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Theoretical aspects of monocrystal sputtering

  • Mark T. Robinson
Chapter
Part of the Topics in Applied Physics book series (TAP, volume 47)

Keywords

Theoretical Aspect Target Atom Morse Potential Initial Kinetic Energy Collision Cascade 
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References

  1. 3.1
    J. Stark, G. Wendt: Ann. Phys. (Leipzig) 38, 921–940 (1912)Google Scholar
  2. 3.1a
    R. Behrisch (ed.): Sputtering by Particle Bombardment, III, Topics in Applied Physics (Springer, Berlin, Heidelberg, New York 1981) (to be published)Google Scholar
  3. 3.2
    J. Stark, G. Wendt: Ann. Phys. (Leipzig) 38, 941–957 (1912)Google Scholar
  4. 3.3
    J. Stark: Phys. Z. 13, 973–977 (1912)Google Scholar
  5. 3.4
    G.K.Wehner: J. Appl. Phys. 26; 1056–1057 (1955)CrossRefGoogle Scholar
  6. 3.5
    G. K. Wehner: Phys. Rev. 102, 690–704 (1956)CrossRefGoogle Scholar
  7. 3.6
    R. H. Silsbee: J. Appl. Phys. 28, 1246–1250 (1957)CrossRefGoogle Scholar
  8. 3.7
    P. K. Rol, J. M. Fluit, F.P. Viehbock, M. de Jong: In Proc. 4th Intern. Conf Ionization Phenomena in Gases, ed. by N. R. Nilsson (North-Holland, Amsterdam 1960) pp. 257–279Google Scholar
  9. 3.8
    O. Almén, G. Bruce: Nucl. Instrum. Methods 11, 257–278 (1961)CrossRefGoogle Scholar
  10. 3.9
    V. A. Molchanov, V. G. Tel'kovski, V. M. Chicherov: Doklady Akad. Nauk S.S.S.R. 137, 158–159 (1961) [Engl. transl.: Sov. Phys.-Doklady 6, 222–223 (1961)]Google Scholar
  11. 3.10
    P. K. Rol, J. M. Fluit, J. Kistemaker: Physica 26, 1009–1011 (1960)CrossRefGoogle Scholar
  12. 3.11
    M. T. Robinson: Appl. Phys. Lett. 1, 49–51 (1962)CrossRefGoogle Scholar
  13. 3.12
    M. T. Robinson, O. S. Oen: Appl. Phys. Lett. 2, 30–32 (1963)CrossRefGoogle Scholar
  14. 3.13
    M. T. Robinson, O. S. Oen: Phys. Rev. 132, 2385–2398 (1963)CrossRefGoogle Scholar
  15. 3.14
    G. R. Piercy, F. Brown, J. A. Davies, M. McCargo: Phys. Rev. Lett. 10, 399–400 (1963)CrossRefGoogle Scholar
  16. 3.15
    H. Lutz, R. Sizmann: Phys. Lett. 5, 113–114 (1963)CrossRefGoogle Scholar
  17. 3.16
    R. S. Nelson, M. W. Thompson: Philos. Mag. 8, 1677–1689 (1963)Google Scholar
  18. 3.17
    C. Lehmann, P. Sigmund: Phys. Stat. Sol. 16, 507–511 (1966)Google Scholar
  19. 3.18
    C. H. Weijsenfeld: “Yield, Energy, and Angular Distribution of Sputtered Atoms”; Thesis, Utrecht, (1966); Philips Research Reports Supplements 1967, No. 2Google Scholar
  20. 3.19
    J. B. Gibson, A. N. Goland, M. Milgram, G. H. Vineyard: Phys. Rev. 120, 1229–1253 (1960)CrossRefGoogle Scholar
  21. 3.20
    D. E. Harrison, Jr., N. S. Levy, J. P. Johnson, III, H. M. Effron: J. Appl. Phys. 39, 3742–3761 (1968)CrossRefGoogle Scholar
  22. 3.21
    E. A. Wood: J. Appl. Phys. 35, 1306–1312 (1964)CrossRefGoogle Scholar
  23. 3.22
    J. A. Strozier, Jr., D. W. Jepsen, F.Jona: In Surface Physics of Materials, Vol. 1, ed. by J. M. Blakeley (Academic, New York 1975) pp. 1–77Google Scholar
  24. 3.23
    G. A. Somorjai: In Treatise on Solid State Chemistry, Volume 6A, Surfaces I, ed. by N. B. Hannay (Plenum, New York 1976) pp. 1–55Google Scholar
  25. 3.24
    E. G. McRae, H. D. Hagstrum: In Treatise on Solid State Chemistry, Vol. 6A, Surfaces I, ed. by N. B. Hannay (Plenum, New York 1976)Google Scholar
  26. 3.25
    T. Rhodin, D. Adams: In Electronic Structure and Reactivity of Metal Surfaces, ed. by E. G. Derouane, A. A. Lucas (Plenum, New York 1976) pp. 1–34Google Scholar
  27. 3.26
    G. E. Rhead: In Electronic Structure and Reactivity of Metal Surfaces, ed. by E. G. Derouane, A. A. Lucas (Plenum, New York 1976) pp. 229–266Google Scholar
  28. 3.27
