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Sputtering by Particle Bombardment III pp 1–13Cite as

Introduction

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Part of the book series: Topics in Applied Physics ((TAP,volume 64))

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References

  1. W.R. Grove: Philos, Mag. 5, 203 (1853)

    Google Scholar 

  2. J.P. Gassiot: Philos. Trans. R. Soc. London 148, 1 (1858)

    Google Scholar 

  3. J. Plücker: Ann. Phys. (Leipzig) 103, 88, 90 (1858)

    Google Scholar 

  4. A. Günterschulze: J. Vac. Sci. Technol. 3, 360 (1953)

    Google Scholar 

  5. D. Post, R. Behrisch (eds.): Physics of Plasma Wall Interactions in Controlled Fusion (Plenum, New York 1987)

    Google Scholar 

  6. R. Behrisch, J. Roth, G. Staudenmaier, H. Verbeek: Nucl. Instrum. Methods 18, 692 (1987) and in Fundamental and Applied Aspects of Sputtering of Solids, ed. by E.S. Mashkova (MIR, Moscow (1989)

    Google Scholar 

  7. G.M. McCracken: Contrib. Fusion Plasma Phys. 29, 1273 (1987)

    Google Scholar 

  8. J. Bottiger, J.A. Davies, P. Sigmund, K.B. Winterbon: Radiat. Eff. 11, 69 (1971)

    Google Scholar 

  9. E.S. Mashkova, V.A. Molchanov: Radiat. Eff. 16, 143 (1972); ibid. 23, 215 (1974); ibid. 110, 227 (1989)

    Google Scholar 

  10. H. Verbeek: In Material Characterisation using Ion Beams, ed. by J.P. Thomas, A. Cachard (Plenum, New York 1978) p. 303

    Google Scholar 

  11. E.S. Mashkova, V.A. Molchanov: Medium-Energy Ion Scattering from Solids, Modern Problems in Condensed Matter Sciences, Vol. 11 (North-Holland, Amsterdam 1985)

    Google Scholar 

  12. W. Eckstein, H. Verbeek: In Data Compendium for Plasma Surface Interactions, ed. by R.A. Langley, J. Bohdansky, W. Eckstein, P. Mioduszewskyi, J. Roth, E. Taglauer, E.W. Thomas, H. Verbeek, K.L. Wilson: Nucl. Fusion special issue (IAEA Vienna 1984) p. 12

    Google Scholar 

  13. R. Behrisch, W. Eckstein: In [1.5], p. 413

    Google Scholar 

  14. J. Stark: Z. Electrochem. 14, 752 (1908)

    Google Scholar 

  15. F. Keywell: Phys. Rev. 97, 1611 (1955)

    Google Scholar 

  16. B.M.U. Scherzer: In Sputtering by Particle Bombardment II, ed. by R. Behrisch, Topics Appl. Phys., Vol. 52 (Springer, Berlin, Heidelberg 1983) p. 271

    Google Scholar 

  17. E. Taglauer, W. Heiland (eds.): Inelastic Particle-Surface Collisions, Springer Ser. Chem. Phys., Vol. 17 (Springer, Berlin, Heidelberg 1981)

    Google Scholar 

  18. R. Baragiola: Radiat. Eff. 61, 47 (1962)

    Google Scholar 

  19. E.W. Thomas: Prog. Surf. Sci. 10, 383 (1982)

    Google Scholar 

  20. E.W. Thomas: In [1.12]

    Google Scholar 

  21. K. Ertl, R. Behrisch: In [1.5], p. 515

    Google Scholar 

  22. H.D. Hagstrum: Phys. Rev. 96, 336 (1954)

    Google Scholar 

  23. E.S. Parilis, L.M. Kishinevskii: Sov. Phys.-Solid State 3, 885 (1960)

    Google Scholar 

  24. D.B. Medved, Y.E. Strausser: Adv. Electron. Electron Phys. 21, 101 (1965)

    Google Scholar 

  25. J.W. Burnett, J.P. Biersack, D.M. Gruen, B. Jörgensen, A.R. Krauss, M.J. Pellin, E.L. Schweitzer, J.T. Yates Jr., C.E. Young: J. Vac. Sci. Technol. A 6, 2064 (1988)

