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Hydrogenated Amorphous Carbon Films

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Carbon and Oxide Nanostructures

Part of the book series: Advanced Structured Materials ((STRUCTMAT,volume 5))

Abstract

Hydrogenated amorphous carbon (a-C:H) thin film is one of the most studied materials due to its unique features. The a-C:H thin film is a remarkable material because of its novel optical, mechanical and electrical properties and its similarities to diamond. In this chapter we reviewed the structural and optical properties of hydrogenated amorphous carbon (a-C:H) thin films prepared in a DC-PECVD reactor. Both power and ion bombardment energy were continuously changed during the deposition, as a results of varying deposition parameters such as chamber pressure, electrode distance, CH4 flow rate, and substrate temperature. The films properties ranged from polymer-like to graphite-like a-C:H films, as the power and ion energy increased. The structure and the optical properties of a-C:H films were analyzed by infrared and Raman spectroscopy, UV–Vis Spectrophotometer and photoluminescence. This is to extract the information on sp3/sp2 and hydrogen contents, optical gap, E0 and photoluminescence properties of a-C:H films. The films were found to consist of sp2 clusters of which the size increases with increasing power and ion bombardment energy during the deposition, resulting in lower hydrogen, sp3 content, optical gap and photoluminescence response. The increased in hydrogen termination from the films at higher ion energies results in bigger cluster size and produced graphitic films.

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Acknowledgements

I would like to express my gratitude to UPSI, MARA, UTM and UiTM for the financial and technical support on this project.

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Authors and Affiliations

  1. Department of Physics, Faculty of Science and Technology, Universiti Pendidikan Sultan Idris, 35900, Tanjung Malim, Perak, Malaysia

    Suriani Abu Bakar

  2. NANO-SciTech Centre, Institute of Science, Universiti Teknologi MARA, 40450, Shah Alam, Selangor, Malaysia

    Azira Abdul Aziz

  3. Physics Department, Faculty of Mathematics and Science, Semarang State University, 50229, Semarang, Indonesia

    Putut Marwoto

  4. Physics Department, Faculty of Science, Universiti Teknologi Malaysia, 81310, Skudai, Johor, Malaysia

    Samsudi Sakrani

  5. Department of Physics, Faculty of Science, University of Malaya, 50603, Kuala Lumpur, Malaysia

    Roslan Md Nor

  6. NANO-SciTech Centre, Institute of Science, Universiti Teknologi MARA, 40450, Shah Alam, Selangor, Malaysia

    Mohamad Rusop

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  1. Suriani Abu Bakar
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  2. Azira Abdul Aziz
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  6. Mohamad Rusop
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Correspondence to Suriani Abu Bakar .

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Bakar, S.A., Aziz, A.A., Marwoto, P., Sakrani, S., Nor, R.M., Rusop, M. (2010). Hydrogenated Amorphous Carbon Films. In: Carbon and Oxide Nanostructures. Advanced Structured Materials, vol 5. Springer, Berlin, Heidelberg. https://doi.org/10.1007/8611_2010_15

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