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Technology and Application Opportunities for SiC-FET Gas Sensors

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Solid State Gas Sensors - Industrial Application

Part of the book series: Springer Series on Chemical Sensors and Biosensors ((SSSENSORS,volume 11))

Abstract

The development of SiC-FET gas sensors has proceeded for about fifteen years. The maturity of the SiC material and a deeper understanding of the transduction mechanisms and sensor surface processes behind the sensitivity to a number of target substances have recently allowed the development of market-ready sensors for certain applications. Some examples presented below are a sensor system for domestic boiler control, an ammonia sensor for control of the SCR (selective catalytic reduction) and SNCR (Selective Non-Catalytic Reduction) NOx abatement processes as well as other more or less market-ready applications. In parallel, the basic research continues in order to reach more demanding markets/new applications and also to possibly lower the production costs of the sensors. Therefore, current research and future challenges are also treated, such as the development of new types of conducting ceramics for ohmic contacts to SiC in order to increase the operation temperature beyond the present state of the art.

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Acknowledgment

Financial support is acknowledged from VINNOVA, The Swedish Agency for Innovation Systems, Industrial Partners and Linköping University through the VINN Excellence Center FunMat, Functional Nanoscale Materials, at Linköping University, Sweden and from S-SENCE, Swedish Sensor Center, VINNOVA Excellence Center at Linköping University 1995–2005, and from the Swedish Research Council.

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Authors and Affiliations

  1. Department of Physics, Chemistry and Biology, Linköping University, 581 83, Linköping, Sweden

    A. Lloyd Spetz & M. Andersson

  2. SenSiC AB, Isafjordsgatan 39B, 164 40, Kista, Sweden

    M. Andersson

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  1. A. Lloyd Spetz
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Correspondence to A. Lloyd Spetz .

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  1. Siemens AG Corporate Technology Corporate Research and Technologies CT T DE, München, Germany

    Maximilian Fleischer

  2. Innovative Sensor Technology (IST) AG, Wattwil, Switzerland

    Mirko Lehmann

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Spetz, A.L., Andersson, M. (2011). Technology and Application Opportunities for SiC-FET Gas Sensors. In: Fleischer, M., Lehmann, M. (eds) Solid State Gas Sensors - Industrial Application. Springer Series on Chemical Sensors and Biosensors, vol 11. Springer, Berlin, Heidelberg. https://doi.org/10.1007/5346_2011_5

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