Abstract
Since the 1950s, Scanning Electron Microscopy (SEM) has been commercially available and used to measure feature sizes below1 micron. Modified SEMs have been employed since the 1960s to perform sub-micron lithography, which then made rapid advances in the 1990s to a process, known as electron beam lithography (EBL). Since the 1980s, Surface Tunneling Microscopy (STM) and Atomic Force Microscopy (AFM) have ushered the era of nanotechnology where it is possible to measure and control the manipulation of matter on the 100nm scale and below. These techniques are broadly classified as “Scanning Probe Microscopy (SPM)”. The earliest forms of nanofabrication using STM based approaches were used to pattern “hard” materials (such as silicon-dioxide; as opposed to “soft” materials such as polymers or biological materials) and restricted to single layer processing. These methods were initially motivated by applications in the semi-conductor industry.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
G. Agarwal, L.A. Sowards, R.R. Naik, and M.O. Stone. Dip-pen nanolithography in tapping mode. J. Am. Chem. Soc., 125:580–583, 2003a.
G. Agarwal, R.R. Naik, and M.O. Stone. Immobilization of histidine-tagged proteins on nickel by electrochemical dip pen nanolithography. J. Am. Chem. Soc., 125:7408–7412, 2003b.
N.A. Amro, S. Xu, and G.Y. Liu. Patterning surfaces using tip-directed displacement and self-assembly. Langmuir, 16:3006–3009, 2000.
G. Agarwal, L.A. Sowards, R.R. Naik, and M.O. Stone. Dip-pen nanolithography in tapping mode. J. Am. Chem. Soc., 125:580–583, 2003.
D. Banerjee, N. Amro, and J. Fragala. Optimizing Microfluidic Ink Delivery Apparatus for Dip Pen Nanolithography. Proceedings of the SPIE Vol. 5345, PhotonicWest 2004 Symposium on Microfluidics, BioMEMS and Medical Microsystems II, Paper No. 5345-28, Jan 24–29, San Jose, CA, 2004.
P. Belaubre, M. Guirardel, G. Garcia, J.B. Pourciel, V. Leberre, A. Dagkessamanskaia, E. Trévisiol, J.M. FranÇois, and C. Berguad. Fabrication of biological microarrays using microcantilevers. Appl. Phys. Lett., 82(18):3122–3124, 2003.
A. Bruckbauer, D.J. Zhou, and L.M. Ying et al. Multicomponent submicron features of biomolecules created by voltage controlled deposition from a nanopipet. J. Am. Chem. Soc., 125(32):9834–9839, 2003.
C.L. Cheung, J.A. Camarero, B. Woods, T. Lin, J.E. Johnson, and J.J. DeYoreo. Fabrication of assembled virus nanostructures on templates of chemoselective linkers by scanning probe nanolithography. J. Am. Chem. Soc., 125:6848–6849, 2003.
L.M. Demers and G. della Cioppa. Nanotechnology to advance discovery r&d—tutorial: Dip pen nanolithography as a next-generation, massively parallel nanoarray platform. Genet. Eng. News, 23(15), 2003.
L.M. Demers, D.S. Ginger, S.J. Park, Z. Li, S.W. Chung, and C.A. Mirkin. Direct patterning of modified oligonucleotides on metals and insulators by dip-pen nanolithography. Science, 296:1836–1838, 2002.
L.M. Demers, S.J. Park, T.A. Taton, Z. Li, and C.A. Mirkin. Orthogonal assembly of nanoparticle building blocks on dip-pen nanolithographically generated templates of DNA. Angew. Chem. Int. Ed., 40(16):3071–3073, 2001.
L.M. Demers and C.A. Mirkin. Combinatorial templates generated by dip-pen nanolithography for the formation of two-dimensional particle arrays. Angew. Chem. Int. Ed., 40(16):3069–3071, 2001.
D.S. Ginger, H. Zhang, and C.A. Mirkin. The evolution of dip-pen nanolithography. Angew. Chem. Int. Ed., 43(1):30–45, 2004.
P.T. Hurley, A.E. Ribbe, and J.M. Buriak. Nanopatterning of alkynes on hydrogen-terminated silicon surfaces by scanning probe-induced cathodic electrografting. J. Am. Chem. Soc., 125(37):11334–11339, 2003.
