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Micro and Nanomanufacturing pp 323–386Cite as

Diamond Microcutting Tools

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7.12 Conclusions

Thin film deposition technologies, particularly CVD and PVD, have become critical for the manufacture of a wide range of industrial and consumer products. Trends in historical developments in the CVD diamond suggest that the technology is highly likely to yield substantial benefits in emerging technological products in fields of nanotechnology, biomedical engineering, NEMS, and MEMS devices. Several methods including plasma CVD, low pressure CVD, and atmospheric pressure CVD have matured into processes that are routinely used in industry. Microwave and hot filament CVD methods are now commonly used to grow diamond and these can be modified to coat uniformly for tools, NEMS, MEMS and biomedical applications. Diamond coatings examined on tools and biomedical tools showed much enhanced performance compared to uncoated tools.

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(2007). Diamond Microcutting Tools. In: Micro and Nanomanufacturing. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-26132-4_7

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  • DOI: https://doi.org/10.1007/978-0-387-26132-4_7

  • Publisher Name: Springer, Boston, MA

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