    Google Scholar 

  26. P. Sigmund et al.: Nucl. Instrum. Methods B 36, 110 (1989)

    Google Scholar 

  27. M.T. Robinson: In Sputtering by Particle Bombardment I, ed. by R. Behrisch, Topics Appl. Phys., Vol. 47 (Springer, Berlin, Heidelberg 1981) p. 73

    Google Scholar 

  28. H. Roosendaal: In [1.27], p. 219

    Google Scholar 

  29. P. Sigmund: In [1.27], p. 9

    Google Scholar 

  30. J.A. Brinkmann: J. Appl. Phys. 25, 961 (1954)

    Google Scholar 

  31. A. Seeger (ed.): Moderne Probleme der Metallphysik (Springer, Berlin, Heidelberg 1965)

    Google Scholar 

  32. R.S. Averbeck, T. Diaz de la Rubia, R. Benedeck: Nucl. Instrum. Methods B 33, 693 (1988)

    Google Scholar 

  33. J. Roth, J. Bohdansky, W. Poschenrieder, M.K. Sinha: J. Nucl. Mater. 63, 222 (1976)

    Google Scholar 

  34. J. Roth: In [1.16], p. 91

    Google Scholar 

  35. J. Roth, J. Bohdansky, K.L. Wilson: J. Nucl. Mater 111 & 112, 775 (1982)

    Google Scholar 

  36. J. Roth: In [1.5], p. 389

    Google Scholar 

  37. P. Sigmund: Phys. Rev. 184, 383 (1969)

    Google Scholar 

  38. H.M. Urbassek: Nucl. Instrum. Methods B 36, 585 (1988)

    Google Scholar 

  39. D.D. Jackson: In Proc. Symposium on Sputtering (SOS) ed. by P. Varga, G. Betz, F.P. Viehböck (Technische Universität Wien 1980) p. 2

    Google Scholar 

  40. J. Biersack, W. Eckstein: Appl. Phys. A 34, 73 (1984)

    Google Scholar 

  41. W. Eckstein, W. Müller: Nucl. Instrum. Methods B 7, 272 (1985)

    Google Scholar 

  42. H.H. Andersen: Nucl. Instrum. Methods B 18, 321 (1987)

    Google Scholar 

  43. Y. Yamamura, W. Takeuchi: Nucl. Instrum. Methods B 29, 461 (1987)

    Google Scholar 

  44. J.L. Likonen, M. Hautala: Appl. Phys. A 45, 137 (1988)

    Google Scholar 

  45. B.J. Garrison, N. Winograd, D.M. Deaven, C.T. Reimann, D.Y. Lo, T.A. Tombrello, D.E. Harrison Jr., M.H. Shapiro: Phys. Rev. B 37, 7197 (1988)

    Google Scholar 

  46. D.E. Harrison, Jr.: In CRC Critical Reviews in Solid State and Materials Sciences, Vol. 14, ed. by J.E. Greene, Supplement S1, (1988)

    Google Scholar 

  47. W. Eckstein: Computer Simulation of Ion-Solid Interactions, Springer Ser. Mater. Sci., Vol. 10 (Springer, Berlin, Heidelberg 1991) and private communication (1989)

    Google Scholar 

  48. K.L. Merkle, W. Jäger: Philos. Mag. A 44, 741 (1981)

    Google Scholar 

  49. I.H. Wilson, N.J. Zeng, U. Knipping, I.S.T. Tsong: Phys. Rev. B 38, 8444 (1988); Appl. Phys. Lett. 53, 2039 (1988)

    Google Scholar 

  50. P.D. Townsend: In [1.16], p. 147

    Google Scholar 

  51. R. Behrisch: In [1.16], p. 179

    Google Scholar 

  52. H.H. Andersen, H. Bay: In [1.27], p. 135

    Google Scholar 

  53. W. Eckstein, J. Biersack: Z. Phys. B 63, 109 (1986)

    Google Scholar 

  54. R.V. Stuart, G.K. Wehner: J. Appl. Phys. 33, 2345 (1962)

    Google Scholar 

  55. Y. Yamamura, J. Bohdansky: Vacuum 35, 561 (1985)

    Google Scholar 

  56. K. Besocke, S. Berger, W.O. Hofer, U. Littmark: Radiat. Eff. 66, 35 (1982)

    Google Scholar 

  57. J. Bohdansky, H. Lindner, E. Hechtl, A.P. Martinelli, J. Roth: Nucl. Instrum. Methods B 18, 509 (1987)

    Google Scholar 

  58. J.S. Colligon: In Atomic Collision Phenomena in Solids, ed. by D.W. Palmer, M.W. Thompson, P.D. Townsend (North-Holland, Amsterdam 1970)

