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Laser Forward Transfer of Electronic and Power Generating Materials

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Laser Ablation and its Applications

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10. References

  • Adrian, F.J., Bohandy, J., Kim, B.F., Jette, A.N., and Thompson, P., 1987, A study of the mechanism of metal deposition by the laser-induced forward transfer process, J. Vac. Sci. Technol. B5: 1490–1494.

    ADS  Google Scholar 

  • Arnold, C. B., Wartena, R. C., Pratap, B., Swider-Lyons, K. E., and Piqué, A., 2002, Laser direct writing of hydrous ruthenium dioxide micro-pseudocapacitors, in: Electroactive Polymers and Rapid Prototyping, D. B. Chrisey and S. C. Danforth, ed., volume 689, pages 275–280, Pittsburgh, PA. Materials Research Society.

    Google Scholar 

  • Arnold, C. B., Wartena, R. C., Swider-Lyons, K. E., and Piqué, A., 2003. Direct-write planar micro-ultracapacitors by laser engineering, J. Electrochem. Soc. 150: A571–A575.

    Article  Google Scholar 

  • Arnold, C. B., Kim, H., Sutto, T.E., and Piqué, A., 2004a, Direct write laser processing for miniature electrochemical systems, Laser Focus World, 40: 9–12.

    Google Scholar 

  • Arnold, C. B., Kim, H. and Piqué, A., 2004b, Laser transferred primary alkaline microbatteries, Appl. Phys. A, 79: 417–420.

    Article  ADS  Google Scholar 

  • Arnold, C.B., and Piqué, A., 2004c, Self-filling wet electrochemical cells by laser processing, US patent application 20040256359.

    Google Scholar 

  • Arnold, C.B., Piqué, A., Auyeung, R. C. Y. and Numberger, M., 2004d, Laser-based technique for producing and embedding electrochemical cells and electronic components directly into circuit board materials, US patent application 2005000613.

    Google Scholar 

  • Auyeung, R.C.Y., Wu, H.D., Modi, R., Piqué, A., Fitz-Gerald, J.M., Young, H.D., Lakeou, S., Chung, R., and Chrisey, D.B., 2000, Matrix-assisted laser transfer of electronic materials for direct-write applications, Proc. SPIE 4088: 393–396.

    Article  ADS  Google Scholar 

  • Bähnisch, R., Gross, W., and Menschig, A., 2004, Single-shot, high repetition rate metallic pattern transfer, Microelectronic Engineering 50: 541–546.

    Article  Google Scholar 

  • Barbe, C. J., Arendse, F., Comte, P., Jirousek, M., Lenzmann, F., Shklover, V., and Grätzel, M., 1997, Nanocrystalline titanium oxide electrodes for photovoltaic applications, J. Am. Ceram. Soc. 80: 3157–3171.

    Article  Google Scholar 

  • Bates, J.D., Dudney, N. J., Lubben, D. C., Gruzalski, G. R., Kwak, b. S., Yu, X., and Zuhr, R. A., 1995, Thin-film rechargeable lithium batteries, J. Power Sources 54: 58–62.

    Article  Google Scholar 

  • Bates, J. B., Dudney, N. J., Neudecker, B., Ueda, A., and Evans, C. D., 2000, Thin-film lithium and lithium-ion batteries, Solid State Ionics 135: 33–45.

    Article  Google Scholar 

  • Bohandy, J., Kim, B.F., Adrian, F.J., 1986, Metal deposition from a supported metal film using an excimer laser, J. of Appl. Phys. 60: 1538–1539.

    Article  ADS  Google Scholar 

  • Bohandy, J., Kim, B.F., Adrian, F.J., and Jette, A.N., 1988, Metal deposition at 532 nm using a laser transfer technique, J. Appl. Phys. 63: 1158–1162.

    Article  ADS  Google Scholar 

  • Conway, B. E. 1999, Electrochemical Supercapacitors, Scientific Fundamentals and Technological Applications, Kluwer Academic, New York.

    Google Scholar 

  • Dmowski, W., Egami, T., Swider-Lyons, K. E., Love, C. T., and Rolison, D. R., 2002, Local atomic structure and conduction mechanism of nanocrystalline hydrous RuO2 from x-ray scattering, J. Phys. Chem. B 106: 12677–12683.

