., Akahira N., and, Takao M., 1991, Rapid-phase Transitions of GeTe-Sb2 Te3 Pseudobinary Amorphous Thin-films for an Optical Disk Memory, J. Appl. Phys., 69:2849–2856.CrossRefADSGoogle Scholar

Copyright information

© Springer Science+Business Media LLC 2007

Authors and Affiliations

  • Costas P. Grigoropoulos
    • 1
  • Anant Chimmalgi
    • 1
  • David J. Hwang
    • 1
  1. 1.Department of Mechanical EngineeringUniversity of CaliforniaBerkeley

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