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Sputtering by Particle Bombardment III pp 15–90Cite as

Angular, energy, and mass distribution of sputtered particles

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Part of the book series: Topics in Applied Physics ((TAP,volume 64))

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Authors
  1. Wolfgang O. Hofer
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Rainer Behrisch Klaus Wittmaack

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© 1991 Springer-Verlag

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Hofer, W.O. (1991). Angular, energy, and mass distribution of sputtered particles. In: Behrisch, R., Wittmaack, K. (eds) Sputtering by Particle Bombardment III. Topics in Applied Physics, vol 64. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3540534288_16

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  • DOI: https://doi.org/10.1007/3540534288_16

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