    Article  Google Scholar 

  • Esrom, H., Jun-Ying Zhang, Kogelschatz, U., and Pedraza, A.J., 1995, New approach of a laser-induced forward transfer for deposition of patterned thin metal films, Appl. Surf. Sci. 86: 202–207.

    Article  ADS  Google Scholar 

  • Fang, Q. L., Evans, D. A., Roberson, S. L., and Zheng, J. P., 2001, Ruthenium oxide film electrodes prepared at low temperatures for electrochemical capacitors, J. Electrochem. Soc. 148: A833–A837.

    Article  Google Scholar 

  • Fernandez-Pradas, J.M., Colina, M., Serra, P., Dominguez, J., and Morenza, J.L., 2004, Laser-induced forward transfer of biomolecules, Thin Sol. Films 453–454: 27–30.

    Article  Google Scholar 

  • Fogarassy, E., Fuchs, C., Kerherve, F., Hauchecorne, G., and Perriere, J., 1989, Laser-induced forward transfer of high-Tc YBaCuO and BiSrCaCuO superconducting thin films, J. Appl. Phys. 66: 457–459.

    Article  ADS  Google Scholar 

  • Greer, J. A. and Parker, T. E., 1988, Laser-induced forward transfer of metal oxides to trim the frequency of surface acoustic wave resonator devices, Proc. SPIE 998: 113–125.

    Google Scholar 

  • Herman, I. P., 1989, Laser-assisted deposition of thin films from gas-phase and surface-adsorbed molecules, Chem. Rev. 89: 1323–1357.

    Article  Google Scholar 

  • Hinsch, A., Kroon, J. M., Kern, R., Uhlendorf, I., Holzbock, J., Meyer, A., and Ferber, 2001, Long-term stability of dye-sensitized solar cells, J., Prog. Photovolt: Res. Appl. 9: 425–438.

    Article  Google Scholar 

  • Holmes, A.S., and Saidam, S.M., 1998, Sacrificial layer process with laser-driven release for batch assembly operations, J. of Microelectromechanical Sys., 7: 416–422.

    Article  Google Scholar 

  • Holmes, A.S., 2002, Laser processes for MEMS manufacture, Proc. SPIE 4426: 203–209.

    Article  ADS  Google Scholar 

  • Humble, P. H., Harb, J. N., and LaFollettte, R., 2001, Microscopic nickel-zinc batteries for use in autonomous microsystems, J. Electrochem. Soc. 18: A1357–A1361.

    Article  Google Scholar 

  • Ito, S., Takeuchi, T., Katayama, T., Sugiyama, M., Matsuda, M., Kitamura, T., Wada, Y., and Yanagida, S., 2003, Conductive and transparent multilayer films for low-temperature-sintered mesoporous TiO2 electrodes of dye-sensitized solar cells, Chem. Mater. 15: 2824–2828.

    Article  Google Scholar 

  • Kalyanasundaram, K., and Grätzel, M., 1998, Applications of functionalized transition metal complexes in photonic and optoelectronic devices, Coordination Chemical Reviews 77: 347–414.

    Article  Google Scholar 

  • Kántor, Z., Tóth, Z., Szorenyi, T., and Tóth, A.L., 1994, Deposition of micrometer-sized tungsten patterns by laser transfer technique, Appl. Phys. Lett. 64: 3506–3508.

    Article  ADS  Google Scholar 

  • Karaiskou, A., Zergioti, I., Fotakis, C., Kapsetaki, M., and Kafetzopoulos, D., 2003, Microfabrication of biomaterials by the sub-ps laser-induced forward transfer process, Appl. Surf. Sci. 208–209: 245–249.

    Article  Google Scholar 

  • Kim, H., Kushto, G. P., Arnold, C. B., Kafafi, Z. H., and Piqué, A., 2004, Laser processing of nanocrystalline TiO2 films for dye-sensitized solar cells, Appl. Phys. Lett. 85: 464–466.

    Article  ADS  Google Scholar 

  • Kim, H., Auyeung, R.C.Y., Ollinger, M., Kushto, Kafafi, Z. H., and Piqué, A., 2005, Laser-sintered mesoporous TiO2 electrodes for dye-sensitized solar cells, accepted for publication in Appl. Phys. A.

    Google Scholar 

  • Kim, I. H. and Kim, K. B., 2001, Ruthenium oxide thin film electrodes for supercapacitors. Electrochem, Solid-State Lett. 5: A62–A64.