    S. Andersson: In Electronic Structure and Reactivity of Metal Surfaces, ed. by E. G. Derouane, A. A. Lucas (Plenum, New York 1976) pp. 289–339Google Scholar
  29. 3.28
    F.Jona: J. Phys. C11, 4271–4306 (1978)Google Scholar
  30. 3.29
    D. M. Zehner, B. R. Appleton, T. S. Noggle, J. W. Miller, J. H. Barrett, L. H. Jenkins, O. E. Schow, III: J. Vac. Sci. Technol. 12, 454–457 (1975)CrossRefGoogle Scholar
  31. 3.30
    P.Wynnblatt, N.A.Gjostein: Surf. Sci. 12, 109–127 (1968)CrossRefGoogle Scholar
  32. 3.31
    D.P.Jackson: Can. J. Phys. 49, 2093–2097 (1971)Google Scholar
  33. 3.32
    L. A. Girifalco, V. G. Weizer: Phys. Rev. 114, 687–690 (1959)CrossRefGoogle Scholar
  34. 3.33
    M. W. Finnis, V. Heine: J. Phys. F4, L37–L41 (1974)CrossRefGoogle Scholar
  35. 3.34
    R.A.Johnson, P.J.White: Phys. Rev. B13, 5293–5302 (1976)Google Scholar
  36. 3.35
    M. G. Lagally: In Surface Physics of Materials, Vol. 2, ed. by J. M. Blakeley (Academic, New York 1975) pp. 419–473Google Scholar
  37. 3.36
    J. F. Nicholas: An Atlas of Models of Crystal Surfaces (Gordon and Breach, New York, 1965)Google Scholar
  38. 3.37
    H. E. Farnsworth, R. E. Schlier, T. H. George, R. M. Burger: J. Appl. Phys. 26,252–253 (1955)CrossRefGoogle Scholar
  39. 3.38
    H. E. Farnsworth, K. Hayek: Surf. Sci. 8, 35–56 (1967)CrossRefGoogle Scholar
  40. 3.39
    J.J. Bellina, H. E. Farnsworth: J. Vac. Sci. Technol. 9, 616–619 (1972)CrossRefGoogle Scholar
  41. 3.40
    W. Heiland, E. Taglauer: Radiat. Eff. 19, 1–6 (1973)Google Scholar
  42. 3.41
    A. Chutjian: Phys. Lett. 24A, 615–616 (1967)Google Scholar
  43. 3.42
    P. J. Estrup, E. G. McRae: Surf. Sci. 25, 1–52 (1971)CrossRefGoogle Scholar
  44. 3.43
    D. M. Zehner: Oak Ridge National Laboratory (unpublished results)Google Scholar
  45. 3.44
    J. W. Mayer, L. Eriksson, J. A. Davies: Ion Implantation in Semiconductors (Academic, New York 1970) pp. 76–97Google Scholar
  46. 3.45
    G. S. Anderson, G. K. Wehner: Surf. Sci. 2, 367–375 (1964)CrossRefGoogle Scholar
  47. 3.46
    G. S. Anderson: J. Appl. Phys. 37, 2838–2840 (1966)CrossRefGoogle Scholar
  48. 3.47
    R. Hultgren, P. D. Desai, D. T. Hawkins, M. Gleiser, K. K. Kelley, D. D. Wagman: Selected Yalues of the Thermodynamic Properties of the Elements (American Society for Metals, Metals Park, Ohio, USA, 1973)Google Scholar
  49. 3.48
    G. M. Rosenblatt: In Treatise on Solid State Chemistry, Volume 6A, Surfaces I, ed. by N. B. Hannay (Plenum, New York 1976) pp. 165–240Google Scholar
  50. 3.49
    D.P.Jackson: Radiat. Eff. 18, 185–189 (1973)Google Scholar
  51. 3.50
    P. Sigmund: Phys. Rev. 184, 383–416 (1969)CrossRefGoogle Scholar
  52. 3.51
    J. A. Appelbaum: In Surface Physics of Materials, Vol. 1, ed. by J. M. Blakely (Academic, New York and London, 1975) pp. 79–119Google Scholar
  53. 3.52
    G. Allan: In Electronic Structure and Reactivity of Metal Surfaces, ed. by E. G. Derouane, A. A. Lucas (Plenum, New York 1976) pp. 45–79Google Scholar
  54. 3.53
    N. D. Lang: In Electronic Structure and Reactivity of Metal Surfaces, ed. by E. G. Derouane and A. A. Lucas (Plenum, New York 1976) pp. 80–111Google Scholar
  55. 3.54
    H. J. Leamy, G. H. Gilmer, K. A. Jackson: In Surface Physics of Materials, ed. by J. M. Blakely (Academic, New York 1975) Vol. 1, pp. 121–188Google Scholar
  56. 3.55
    M. W. Thompson: Philos. Mag. 18, 377–414 (1968)Google Scholar
  57. 3.56
    J.Politiek, J.Kistemaker: Radiat. Eff. 2, 129–131 (1969)Google Scholar
  58. 3.57
    H.Oechsner: Z. Phys. 233, 433–451 (1970)Google Scholar
  59. 3.58
    E. B. Henschke: Phys. Rev. 106, 737–753 (1957)CrossRefGoogle Scholar
  60. 3.59
    E. Langberg: Phys. Rev. 111, 91–97 (1958)CrossRefGoogle Scholar
  61. 3.60
    D. E. Harrison, G. D. Magnuson: Phys. Rev. 122, 1421–1430 (1961)CrossRefGoogle Scholar