J. Hyun, S.J. Ahn, W.K. Lee, A. Chilkoti, and S. Zauscher. Molecular recognition-mediated fabrication of protein nanostructures by dip-pen lithography. Nano Letters, 2(11):1203–1207, 2002. [16] A. Ivanisevic, J.M. Im, K.B. Lee, S.J. Park, L.M. Demers, K.J. Watson, and C.A. Mirkin. Redox-controlled orthogonal assembly of charged nanostructures. J. Am. Chem. Soc., 123:12424–12425, 2001.
J.Y. Jang, G.C. Schatz, and M.A. Ratner. Liquid meniscus condensation in dip-pen nanolithography. J. Chem. Phys., 116(9):3875–3886, 2002.
H. Jung, R. Kulkarni, and C.P. Collier. Dip-pen nanolithography of reactive alkoxysilanes on glass. J. Am. Chem. Soc., 125(40):12096–12097, 2003.
K.-H. Kim, N.M. Ke, and H.D. Espinosa. “Massively Parallel Multi-tip Nanoscle Writer with Fluidic Capabilities—Fountain Pen Nanolithography (FPN)”, Proceedings of the 4th International Symposium on MEMSand Nanotechnology, the 2003SEMAnnual Conference and Exposition on Experimental and Applied Mechanics, June 2–4, Charlotte, North Carolina, Session 52, Paper 191, pp. 235–238, 2003.
K.B. Lee, S.J. Park, C.A. Mirkin, J.C. Smith, and M. Mrksich. Protein nanoarrays generated by dip-pen nanolithography. Science, 295:1702–1705, 2002.
K.B. Lee, J.H. Lim, and C.A. Mirkin. Protein nanostructures formed via direct-write dip-pen nanolithography. J. Am. Chem. Soc., 125(19):5588–5589, 2003.
A. Lewis, Y. Kheifetz, E. Shambrodt, A. Radko, E. Khatchatryan, and C. Sukenik. Fountain Pen nanochemistry: Atomic force control of chrome etching. App. Phys. Lett., 75(17):2689–2691, 1999.
Y. Li, B.W. Maynor, and J. Liu. Electrochemical AFM “dip-pen” nanolithography. J. Am. Chem. Soc., 123:2105–2106, 2001.
J.H. Lim, D.S. Ginger, K.B. Lee, J.M. Nam, and C.A. Mirkin. Direct-write dip-pen nanolithography of proteins on modified silicon oxide surfaces. Angew. Chem. Int. Ed., 42:2309–2312, 2003.
X. Liu, L. Fu, S. Hong, V.P. Dravid, and C.A. Mirkin. Arrays of magnetic nanoparticles patterned via “dip-pen” nanolithography. Ad. Mat., 14(3):231–234, 2002.
J.H. Lim and C.A. Mirkin. Electrostatically driven dip-pen nanolithography of conducting polymers. Ad. Mat., 14(20):1474–1477, 2002.
P. Manandhar, J. Jang, G.C. Schatz, M.A. Ratner, and S. Hong. Anomalous surface diffusion in nanoscale direct deposition processes. Phys. Rev. Lett., 90(11):115505-1–115505-4, 2003.
S. Matsubara, H. Yamamoto, K. Oshima, E. Mouri, and H. Matsuoka. Fabrication of nano-structure by Diels-Alder reaction. Chem. Lett., 9:886–887, 2002.
R. McKendry, W.T.S. Huck, B. Weeks, M. Florini, C. Abell, and T. Rayment. Creating nanoscale patterns of dendrimers on silicon surfaces with dip-pen nanolithography. Nano Lett., 2(7):713–716, 2002.
C.A. Mirkin. Programming the assembly of two-and three-dimensional architectures with DNA and nanoscale inorganic building blocks. Inorg. Chem., 39(11):2258–2272, 2000.
A. Noy, A.E. Miller, J.E. Klare, B.L. Weeks, B.W. Woods, and J.J. DeYoreo. Fabrication of luminescent nanostructures and polymer nanowires using dip-pen nanolithography. Nano Lett., 2(2):109–112, 2002.
R.D. Piner and C.A. Mirkin. Effect ofWater on Lateral Force Microscopy in Air. Langmuir, 13:6864–6868, 1997.
R.D. Piner, J. Zhu, F. Xu, S. Hong, and C.A. Mirkin. “Dip-pen” nanolithography. Science, 283:661–663, 1999.
