Skip to main content
SpringerLink
Log in

Theoretical aspects of monocrystal sputtering

  • Chapter
  • First Online:
Sputtering by Particle Bombardment I

Part of the book series: Topics in Applied Physics ((TAP,volume 47))

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. J. Stark, G. Wendt: Ann. Phys. (Leipzig) 38, 921–940 (1912)

    Google Scholar 

  2. R. Behrisch (ed.): Sputtering by Particle Bombardment, III, Topics in Applied Physics (Springer, Berlin, Heidelberg, New York 1981) (to be published)

    Google Scholar 

  3. J. Stark, G. Wendt: Ann. Phys. (Leipzig) 38, 941–957 (1912)

    Google Scholar 

  4. J. Stark: Phys. Z. 13, 973–977 (1912)

    Google Scholar 

  5. G.K.Wehner: J. Appl. Phys. 26; 1056–1057 (1955)

    Article  Google Scholar 

  6. G. K. Wehner: Phys. Rev. 102, 690–704 (1956)

    Article  Google Scholar 

  7. R. H. Silsbee: J. Appl. Phys. 28, 1246–1250 (1957)

    Article  Google Scholar 

  8. P. K. Rol, J. M. Fluit, F.P. Viehbock, M. de Jong: In Proc. 4th Intern. Conf Ionization Phenomena in Gases, ed. by N. R. Nilsson (North-Holland, Amsterdam 1960) pp. 257–279

    Google Scholar 

  9. O. Almén, G. Bruce: Nucl. Instrum. Methods 11, 257–278 (1961)

    Article  Google Scholar 

  10. V. A. Molchanov, V. G. Tel'kovski, V. M. Chicherov: Doklady Akad. Nauk S.S.S.R. 137, 158–159 (1961) [Engl. transl.: Sov. Phys.-Doklady 6, 222–223 (1961)]

    Google Scholar 

  11. P. K. Rol, J. M. Fluit, J. Kistemaker: Physica 26, 1009–1011 (1960)

    Article  Google Scholar 

  12. M. T. Robinson: Appl. Phys. Lett. 1, 49–51 (1962)

    Article  Google Scholar 

  13. M. T. Robinson, O. S. Oen: Appl. Phys. Lett. 2, 30–32 (1963)

    Article  Google Scholar 

  14. M. T. Robinson, O. S. Oen: Phys. Rev. 132, 2385–2398 (1963)

    Article  Google Scholar 

  15. G. R. Piercy, F. Brown, J. A. Davies, M. McCargo: Phys. Rev. Lett. 10, 399–400 (1963)

    Article  Google Scholar 

  16. H. Lutz, R. Sizmann: Phys. Lett. 5, 113–114 (1963)

    Article  Google Scholar 

  17. R. S. Nelson, M. W. Thompson: Philos. Mag. 8, 1677–1689 (1963)

    Google Scholar 

  18. C. Lehmann, P. Sigmund: Phys. Stat. Sol. 16, 507–511 (1966)

    Google Scholar 

  19. C. H. Weijsenfeld: “Yield, Energy, and Angular Distribution of Sputtered Atoms”; Thesis, Utrecht, (1966); Philips Research Reports Supplements 1967, No. 2

    Google Scholar 

  20. J. B. Gibson, A. N. Goland, M. Milgram, G. H. Vineyard: Phys. Rev. 120, 1229–1253 (1960)

    Article  Google Scholar 

  21. D. E. Harrison, Jr., N. S. Levy, J. P. Johnson, III, H. M. Effron: J. Appl. Phys. 39, 3742–3761 (1968)

    Article  Google Scholar 

  22. E. A. Wood: J. Appl. Phys. 35, 1306–1312 (1964)

    Article  Google Scholar 

  23. J. A. Strozier, Jr., D. W. Jepsen, F.Jona: In Surface Physics of Materials, Vol. 1, ed. by J. M. Blakeley (Academic, New York 1975) pp. 1–77

    Google Scholar 

  24. G. A. Somorjai: In Treatise on Solid State Chemistry, Volume 6A, Surfaces I, ed. by N. B. Hannay (Plenum, New York 1976) pp. 1–55

    Google Scholar 

  25. E. G. McRae, H. D. Hagstrum: In Treatise on Solid State Chemistry, Vol. 6A, Surfaces I, ed. by N. B. Hannay (Plenum, New York 1976)

    Google Scholar 

  26. T. Rhodin, D. Adams: In Electronic Structure and Reactivity of Metal Surfaces, ed. by E. G. Derouane, A. A. Lucas (Plenum, New York 1976) pp. 1–34

    Google Scholar 

  27. G. E. Rhead: In Electronic Structure and Reactivity of Metal Surfaces, ed. by E. G. Derouane, A. A. Lucas (Plenum, New York 1976) pp. 229–266

    Google Scholar 

  28. S. Andersson: In Electronic Structure and Reactivity of Metal Surfaces, ed. by E. G. Derouane, A. A. Lucas (Plenum, New York 1976) pp. 289–339

