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Fabrication of Waveguides by Laser Deposition

Optical waveguide growth on Si with NGA-PLD method
  • Takeshi Okato
  • Minoru Obara
Part of the Springer Series in Optical Sciences book series (SSOS, volume 129)

5. Summary

We presented the growth of Nd:KGW waveguides on Si substrates. The waveguide structure was realized by the CeO2 buffer layer, and the as-grown Nd:KGW films were optically active. We also demonstrated the nozzle-gas-assisted PLD (NGA-PLD) method for efficient film oxidation. These results are applicable to the general problems of PLD, and are of great interest.

Keywords

Laser Ablation Buffer Layer Mass Flow Rate Pulse Laser Deposition Waveguide Structure 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media LLC 2007

Authors and Affiliations

  • Takeshi Okato
    • 1
  • Minoru Obara
    • 1
  1. 1.Department of Electronics and Electrical EngineeringKeio University 3-14-1Yokohama-shiJapan

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