  62. 3.61
    R. N. Schlaug: “Sputtering Calculations from a Realistic Model”, Thesis, University of California, Berkeley 1965 (University Microfilms, Inc., Ann Arbor, Michigan 1966)Google Scholar
  63. 3.62
    D.P.Jackson: Can. J. Phys. 53, 1513–1523 (1975)Google Scholar
  64. 3.63
    D. Cherns, M. W. Finnis, M. D. Mathews: Philos. Mag. 35, 693–714 (1977)Google Scholar
  65. 3.64
    D. E. Harrison, Jr., P. W. Kelly, B. J. Garrison, N. Winograd: Surf. Sci. 76, 311–322 (1978)CrossRefGoogle Scholar
  66. 3.65
    S. Datz, C. Erginsoy, G. Leibfried, H.O. Lutz: Ann. Rev. Nucl. Sci. 17, 129–188 (1967)CrossRefGoogle Scholar
  67. 3.66
    D. V. Morgan (ed.): Channeling: Theory, Observations, and Applications (John Wiley & Sons, London 1973)Google Scholar
  68. 3.67
    D.S.Gemmel: Rev. Mod. Phys. 46,129–227 (1974)CrossRefGoogle Scholar
  69. 3.68
    A. L. Southern, W. R. Willis, M. T. Robinson: J. Appl. Phys. 34, 153–163 (1963)CrossRefGoogle Scholar
  70. 3.69
    J. M. Fluit, P. K. Rol, J. Kistemaker: J. Appl. Phys. 34, 690–691 (1963)CrossRefGoogle Scholar
  71. 3.70
    G. D. Magnuson, C. E. Carlston: J. Appl. Phys. 34, 3267–3273 (1963)CrossRefGoogle Scholar
  72. 3.71
    D.D.Odintsov: Fiz. Tverd. Tela 5, 1114–1116 (1963) [Engl. transl.: Sov. Phys.-Solid State 5, 813–815 (1963)]Google Scholar
  73. 3.72
    Yu. V. Martynenko: Fiz. Tverd. Tela 6, 2003–2009 (1964) [Engl. transl.: Sov. Phys.-Solid State 6, 1581–1585 (1965)]Google Scholar
  74. 3.73
    H. P. Smith, Jr.: J. Appl. Phys. 35, 2522–2524 (1964)CrossRefGoogle Scholar
  75. 3.74
    D.Onderdelinden: Appl. Phys. Lett. 8, 189–190 (1966)CrossRefGoogle Scholar
  76. 3.75
    D. Onderdelinden, F. W. Saris, P. K. Rol: In Proc. 7th Intern. Conf. Phenomena in Ionized Gases, Vol. 1 (Gradevinska Knjiga, Beograd 1966) pp. 157–161Google Scholar
  77. 3.76
    D.Onderdelinden: Proc. Conf. Applications of Ion Beams to Semiconductor Technology Grenoble, ed. by P. Glotin (Editions Orphrys, Gap, France 1967) pp. 389–395Google Scholar
  78. 3.77
    D.Onderdelinden: Can. J. Phys. 46, 739–745 (1968)Google Scholar
  79. 3.78
    D.Onderdelinden: “Sputtering of F.C.C. Metals”; Thesis, Leiden (1968)Google Scholar
  80. 3.79
    J. J. P. Elich, H. E. Roosendaal: Radiat. Eff. 10, 175–184 (1971)Google Scholar
  81. 3.80
    J. J. P. Elich, H. E. Roosendaal, D. Onderdelinden: Radiat. Eff. 14, 93–100 (1972)Google Scholar
  82. 3.81
    J. Lindhard: Phys. Lett. 12, 126–128 (1964)Google Scholar
  83. 3.82
    J. Lindhard: K. Dan. Vidensk. Selsk. Mat. Fys. Medd. 34, No. 14 (1965)Google Scholar
  84. 3.83
    J. D. H. Donnay, G. Donnay: In International Tables for X-Ray Crystallography, ed. by J. S. Kaspar, K. Lonsdale(InternationalUnionofCrystallography,KynochPress, Birmingham, U.K. 1959) Vol. 2, pp. 99–158Google Scholar
  85. 3.84
    A.L.Patterson, J.S.Kaspar: In International Tables for X-ray Crystallography, ed. by J. S. Kaspar, K. Lonsdale (International Union of Crystallography, Kynoch Press, Birmingham, U.K. 1959) Vol. 2, pp. 342–354Google Scholar
  86. 3.85
    J. F. Nicholas: Acta Crystallogr. 21, 880–881 (1966)CrossRefGoogle Scholar
  87. 3.86
    C. Lehmann, G. Leibfried: Z. Phys. 172, 465–487 (1963)CrossRefGoogle Scholar
  88. 3.87
    C. Lehmann, G. Leibfried: J. Appl. Phys. 34, 2821–2836 (1963)CrossRefGoogle Scholar
  89. 3.88
    J. Lindhard, V. Nielsen, M. Scharff: K. Dan. Vidensk. Selsk. Mat. Fys. Medd. 36, No. 10 (1968)Google Scholar
  90. 3.89
    O. B. Firsov: Zh. Eksp. Teor. Fiz. 33,696–699 (1957) [Engl. transl.: Sov. Phys.-JETP 6, 534–537 (1958)]Google Scholar
  91. 3.90
    J.H.Barrett: Phys. Rev. B3, 1527–1547 (1971)Google Scholar
  92. 3.91
    M. Hou, M.T. Robinson: Appl. Phys. 17, 371–375 (1978)CrossRefGoogle Scholar