    Article  Google Scholar 

  • Koeneman, P. B., Busch-Vishniac, I. J., and Wood, K. L., 1997, Feasibility of micro power supplies for MEMS, J. Microelectromech. Sys. 6: 355–362.

    Article  Google Scholar 

  • LaFollettte, R., Harb, J. N., and Humble, P., 2001, in: Sixteenth Annu. Battery Conf. Applications and Advances, R.S.L. Das and H. Frank, ed., IEEE, Piscatawy, NJ, pp. 349–354.

    Chapter  Google Scholar 

  • Linden, D. and Reddy, T. B., 2001, Handbook of Batteries, 3rd ed., McGraw-Hill, New York.

    Google Scholar 

  • McKeown, D. A., Hagans, P. L., Carette, L. P. L., Russell, A. E., Swider, K. E., and Rolison, D. R., 1999, Structure of hydrous ruthenium oxides: Implications for charge storage, J. Phys. Chem. B 103: 4825–4832.

    Article  Google Scholar 

  • Modi, R., Wu, H.D., Auyeung, R.C.Y., Gilmore, C.M., and Chrisey, D.B., 2001, Direct writing of polymer thick film resistors using a novel laser transfer technique, J. Mater. Res. 16: 3214–3222.

    Article  ADS  Google Scholar 

  • Nakada, S., Matsuda, M., Kambe, S., Saito, Y., Kitamura, T., Sakata, T., Wada, Y., Mori, H., and Yanagida, S., 2002, Dependence of TiO2 nanoparticle preparation methods and annealing temperature on the efficiency of dye-sensitized solar cells, J. Phys. Chem. B 106: 10004–10010.

    Article  Google Scholar 

  • Nazeeruddin, M. K., Kay, A., Rodicio, I., Humphry-Baker, R., Muller, E., Liska, P., Vlachopoulos, N., and Grätzel, M., 1993, Conversion of light to electricity by cis-X2Bis(2,2′-bipyridyl-4,4′-dicarboxylate)ruthenium(II) charge-transfer sensitizers (X = Cl−, Br−, I−, CN−, and SCN−) on nanocrystalline TiO2 electrodes, J. Am. Chem. Soc. 115: 6382–6390.

    Article  Google Scholar 

  • Okuya, M., Nakade, K., and Kaneko, S., 2002, Porous TiO2 thin films synthesized by a spray pyrolysis deposition (SPD) technique and their application to dye-sensitized solar cells, Sol. Energy Mater. Sol. Cells 70: 425–435.

    Article  Google Scholar 

  • O’Regan, B. and Grätzel, M., 1991, A low-cost, high-efficiency solar cell based on dye-sensitized colloidal TiO2 films, Nature 353: 737–740.

    Article  Google Scholar 

  • Osgood, R. M. and Deutsch, T. F., 1985, Laser-induced chemistry for microelectronics, Science 227: 709–714.

    Article  ADS  Google Scholar 

  • Papakonstantinou, P., Vainos, N.A., and Fotakis, C., 1999, Microfabrication by UV femtosecond laser ablation of Pt, Cr and indium oxide thin films, Appl. Surf. Sci. 151: 159–170.

    Article  ADS  Google Scholar 

  • Pimenov, S.M., Shafeev, G.A., Smolin, A.A., Konov, V.I., and Vodolaga, B.K., 1995, Laser-induced forward transfer of ultra-fine diamond particles for selective deposition of diamond films, Appl. Surf. Sci. 86: 208–212.

    Article  ADS  Google Scholar 

  • Piqué, A., Chrisey, D.B., Auyeung, R.C.Y., Lakeou, S., Chung, R., McGill, R.A., Wu, P.K., Duignan, M., Fitz-Gerald, J., and Wu, H.D., 1999a, Laser direct writing of circuit elements and sensors, Proc. SPIE 3618: 330–339.

    Article  ADS  Google Scholar 

  • Piqué, A., Chrisey, D.B., Auyeung, R.C.Y., Fitz-Gerald, J., Wu, H.D., McGill, R.A., Lakeou, S., Wu, P.K., Nguyen, V., and Duignan, M., 1999b, A novel laser transfer process for direct writing of electronic and sensor materials, Appl. Phys. A A69: 279–284.

    ADS  Google Scholar 

  • Piqué, A., Chrisey, A.D.B., Fitz-Gerald, J.M., McGill, R.A., Auyeung, R.C.Y., Wu, H.D., Lakeou, S., Nguyen, V., Chung, R., and Duignan, M., 2000a, Direct writing of electronic and sensor materials using a laser transfer technique, J. Mater. Res. 15: 1872–1875.