L.A. Porter, A.E. Ribbe, and J.M. Buriak. Metallic nanostructures via static plowing lithography. Nano Lett., 3(8):1043–1047, 2003.
L.A. Porter, H.C. Choi, J.M. Schmeltzer, A.E. Ribbe, L.C.C. Elliott, J.M. Buriak. Electroless nanoparticle film deposition compatible with photolithography, microcontact printing, and dip-pen nanolithography patterning technologies. Nano Lett., 2(12):1369–1372, 2002.
B. Rosner, T. Duenas, D. Banerjee, R. Shile, N. Amro, and J. Rendlen. Active Probes and Microfluidic Ink Delivery for Dip Pen Nanolithography, Proceedings of SPIE Symposium on Microelectronics, MEMS and Nanotechnology, Paper # Perth, Australia, 5275-33,10–12 December, 2003.
S. Shalom, K. Lieberman, and A. Lewis. A micropipette force probe suitable for near-field scanning optical microscopy. Rev. Sci. Inst., 63(9):4061–4065, 1992.
M. Schenk, M. Futing, and R. Reichelt. Direct visualization of the dynamic behavior of a water meniscus by scanning electron microscopy. J. App. Phy., 84(9):4880–4884, 1998.
P.V. Schwartz. Molecular transport from an atomic force microscope tip: A comparative study of dip-pen nanolithography. Langmuir, 18:4041–4046, 2002.
J.C. Smith, K.B. Lee, Q.Wang, M.G. Finn, J.E. Johnson, M. Mrksich, and C.A. Mirkin. Nanopatterning the chemospecific immobilization of cowpea mosaic virus capsid. Nano Lett., 3(7):883–886, 2003.
X.F. Wang, K.S. Ryu, D.A. Bullen, J. Zou, H. Zhang, C.A. Mirkin, and C. Liu. Scanning probe contact printing. Langmuir, 19(21):8951–8955, 2003.
B.L. Weeks, A. Noy, A.E. Miller, and J.J. De Yoreo. Effect of dissolution kinetics on feature size in dip-pen nanolithography. Phys. Rev. Lett., 88(25):255505-1–255505-4, 2002.
D.A. Weinberger, S. Hong, C.A. Mirkin, B.W. Wessels, and T.B. Higgins. Combinatorial generation and analysis of nanometer-and micrometer-scale silicon features via “dip-pen” nanolithography and wet chemical etching. Adv. Mat., 12(21):1600–1603, 2000.
D.L. Wilson, R. Martin, S. Hong, M. Cronin-Golomb, C.A. Mirkin, and D.L. Kaplan. Surface organization and nanopatterning of collagen by dip-pen nanolithography. Proc. Nat. Acad. Sci. U.S.A., 98(24):13660–13664, 2001.
M. Zhang, D. Bullen, S.W. Chung, S. Hong, K.S. Ryu, Z.F. Fan, C.A. Mirkin, and C. Liu. A MEMS nanoplotter with high-density parallel dip-pen nanolithography probe arrays. Nanotechnology, 13:212–217, 2002.
H. Zhang, Z. Li, and C.A. Mirkin. Dip-pen nanolithography-based methodology for preparing arrays of nanostructures functionalized with oligonucleotides. Adv. Mat., 14(20):1472–1474, 2002.
H. Zhang, K.B. Lee, Z. Li, and C.A. Mirkin. Biofunctionalized nanoarrays of inorganic structures prepared by dip-pen nanolithography. Nanotechnology, 14(10):1113–1117, 2003.
D. Zhou, A. Bruckbauer, and L.M. Ying. Building three-dimensional surface biological assemblies on the nanometer scale. Nano Lett., 3(11):1517–1520, 2003.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2006 Springer Science + Business Media, LLC
About this chapter
Cite this chapter
Banerjee, D. (2006). Dip-Pen Technologies for Biomolecular Devices. In: Ferrari, M., Lee, A.P., Lee, L.J. (eds) BioMEMS and Biomedical Nanotechnology. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-25842-3_10
Download citation
DOI: https://doi.org/10.1007/978-0-387-25842-3_10
Publisher Name: Springer, Boston, MA
Print ISBN: 978-0-387-25563-7
Online ISBN: 978-0-387-25842-3
eBook Packages: EngineeringEngineering (R0)