  93. 3.92
    M. Balarin, V. A. Molchanov, V. G. Tel'kovskii: Dokl. Akad. Nauk S.S.S.R. 147, 331–333 (1962) [Engl. transl.: Sov. Phys.-Doklady 7, 1005–1007 (1963)]Google Scholar
  94. 3.93
    M. T. Robinson, A. L. Southern: J. Appl. Phys. 38, 2696–2973 (1967)CrossRefGoogle Scholar
  95. 3.94
    T. W. Snouse, L. C. Haughney: J. Appl. Phys. 37, 700–704 (1966)CrossRefGoogle Scholar
  96. 3.95
    M.T.Robinson, A.L.Southern: J. Appl. Phys. 39, 3563–3475 (1968)CrossRefGoogle Scholar
  97. 3.96
    J.H.Barrett: Phys. Rev. Lett. 31, 1542–1545 (1973)CrossRefGoogle Scholar
  98. 3.97
    G.J.Ogilvie, J.V.Sanders, A.A.Thomson: J. Phys. Chem. Solids 24, 247–259 (1963)CrossRefGoogle Scholar
  99. 3.98
    E.J.Zdanuk, S.P.Wolsky: J. Appl. Phys. 36, 1683–1687 (1965)CrossRefGoogle Scholar
  100. 3.99
    T.H.Blewitt, M.A.Kirk, T.L.Scott: In Fundamental Aspects of Radiation Damage in Metals, Vol. 1, ed. by M.T.Robinson, F.W.Young, Jr. (U.S. Energy Research and Development Administration, Oak Ridge, Tenn. 1975) pp. 156–170Google Scholar
  101. 3.100
    M.A.Kirk, T.H.Blewitt, T.L.Scott: Phys. Rev. B 15, 2914–2922 (1977)CrossRefGoogle Scholar
  102. 3.101
    D.N.Seidman: In Radiation Damage in Metals, ed. by N.L.Peterson, S.D.Harkness (Amer. Soc. for Metals, Metals Park, Ohio 1976) pp. 28–57Google Scholar
  103. 3.102
    K.H.Ecker: Radiat. Eff. 23,171–180 (1974)Google Scholar
  104. 3.103
    G.Ayrault, R.S.Averback, D.N.Seidman: Scr. Metall. 12, 119–123 (1978)CrossRefGoogle Scholar
  105. 3.104
    H.Goldstein: Classical Mechanics (Addison-Wesley, Reading, Mass. 1959) pp. 58–89Google Scholar
  106. 3.105
    M.Born, J.E.Mayer: Z. Phys. 75, 1–18 (1932)CrossRefGoogle Scholar
  107. 3.106
    G.Moliére: Z. Naturforsch. 2a, 133–145 (1947)Google Scholar
  108. 3.107
    P.Gombás: In Handbuch der Physik, ed. by S.Flügge (Springer-Verlag, Berlin, 1956), Vol. 36, pp. 109–231Google Scholar
  109. 3.108
    H.H.Andersen, P.Sigmund: Nucl. Instrum. Methods 38, 238–240 (1965)CrossRefGoogle Scholar
  110. 3.109
    H.H.Andersen, P.Sigmund: “On the Determination of Interatomic Potentials in Metals by Electron Irradiation Experiments”, Danish Atomic Energy Commission Report Riso-103 (1965)Google Scholar
  111. 3.110
    M.T.Robinson, I.M.Torrens: Phys. Rev. B 9, 5008–5024 (1974)CrossRefGoogle Scholar
  112. 3.111
    D.J.O'Conner, R.J.MacDonald: Radiat. Eff. 34, 247–250 (1977)Google Scholar
  113. 3.112
    M. T. Robinson: “Tables of Classical Scattering Integrals”, U.S. Atomic Energy Commission Report ORNL-4556 (1970)Google Scholar
  114. 3.113
    G.Leibfried: Bestrahlungseffekte in Festkörpern (G. B.Teubner, Stuttgart 1965) pp. 46–52Google Scholar
  115. 3.114
    G.Leibfried, O.S.Oen: J. Appl. Phys. 33, 2257–2262 (1962)CrossRefGoogle Scholar
  116. 3.115
    C.Lehmann, M.T.Robinson: Phys. Rev. 134, A37–A44 (1964)CrossRefGoogle Scholar
  117. 3.116
    G.Leibfried: J. Appl. Phys. 30, 1388–1396 (1959) and reference 3.113, pp. 214–244. There is an error in Eq. (7.4) of the latter which is corrected in Eq. (3.4.25) of the present textCrossRefGoogle Scholar
  118. 3.117
    W.Hume-Rothery, K.Lonsdale: In International Tables for X-Ray Crystallography, ed. by C.H.MacGillavry, G.D.Rieck (Intern. Union of Crystallography, Kynoch Press, Birmingham, U.K. 1968) Vol. 3, pp. 277–285Google Scholar
  119. 3.118
    R.S.Nelson, M.W.Thompson: Proc. Roy. Soc. (London) A259, 458–470 (1961)Google Scholar
  120. 3.119
    C.Erginsoy, G.H.Vineyard, A.Englert: Phys. Rev. 133, A595–A606 (1964)CrossRefGoogle Scholar
  121. 3.120
    V.M.Agranovich, V.V.Kirsanov: Fiz. Tverd. Tela 12, 2671–2682 (1970) [Engl. transl.: Sov. Phys.-Solid State 12, 2147–2155 (1971)]Google Scholar
  122. 3.121