    Article  ADS  Google Scholar 

  • Piqué, A., Fitz-Gerald, J., Chrisey, D.B., Auyeung, R.C.Y., Wu, H.D., Lakeou, S., and McGill, R.A., 2000b, Direct writing of electronic materials using a new laser assisted transfer/annealing technique, Proc. SPIE 3922: 105–112.

    Article  Google Scholar 

  • Piqué, A., Weir, D.W., Wu, P.K., Pratap, B., Arnold, C.B., Ringeisen, B.R., McGill, R.A., Auyeung, R.C.Y., Kant, R.A., and Chrisey, D.B., 2002, Direct-write of sensor devices by a laser forward transfer technique, Proc. SPIE 4637: 361–368.

    Article  ADS  Google Scholar 

  • Piqué, A., Arnold, C.B., Pratap, B., Auyeung, R.C.Y., Kim, H., and Weir, D.W., 2003, Laser direct-write of metal patterns for interconnects and antennas, Proc. SPIE 4977: 602–608.

    Article  Google Scholar 

  • Piqué, A., Mathews, S.A., Auyeung, R.C., Ollinger, M., Kim, H., Pratap, B., Arnold, C.B., and Sutto, T.E., 2004a, Application of laser direct-write techniques for embedding electronic and micropower components, Proc. SPIE 5662: 564–569.

    Article  ADS  Google Scholar 

  • Piqué, A., Arnold, C. B., Kim, H., Ollinger, M., and Sutto, T.E., 2004b, Rapid prototyping of micro-power sources by laser direct-write, Appl. Phys. A, 79: 783–786.

    Article  ADS  Google Scholar 

  • Piqué, A., Pratap, B., Mathews, S. A., Karns, B. J., Auyeung, R. C., Kasser, M., Ollinger, M., Kim, H., Lakeou, S., and Arnold, C.B., 2005a, Laser direct-write of embedded electronic components and circuits, Proc. SPIE 5713: 223–230.

    Article  ADS  Google Scholar 

  • Piqué, A., Mathews, S. A., Pratap, B., and Auyeung, R. C., 2005b, Laser forward transfer of semiconductor devices, Laser Precision Microfabrication Conference, Williamsburg VA.

    Google Scholar 

  • Sarangapani, S., Tilak, B., and Chen, C., 1996, Materials for electrochemical capacitors. J. Electrochem. Soc. 143:3791–3799.

    Article  Google Scholar 

  • Schultze, V., and Wagner, M, 1991, Laser-induced forward transfer of aluminum, Appl. Surf. Sci. 52:303–309.

    Article  ADS  Google Scholar 

  • Serra, P., Colina, M., Fernandez-Pradas, J.M., Sevilla, L., and Morenza, J.L., 2004, Preparation of functional DNA microarrays through laser-induced forward transfer, Appl. Phys. Lett. 85: 1639–1641.

    Article  ADS  Google Scholar 

  • Sutto, T. E., Ollinger, M., Kim, H., Arnold, C.B. and Piqué, A., 2006, Laser transferable polymer-ionic liquid separator/electrolytes for solid-state rechargeable lithium ion microbatteries, Electrochem. Solid-State Lett. 9:A69–A71.

    Article  Google Scholar 

  • Tolbert, W.A., Lee, I.-Y.S., Doxtader, M.M., Ellis, E.W., and Dlott, D.D., 1993a, High-speed color imaging by laser ablation transfer with a dynamic release layer: fundamental mechanisms, J. Imaging. Sci. Tech. 37: 411–421.

    Google Scholar 

  • Tolbert, W.A., I-Yin Sandy Lee, Xiaoning Wen, Dlott, D.D., Doxtader, M.M., and Ellis, E.W., 1993b, Laser ablation transfer imaging using picosecond optical pulses: ultra-high speed, lower threshold and high resolution, J. Imaging. Sci. Tech. 37: 485–489.

    Google Scholar 

  • Tóth, Z., Szorenyi, T., and Tóth, A.L., 1993, Ar+ laser-induced forward transfer (LIFT): a novel method for micrometer-size surface patterning, Appl. Surf. Sci. 69: 317–320.

    Article  ADS  Google Scholar 

  • Trasatti, S. and Kurzweil, P., 1994, Electrochemical supercapacitors as versatile energy stores, Plat. Met. Rev. 38:46–56.