    Google Scholar 

  59. R. Behrisch, J. Roth, J. Bohdansky, A.P. Martinelli, B. Schweer, D. Rusbüld, E. Hinz: J. Nucl. Mater. 93 & 94, 645 (1980)

    Google Scholar 

  60. J.E. Westmoreland, P. Sigmund: Radiat. Eff: 6, 187 (1970)

    Google Scholar 

  61. D.E. Harrison: Radiat. Eff. 70, 1 (1983)

    Google Scholar 

  62. W. Eckstein: Nucl. Instrum. Methods B 33, 489 (1988)

    Google Scholar 

  63. G. Staudenmaier: Radiat Eff. 13, 87 (1972)

    Google Scholar 

  64. M.W. Thompson: Philos. Mag. 18, 377 (1968)

    Google Scholar 

  65. G.K. Wehner: Phys. Rev. 102, 690 (1956)

    Google Scholar 

  66. G. Betz, G.K. Wehner: In [1.16], p. 11

    Google Scholar 

  67. A. Benninghoven, F.G. Rüdenauer, H.W. Werner (eds.): Secondary Ion Mass Spectrometry (Wiley, New York 1987)

    Google Scholar 

  68. V.R. Deline, W. Katz, C.A. Evans, Jr., P. Williams: Appl. Phys. Lett. 33, 832 (1978)

    Google Scholar 

  69. Y. Homma, K. Wittmaack: J. Appl. Phys. 65, 5061 (1989)

    Google Scholar 

  70. H. Oechsner: In Thin Film and Depth Profile Analysis, ed. by H. Oechsner (Springer, Berlin, Heidelberg 1984) p. 63

    Google Scholar 

  71. G. Blaise: Scanning Electron Microsc. 1, 31 (1985)

    Google Scholar 

  72. H. Gnaser, J. Fleischhauer, H.O. Hofer: Appl. Phys. A 37, 211 (1985)

    Google Scholar 

  73. D. Lipinski, R. Jede, O. Ganschow, A. Benninghoven: J. Vac. Sci. Technol. A 3, 2007 (1985)

    Google Scholar 

  74. G.S. Hurst, M.G. Payne, S.D. Kramer, J.P. Young: Rev. Mod. Phys. 51, 767 (1979)

    Google Scholar 

  75. C.H. Becker, K.T. Gillen: Anal. Chem. 56, 1671 (1984)

    Google Scholar 

  76. A. Wucher, W. Reuter: J. Vac. Sci. Technol. A 6, 2316 (1988)

    Google Scholar 

  77. W. Reuter: In Secondary Ion Mass Spectrometry SIMS V, ed. by A. Benninghoven, R.J. Colton, D.S. Simons, H.W. Werner (Springer, Berlin, Heidelberg 1986) p. 94

    Google Scholar 

  78. R. Castaing, G. Slodzian: J. de Microsc. 1, 359 (1962)

    Google Scholar 

  79. H. Liebl: J. Appl. Phys. 38, 5277 (1967)

    Google Scholar 

  80. C.C. Chang: In Characterisation of Solid Surfaces, ed. by R.F. Kane, G.B. Larrabee (Plenum, New York 1974) p. 509

    Google Scholar 

  81. D. Briggs, M.P. Seah: Practical Surface Analysis by Auger and X-Ray Photoelectron Spectroscopy (Wiley, Chichester 1983)