    D. K. Holmes, M. T. Robinson: Solid State Division Ann. Prog. Report Dec. 31, 1975, U. S. Energy Research and Development Administration Report ORNL-5135 (1976) pp. 16–18Google Scholar
  123. 3.122
    H. H. Andersen, P. Sigmund: K. Dan. Vidensk. Selsk. Mat. Fys. Medd. 34, No. 15 (1966)Google Scholar
  124. 3.123
    M. Hou, M. T. Robinson: Nucl. Instrum. Methods 132, 641–645 (1976)CrossRefGoogle Scholar
  125. 3.124
    R. S. Nelson, M. W. Thompson, H. Montgomery: Philos. Mag. 7,1385–1405 (1962)Google Scholar
  126. 3.125
    J. B. Sanders, J. M. Fluit: Physica 30, 129–143 (1964)CrossRefGoogle Scholar
  127. 3.126
    T.S.Pugacheva: Fiz. Tverd. Tela 9, 102–105 (1967) [Engl. transl.: Sov. Phys.-Solid State 9, 75–77 (1967)]Google Scholar
  128. 3.127
    A.Tenenbaum: Phys. Lett. 63A, 155–157 (1977)Google Scholar
  129. 3.128
    A.Tenenbaum: Philos. Mag. A37, 731–748 (1978)Google Scholar
  130. 3.129
    R. von Jan, R. S. Nelson: Philos. Mag. 17, 1017–1032 (1968)Google Scholar
  131. 3.130
    M. T. Robinson: J. Appl. Phys. 40,4982–4983 (1969)CrossRefGoogle Scholar
  132. 3.131
    K.B.Winterbon: Ion Implantation Range and Energy Deposition Distributions, Vol. 2, Low Incident Ion Energies (IFI/Plenum, New York 1975)Google Scholar
  133. 3.132
    R.J.MacDonald: Philos. Mag. 21, 519–553 (1970)Google Scholar
  134. 3.133
    B.Perovic: Proc. 5th Intern. Conf. Ionization Phenomena in Gases, Vol. 2, ed. by H.Maecker (North-Holland, Amsterdam 1962) pp. 1172–1178Google Scholar
  135. 3.134
    W.O. Hofer: Radiat. Eff. 19, 263–270 (1973)Google Scholar
  136. 3.135
    O.S.Oen: Phys. Lett. 19, 358–359 (1965)CrossRefGoogle Scholar
  137. 3.136
    O.S.Oen: Proc. 7th Intern. Conf. Atomic Collisions in Solids (Moscow, 1977) to be publishedGoogle Scholar
  138. 3.137
    T.Lenskjaer, F.Nyholm, S.D.Pedersen, N.B.Petersen: Phys. Lett. 47A, 63–65 (1974)Google Scholar
  139. 3.138
    N. T.Olson, H. P. Smith, Jr.: Phys. Rev. 157, 241–245 (1967)CrossRefGoogle Scholar
  140. 3.139
    R. G. Musket, H.P. Smith, Jr.: J. Appl. Phys. 39, 3579–3586 (1968)CrossRefGoogle Scholar
  141. 3.140
    R. S. Nelson: J. Appl. Phys. 40, 3859 (1969)CrossRefGoogle Scholar
  142. 3.141
    H.P.Smith, Jr., R.G.Musket: J. Appl. Phys. 40, 3859–3860 (1969)CrossRefGoogle Scholar
  143. 3.142
    M.J.Stott: J. Nucl. Mater. 69/70, 157–175 (1978)CrossRefGoogle Scholar
  144. 3.143
    R. A.Johnson: J. Phys. F3, 295–321 (1973)CrossRefGoogle Scholar
  145. 3.144
    R. A. Johnson: In Computer Simulation for Materials Applications, ed. by R. J. Arsenault, J. R. Beeler, Jr., J. A. Simmons, Nuclear Metallurgy 20, 1–38 (1976)Google Scholar
  146. 3.145
    P. H. Dederichs, C. Lehmann, H. R. Schober, A. Scholz, R. Zeller: J. Nucl. Mater. 69/70,176–199 (1978)CrossRefGoogle Scholar
  147. 3.146
    F. C.Gehlen, J. R. Beeler, Jr., R.I.Jaffee (eds.): Interatomic Potentials and Simulation of Lattice Defects, (Plenum, New York 1972)Google Scholar
  148. 3.147
    D. P. Jackson, D. V.Morgan: Contemp. Phys. 14, 25–48 (1974)Google Scholar
  149. 3.148
    D.P.Jackson: In Atomic Collisions in Solids, Vol. 1, ed. by S.Datz, B. R. Appleton, C. D.Moak (Plenum, New York 1975) pp. 185–197Google Scholar
  150. 3.149
    V. E. Yurasova: Physics of Ionized Gases 1974, ed. by V. Vujnovic (Inst. of Phys., Univ. of Zagreb, Yugoslavia, 1974) pp. 427–476Google Scholar
  151. 3.150
    V. M. Agranovich, V.V. Kirsanov: Usp. Fiz. Nauk. 118, 3–51 (1976) [Engl. transl.: Sov. Phys.Usp. 19, 1-25 (1976)]Google Scholar
  152. 3.151
    C. Erginsoy, G. H. Vineyard, A. Shimizu: Phys. Rev. 139, A118–A125 (1965)CrossRefGoogle Scholar
  153. 3.152
    R.O.Jackson, H.P.Leighly, Jr., D.R.Edwards: Philos. Mag. 25,1169–1193 (1972)Google Scholar
  154. 3.153
