Keywords
- Rutherford Backscatter Spectrometry
- Depth Resolution
- Interface Width
- Glow Discharge Mass Spectrometry
- Sputter Depth Profile
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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References
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Wittmaack, K. (1991). Surface and depth analysis based on sputtering. In: Behrisch, R., Wittmaack, K. (eds) Sputtering by Particle Bombardment III. Topics in Applied Physics, vol 64. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3540534288_18
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Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-53428-0
Online ISBN: 978-3-540-46881-3
eBook Packages: Springer Book Archive