    Google Scholar 

  82. T.M. Buck: In Methods of Surface Analysis, ed. by A.W. Czanderna (Elsevier, Amsterdam 1975) p. 75

    Google Scholar 

  83. E. Taglauer, W. Heiland: Appl. Phys. 9, 261 (1976)

    Google Scholar 

  84. W.K. Chu, J.W. Mayer, M.-A. Nicolet: Backscattering Spectrometry (Academic, New York 1978)

    Google Scholar 

  85. K. Wittmaack, N. Menzel: Appl. Phys. Lett. 53, 1708 (1988)

    Google Scholar 

  86. U. Littmark, W.O. Hofer: Nucl. Instrum. Methods 168, 329 (1980)

    Google Scholar 

  87. K. Wittmaack: Vacuum 34, 119 (1984)

    Google Scholar 

  88. L.E. Rehn, N.Q. Lam, H. Wiedersich: Nucl. Instrum. Methods B 7/8, 764 (1985)

    Google Scholar 

  89. P. Sigmund: Nucl. Instrum. Methods B 18, 375 (1987)

    Google Scholar 

  90. C.A. Andersen: Int. J. Mass Spectrom. Ion Phys. 2, 61, (1969); ibid. 3, 413 (1970)

    Google Scholar 

  91. K. Wittmaack: Surface Sci. 112, 186 (1981); ibid. 126, 573 (1983)

    Google Scholar 

  92. G. Carter, B. Navinsek, J.L. Whitton: In [1.16], p. 231

    Google Scholar 

  93. A. Zalar: Surf. Interf. Anal. 9, 41 (1986)

    Google Scholar 

  94. S. Duncan, R. Smith, D.E. Sykes, J.M. Walls: Vacuum 34, 145 (1984)

    Google Scholar 

  95. F.A. Stevie, P.M. Kohara, D.S. Simons, P. Chi: J. Vac. Sci. Technol. A 6, 76 (1988)

    Google Scholar 

  96. A. Karen, K. Okuno, F. Soeda, A. Ishitani: In Secondary Ion Mass Spectrometry SIMS VII ed. by A. Benninghoven, C.A. Evans, K.D. McKeegan, H.A. Storms, H.W. Werner (Wiley, Chichester 1990) p. 139 and private communication

    Google Scholar 

  97. A. Benninghoven: Z. Phys. 239, 403 (1970)

    Google Scholar 

  98. A. Benninghoven, D. Jaspers, W. Sichtermann: Appl. Phys. 11, 35 (1976)

    Google Scholar 

  99. D.F. Torgerson, R.P. Skowronski, R.D. Macfarlane: Biophys. Res. Commun. 60, 616 (1974)

    Google Scholar 

  100. A. Hedin, P. Håkonnson, M. Salehpour, B.M.U. Sundqvist: Phys. Rev. B 35, 7377 (1987)

    Google Scholar 

  101. R.D. Macfarlane, D. Uemura, K. Ueda, Y. Hirafa: J. Am. Chem. Soc. 102, 875 (1980)

    Google Scholar 

  102. G.K. Wehner, D.J. Hajieck: J. Appl. Phys. 42, 1145 (1971)

    Google Scholar 

  103. P.J. Goodhew: Thin Foil Preparation for Electron Microscopy, Vol II, Practical Methods in Electron Microscopy, ed. by A.M. Gauert (Elsevier, Amsterdam 1985)

    Google Scholar 

  104. B.A. Free, G.A. Meadows: J. Vac. Sci. Technol. 15, 1028 (1978)

    Google Scholar 

  105. W. Hauffe: Elektronika 26, 3 (1985)

    Google Scholar 

  106. W. Hauffe: Proc. VIIIth Europ. Conf. Electron Microscopy (Budapest 1984) p. 105

    Google Scholar 

  107. H.F. Winters: Topics Curr. Chem. 90, 69 (1980)

    Google Scholar 

  108. J.L. Vossen, W. Kern (eds.): Thin Film Processes (Academic, New York 1978)

    Google Scholar 

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  1. Rainer Behrisch
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  2. Klaus Wittmaack
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Rainer Behrisch Klaus Wittmaack

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Behrisch, R., Wittmaack, K. (1991). Introduction. In: Behrisch, R., Wittmaack, K. (eds) Sputtering by Particle Bombardment III. Topics in Applied Physics, vol 64. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3540534288_15

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