    L. T. Chadderton, D. V. Morgan, I. M. Torrens: Phys. Lett. 20, 329–331 (1966)CrossRefGoogle Scholar
  155. 3.154
    L. T.Chadderton, I. M. Torrens: Proc. R. Soc. (London) A294, 93–111 (1966)Google Scholar
  156. 3.155
    I. M. Torrens, L. T. Chadderton: Phys. Rev. 159, 671–682 (1967)CrossRefGoogle Scholar
  157. 3.156
    L.T.Chadderton, I.M.Torrens: Fission Damage in Crystals (Methuen, London 1969) pp. 144–189Google Scholar
  158. 3.157
    A. Scholz, C. Lehmann: Phys. Rev. B6, 813–826 (1972)Google Scholar
  159. 3.158
    P. H. Dederichs, C. Lehmann, A. Scholz: Phys. Rev. Lett. 31, 1130–1132 (1973)CrossRefGoogle Scholar
  160. 3.159
    P.H.Dederichs, C.Lehmann, A.Scholz: Z. Phys. B20, 155–163 (1975)Google Scholar
  161. 3.160
    J. R. Beeler, Jr., M. F. Beeler: Atomic Collisions in Solids, Vol. 1, ed. by S. Datz, B. R. Appleton, C. D. Moak (Plenum, New York 1975) pp. 105–114Google Scholar
  162. 3.161
    J. R. Beeler, Jr., M. F. Beeler: Fundamental Aspects of Radiation Damage in Metals, Vol. 1, ed. by M.T. Robinson, F.W.Young, Jr. (U.S.E.R.D.A. Report CONF-751006, 1975) pp. 21–27Google Scholar
  163. 3.162
    R. N. Stuart, M. W. Guinan, R. J. Borg: Radiat. Eff. 30, 129–133 (1976)Google Scholar
  164. 3.163
    M. W. Guinan, R. N. Stuart, R. J. Borg: Phys. Rev. B15, 699–710 (1977)Google Scholar
  165. 3.164
    J.O. Schiffgens, K. E. Garrison: J. Appl. Phys. 43, 3240–3254 (1972)CrossRefGoogle Scholar
  166. 3.165
    J. O. Schiffgens, D. H. Ashton: J. Appl. Phys. 45, 1023–1039 (1974)CrossRefGoogle Scholar
  167. 3.166
    J.O. Schiffgens, R. D. Borquin: J. Nucl. Mater. 69/70, 790–796 (1978)CrossRefGoogle Scholar
  168. 3.167
    J.O. Schiffgens, to be publishedGoogle Scholar
  169. 3.168
    A. Tenenbaum, N. V. Doan: J. Nucl. Mater. 69/70, 771–775 (1978)CrossRefGoogle Scholar
  170. 3.169
    C. W. Gear: Numerical Initial Value Problems in Ordinary Differential Equations (Prentice-Hall, Englewood Cliffs, N. J. 1971)Google Scholar
  171. 3.170
    L. F. Shampine, M. K. Gordon: Computer Solution of Ordinary Differential Equations: The Initial Value Problem (W. H. Freeman, San Francisco 1975)Google Scholar
  172. 3.171
    H. B. Huntington, F. Seitz: Phys. Rev. 61, 315–325 (1942)CrossRefGoogle Scholar
  173. 3.172
    P. Ehrhart: J. Nucl. Mater. 69/70, 200–214 (1978)CrossRefGoogle Scholar
  174. 3.173
    W. Schilling: J. Nucl. Mater. 69/70, 465–489 (1978)CrossRefGoogle Scholar
  175. 3.174
    F. Seitz: Discuss. Faraday Soc. 5, 271–282 (1949)CrossRefGoogle Scholar
  176. 3.175
    G. H. Kinchin, R. S. Pease: Rep. Prog. Phys. 18, 1–51 (1955)CrossRefGoogle Scholar
  177. 3.176
    H. B. Huntington: Phys. Rev. 93, 1414–1415 (1954)CrossRefGoogle Scholar
  178. 3.177
    P. Jung: In Atomic Collisions in Solids, Vol. 1, ed. by S. Datz, B. R. Appleton, C. D. Moak (Plenum, New York 1975) pp. 87–104Google Scholar
  179. 3.178
    P. Lucasson: Fundamental Aspects of Radiation Damage in Metals, Vol. 1, ed. by M. T. Robinson, F. W. Young, Jr. (U. S. Energy Research and Development Administration Report CONF-751006, 1975) pp. 42–65Google Scholar
  180. 3.179
    P. Vajda: Rev. Mod. Phys. 49, 481–521 (1977)CrossRefGoogle Scholar
  181. 3.180
    D. E. Harrison, Jr., W. L. Moore, Jr., H. T. Holcombe: Radiat. Eff. 17, 167–183 (1973)Google Scholar
  182. 3.181
    D. E. Harrison, C. B. Delaplain: J. Appl. Phys. 47, 2252–2259 (1976)CrossRefGoogle Scholar
  183. 3.182
    N. Winograd, B. J. Garrison, D. E. Harrison, Jr.: Phys. Rev. Lett. 41, 1120–1124 (1978)CrossRefGoogle Scholar
  184. 3.183
    B. M. Garrison, N. Winograd, D. E. Harrison, Jr.: J. Chem. Phys. 69,1440–1444 (1978)CrossRefGoogle Scholar
  185. 3.184
    N. Winograd, D. E. Harrison, Jr., B. J. Garrison: Surf. Sci. 78, 467–477 (1978)CrossRefGoogle Scholar
