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Applications of excimer systems

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Excimer Lasers

Part of the book series: Topics in Applied Physics ((TAP,volume 30))

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Authors
  1. K. Hohla
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  2. H. Pummer
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  3. Ch. K. Rhodes
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Charles K. Rhodes

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© 1979 Springer-Verlag

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Hohla, K., Pummer, H., Rhodes, C.K. (1979). Applications of excimer systems. In: Rhodes, C.K. (eds) Excimer Lasers. Topics in Applied Physics, vol 30. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3540130136_24

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  • DOI: https://doi.org/10.1007/3540130136_24

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  • Print ISBN: 978-3-540-13013-0

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