    Google Scholar 

  • Vincent, C. A. and Scrosati, B., 1997, Modern Batteries, 2nd ed., Arnold, London.

    Google Scholar 

  • Wartena, R. C., Curtright, A.E., Arnold, C. B., Piqué, A. and Swider-Lyons, K. E., 2004, Liion microbatteries generated by laser direct write, J. Power Sources 126: 193–202.

    Article  Google Scholar 

  • Wu, P.K., Ringeisen, B.R., Callahan, J., Brooks, M., Bubb, D.M., Wu, H.D., Piqué, A., Spargo, B., McGill, R.A., and Chrisey, D.B., 2001, The deposition, structure, pattern deposition, and activity of biomaterial thin-films by matrix-assisted pulsed-laser evaporation (MAPLE) and MAPLE direct write, Thin Sol. Films 389–399:607–614.

    Article  Google Scholar 

  • Young, D., Auyeung, R.C.Y., Piqué, A., Chrisey, D.B., and Dlott, D.D., 2001a, Time-resolved optical microscopy of a laser-based forward transfer process, Appl. Phys. Lett. 78:3169–3171.

    Article  ADS  Google Scholar 

  • Young, D., Wu, H.D., Auyeung, R.C.Y., Modi, R., Fitz-Gerald, J., Piqué, A., Chrisey, D.B., Atanassova, P., and Kodas, T., 2001b, Dielectric properties of oxide structures by a laser-based direct-writing method, J. Mater. Res. 16:1720–1725.

    Article  ADS  Google Scholar 

  • Young, D., Auyeung, R.C.Y., Piqué, A., Chrisey, D.B., and Dlott, D.D., 2002, Plume and jetting regimes in a laser based forward transfer process as observed by time-resolved optical microscopy, Appl. Surf. Sci. 197–198:181–187.

    Article  Google Scholar 

  • Zergioti, I., Mailis, S., Vainos, N.A., Papakonstantinou, P., Kalpouzos, C., Grigoropoulos, C.P., and Fotakis, C., 1998a, Microdeposition of metal and oxide structures using ultrashort laser pulses, Appl. Phys. A 66: 579–582.

    Article  ADS  Google Scholar 

  • Zergioti, I., Malilis, S., Vainos, N.A., Fotakis, C., Chen, S., and Grigoropoulos, C.P., 1998b, Microdeposition of metals by femtosecond excimer laser, Appl. Surf. Sci. 127–129: 601–605.

    Article  Google Scholar 

  • Zergioti, I., Karaiskou, A., Papazoglou, D.G., Fotakis, C., Kapsetaki, M., and Kafetzopoulos, D., 2005, Femtosecond laser microprinting of biomaterials, Appl. Phys. Lett. 86: 163902-1–163902-3.

    Article  ADS  Google Scholar 

  • Zhang, C, Liu, D., Mathews, S.A., Graves, I, Schaefer, T.M., Gilbert, B.K., Modi, R., Wu, H.-D., and Chrisey, D.B., 2003, Laser direct-write and its application in low temperature Co-fired ceramic (LTCC) technology, Microelectronic Eng. 70:41–49.

    Article  Google Scholar 

  • Zheng, J. P., Cygan, P. J., and Jow, T. R., 1995, Hydrous ruthenium oxide as an electrode material for electrochemical capacitors, J. Electrochem. Soc. 142:2699–2703.

    Article  Google Scholar 

  • Zheng, J. P. and Xin, Y., 2002, Characterization of RuO2 · xH2O with various water contents, J. Power Sources 110:86–90.

    Article  Google Scholar 

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Authors and Affiliations

  1. U.S. Naval Research Laboratory, Washington DC

    Alberto Piqué & Heungsoo Kim

  2. Dept. of Mechanical and Aerospace Engineering, Princeton University, Princeton, NJ

    Craig B. Arnold

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  1. Alberto Piqué
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  2. Heungsoo Kim
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  3. Craig B. Arnold
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  1. Photonic Associates, LLC, 200A Ojo de la Vaca Road, Santa Fe, New Mexico, 87508

    Claude Phipps

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Piqué, A., Kim, H., Arnold, C.B. (2007). Laser Forward Transfer of Electronic and Power Generating Materials. In: Phipps, C. (eds) Laser Ablation and its Applications. Springer Series in Optical Sciences, vol 129. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-30453-3_14

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