  186. 3.185
    B. J. Garrison, N. Winograd, D. E. Harrison, Jr.: Phys. Rev. B18, 6000–6010 (1978)Google Scholar
  187. 3.186
    N. S. Bespalova, L. G. Gurvich: Dokl. Akad. Nauk SSSR 202, 804–806 (1972) [Engl. transl. Soviet Physics-Doklady 17, 123–125 (1972)]Google Scholar
  188. 3.187
    D. Cherns, F. J. Minter, R. S. Nelson: Nucl. Instrum. Methods 132, 369–376 (1976)CrossRefGoogle Scholar
  189. 3.188
    D.E.Harrison, Jr., J.P.Johnson, II, N.S.Levy: Appl. Phys. Lett. 8, 33–36 (1966)CrossRefGoogle Scholar
  190. 3.189
    D. E. Harrison, Jr.: J. Appl. Phys. 40, 3870–3872 (1969)CrossRefGoogle Scholar
  191. 3.190
    D. E. Harrison, Jr., W. L. Gay, H. M. Effron: J. Math. Phys. 10, 1179–1184 (1969)CrossRefGoogle Scholar
  192. 3.191
    P. V. Mundkur: “Computer Simulation of Sputtering”, U. S. Atomic Energy Commission Report LBL-3172 (1974)Google Scholar
  193. 3.192
    A. Anderman: “Computer Investigation of Radiation Damage in Crystals”, Air Force Cambridge Research Laboratory Report AFCRL-66–688 (1966) [also known as Atomics International Report AI-66-252 (1966)]Google Scholar
  194. 3.193
    G. D. Magnuson, C. E. Carlston: J. Appl. Phys. 34, 3267–3273 (1963)CrossRefGoogle Scholar
  195. 3.194
    O. S.Oen, M.T. Robinson: J. Appl. Phys. 46, 5069–5071 (1975)CrossRefGoogle Scholar
  196. 3.195
    M. T. Robinson: J. Appl. Phys. 40, 2670 (1969)CrossRefGoogle Scholar
  197. 3.196
    D. E. Harrison,., C. E. Carlston, G. D. Magnuson: Phys. Rev. 139, A737–A745 (1965)CrossRefGoogle Scholar
  198. 3.197
    R. Sizmann, C. Varelas: Nucl. Instrum. Methods 132, 633–638 (1976)CrossRefGoogle Scholar
  199. 3.198
    I. M. Torrens: J. Phys. F3, 1771–1780 (1973)CrossRefGoogle Scholar
  200. 3.199
    D. M. Schwartz, J.O. Schiffgens, D. G. Doran, G. R.Odette, R. G. Ariyasu:In Computer Simulation for Materials Applications, ed. by R. J. Arsenault, J. R. Beeler, Jr., J. A. Simmons, Nucl. Metall. 20, 75–88 (1976)Google Scholar
  201. 3.200
    H. L. Heinisch, J.O. Schiffgens, D. M. Schwartz: J. Nucl. Mater. 85/86,607–610 (1979)CrossRefGoogle Scholar
  202. 3.201
    A. van Veen, J.Haak: Phys. Lett. 40A, 378–380 (1972)Google Scholar
  203. 3.202
    B.Poelsma, L. K. Verhey, A. L. Boers: Surf. Sci. 55, 445–466 (1976)CrossRefGoogle Scholar
  204. 3.203
    M. Yoshida: J. Phys. Soc. Jpn. 16, 44–50 (1961)CrossRefGoogle Scholar
  205. 3.204
    M.T.Robinson, D.K.Holmes, O.S.Oen: Le Bombardement Ionique (Centre Nat. Rech. Sci., Paris 1962) pp. 105–117Google Scholar
  206. 3.205
    O. S.Oen, D. K. Holmes, M. T. Robinson: J. Appl. Phys. 34, 302–312 (1963)CrossRefGoogle Scholar
  207. 3.206
    O. S.Oen, M. T. Robinson: J. Appl. Phys. 34, 2515–2521 (1964)CrossRefGoogle Scholar
  208. 3.207
    J. R. Beeler, Jr., D. G. Besco: Radiation Damage in Solids, Vol. 1, (Intern. Atomic Energy Agency, Vienna 1962) pp. 43–63Google Scholar
  209. 3.208
    J. R. Beeler, Jr., D. G. Besco: J. Phys. Soc. Jpn. 18, Suppl. 111, 159–164 (1963)Google Scholar
  210. 3.209
    J. R. Beeler, Jr., D. G. Besco: J. Appl. Phys. 34, 2873–2878 (1963)CrossRefGoogle Scholar
  211. 3.210
    J. R. Beeler, Jr., D. G. Besco: Phys. Rev. 134, A530–A532 (1964)CrossRefGoogle Scholar
  212. 3.211
    J. R. Beeler, Jr.: J. Appl. Phys. 37, 3000–3009 (1966)CrossRefGoogle Scholar
  213. 3.212
    J. R. Beeler, Jr.: Phys. Rev. 150, 470–487 (1966)CrossRefGoogle Scholar
  214. 3.213
    I. M. Torrens, M. T. Robinson: Interatomic Potentials and Simulation of Lattice Defecta, ed. by P. C. Gehlen, J. R. Beeler, Jr., R. I. Jaffee (Plenum, New York 1972) pp. 423–438Google Scholar
  215. 3.214
    I. M. Torrens, M. T. Robinson: Radiation-Induced Voids in Metals, ed. by J. W. Corbett, L. C. Ianniello (U. S. Atomic Energy Commission, Oak Ridge, Tenn. 1972) pp. 397–429Google Scholar
  216. 3.215
    M. T. Robinson, K. Rössler, I. M. Torrens: J. Chem. Phys. 60, 680–688 (1974)CrossRefGoogle Scholar
  217. 3.216
    O. S.Oen, M. T. Robinson: Application of Ion Beams to Materials 1975, ed. by G. Carter, J. S. Colligon, W. A. Grant (Institute of Physics, London 1976) pp. 329–333Google Scholar
  218. 3.217
    O. S.Oen, M. T. Robinson: Nucl. Instrum. Methods 132, 647–653 (1976)CrossRefGoogle Scholar
  219. 3.218
    O. S.Oen, M. T. Robinson: J. Nuci. Mater. 63, 210–214 (1976)Google Scholar
  220. 3.219
    M. Hou, M. T. Robinson: Appl. Phys. 17, 295–301 (1978)CrossRefGoogle Scholar
  221. 3.220
    M. Hou, M. T. Robinson: Appl. Phys. 18, 381–389 (1979)CrossRefGoogle Scholar
  222. 3.221
    R. Behrisch, G. Maderlechner, B. M. U. Scherzer, M. T. Robinson: Appl. Phys. 18, 391–398 (1979)CrossRefGoogle Scholar
  223. 3.222
    D. V. Morgan, D. van Viiet: Can. J. Phys. 46, 503–516 (1968)Google Scholar
  224. 3.223
    D. V.Morgan, D.P.Jackson: Nucl. Instrum. Methods 132, 153–161 (1976)CrossRefGoogle Scholar
  225. 3.224
    H.J.Pabst: Radiat. Eff. 31, 197–202 (1977)Google Scholar
  226. 3.225
    O. B. Firsov: Zh. Eksp. Teor. Fiz. 36, 1517–1523 (1959) [Engl. transl.: Sov. Phys.-JETP 36, 1076–1080 (1959)]Google Scholar
  227. 3.226
    J. Lindhard, M. Scharff: Phys. Rev. 124, 128–130 (1961)CrossRefGoogle Scholar
  228. 3.227
    M. T. Robinson: Radiation Damage in Metals, ed. by N. L. Peterson, S. D. Harkness (Amer. Soc. Metals, Metals Park, Ohio 1976) pp. 1–57Google Scholar
  229. 3.228
    M. Blackman: “The Specific Heat of Solids”, in Crystal Physics I, ed. by S. Flügge, Encyclopedia of Physics, Vol. 7/1 (Springer, Berlin, Göttingen, Heidelberg 1955) p. 377Google Scholar
  230. 3.229
    D. P. Jackson, J. H. Barrett: Comput. Phys. Commun. 13, 157–166 (1977)CrossRefGoogle Scholar
  231. 3.230
    H.Goldstein: Classical Mechanics (Addison-Wesley, Reading, Mass. 1959) pp. 107–109Google Scholar
  232. 3.231
    E. Taglauer, W. Heiland: Surf. Sci. 33, 27–34 (1972)CrossRefGoogle Scholar
  233. 3.232
    E. S. Mashkova, V. A. Molchanov: Radiat. Eff. 16, 143–187 (1972); 23, 215–270 (1974)Google Scholar
  234. 3.233
    W. Heiland, E. Taglauer: Surf. Sci. 68, 96–107 (1977)CrossRefGoogle Scholar
  235. 3.234
    W. Heiland, E. Taglauer, M. T. Robinson: Nucl. Instrum. Methods 132, 655–660 (1976)CrossRefGoogle Scholar
  236. 3.235
    C.Kittel: Introduction to Solid State Physics (Wiley, New York 1953) p. 57Google Scholar
  237. 3.236
    W. L. Gay, D. E. Harrison, Jr.: Phys. Rev. 135, A1780–A1790 (1964)CrossRefGoogle Scholar
  238. 3.237
    M. T. Robinson, I. M. Torrens: “A Computer Simulation of Sputtering in the Binary Collision Approximation”, unpublished paper presented at Intern. Conf. on Ion-Surface Interaction, Sputtering, and Related Phenomena, Garching bei München, West Germany, 24–27 Sept. 1972Google Scholar
  239. 3.238
    M. T. Robinson: unpublished researchGoogle Scholar
  240. 3.239
    K. Lonsdale: International Tables for X-Ray Crystallography, ed. by C. H. MacGillavry, G. D. Rieck (Intern. Union of Crystallography, Kynoch Press, Birmingham, U. K.1968) Vol. 3, p. 237Google Scholar
  241. 3.240
    G. K. Wehner, R. V. Stuart, D. Rosenberg: unpublished data cited by R. Behrisch, Ergeb. Exakten Naturwiss. 35, 319 (1964)Google Scholar
  242. 3.241
    E. Hotston: Nucl. Fusion 15, 544–547 (1976)Google Scholar
  243. 3.242
    L.L.Tongson, C.B.Cooper: Radiat. Eff. 24, 187–193 (1975).Google Scholar

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© Springer-Verlag 1981

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  • Mark T. Robinson

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