    Google Scholar 

  29. F.Jona: J. Phys. C11, 4271–4306 (1978)

    Google Scholar 

  30. D. M. Zehner, B. R. Appleton, T. S. Noggle, J. W. Miller, J. H. Barrett, L. H. Jenkins, O. E. Schow, III: J. Vac. Sci. Technol. 12, 454–457 (1975)

    Article  Google Scholar 

  31. P.Wynnblatt, N.A.Gjostein: Surf. Sci. 12, 109–127 (1968)

    Article  Google Scholar 

  32. D.P.Jackson: Can. J. Phys. 49, 2093–2097 (1971)

    Google Scholar 

  33. L. A. Girifalco, V. G. Weizer: Phys. Rev. 114, 687–690 (1959)

    Article  Google Scholar 

  34. M. W. Finnis, V. Heine: J. Phys. F4, L37–L41 (1974)

    Article  Google Scholar 

  35. R.A.Johnson, P.J.White: Phys. Rev. B13, 5293–5302 (1976)

    Google Scholar 

  36. M. G. Lagally: In Surface Physics of Materials, Vol. 2, ed. by J. M. Blakeley (Academic, New York 1975) pp. 419–473

    Google Scholar 

  37. J. F. Nicholas: An Atlas of Models of Crystal Surfaces (Gordon and Breach, New York, 1965)

    Google Scholar 

  38. H. E. Farnsworth, R. E. Schlier, T. H. George, R. M. Burger: J. Appl. Phys. 26,252–253 (1955)

    Article  Google Scholar 

  39. H. E. Farnsworth, K. Hayek: Surf. Sci. 8, 35–56 (1967)

    Article  Google Scholar 

  40. J.J. Bellina, H. E. Farnsworth: J. Vac. Sci. Technol. 9, 616–619 (1972)

    Article  Google Scholar 

  41. W. Heiland, E. Taglauer: Radiat. Eff. 19, 1–6 (1973)

    Google Scholar 

  42. A. Chutjian: Phys. Lett. 24A, 615–616 (1967)

    Google Scholar 

  43. P. J. Estrup, E. G. McRae: Surf. Sci. 25, 1–52 (1971)

    Article  Google Scholar 

  44. D. M. Zehner: Oak Ridge National Laboratory (unpublished results)

    Google Scholar 

  45. J. W. Mayer, L. Eriksson, J. A. Davies: Ion Implantation in Semiconductors (Academic, New York 1970) pp. 76–97

    Google Scholar 

  46. G. S. Anderson, G. K. Wehner: Surf. Sci. 2, 367–375 (1964)

    Article  Google Scholar 

  47. G. S. Anderson: J. Appl. Phys. 37, 2838–2840 (1966)

    Article  Google Scholar 

  48. R. Hultgren, P. D. Desai, D. T. Hawkins, M. Gleiser, K. K. Kelley, D. D. Wagman: Selected Yalues of the Thermodynamic Properties of the Elements (American Society for Metals, Metals Park, Ohio, USA, 1973)

    Google Scholar 

  49. G. M. Rosenblatt: In Treatise on Solid State Chemistry, Volume 6A, Surfaces I, ed. by N. B. Hannay (Plenum, New York 1976) pp. 165–240

    Google Scholar 

  50. D.P.Jackson: Radiat. Eff. 18, 185–189 (1973)

    Google Scholar 

  51. P. Sigmund: Phys. Rev. 184, 383–416 (1969)

    Article  Google Scholar 

  52. J. A. Appelbaum: In Surface Physics of Materials, Vol. 1, ed. by J. M. Blakely (Academic, New York and London, 1975) pp. 79–119

    Google Scholar 

  53. G. Allan: In Electronic Structure and Reactivity of Metal Surfaces, ed. by E. G. Derouane, A. A. Lucas (Plenum, New York 1976) pp. 45–79

    Google Scholar 

  54. N. D. Lang: In Electronic Structure and Reactivity of Metal Surfaces, ed. by E. G. Derouane and A. A. Lucas (Plenum, New York 1976) pp. 80–111

    Google Scholar 

  55. H. J. Leamy, G. H. Gilmer, K. A. Jackson: In Surface Physics of Materials, ed. by J. M. Blakely (Academic, New York 1975) Vol. 1, pp. 121–188

    Google Scholar 

  56. M. W. Thompson: Philos. Mag. 18, 377–414 (1968)

    Google Scholar 

  57. J.Politiek, J.Kistemaker: Radiat. Eff. 2, 129–131 (1969)

    Google Scholar 

  58. H.Oechsner: Z. Phys. 233, 433–451 (1970)

    Google Scholar 

  59. E. B. Henschke: Phys. Rev. 106, 737–753 (1957)

    Article  Google Scholar 

  60. E. Langberg: Phys. Rev. 111, 91–97 (1958)

    Article  Google Scholar 

  61. D. E. Harrison, G. D. Magnuson: Phys. Rev. 122, 1421–1430 (1961)

    Article  Google Scholar 

  62. R. N. Schlaug: “Sputtering Calculations from a Realistic Model”, Thesis, University of California, Berkeley 1965 (University Microfilms, Inc., Ann Arbor, Michigan 1966)

    Google Scholar 

  63. D.P.Jackson: Can. J. Phys. 53, 1513–1523 (1975)

    Google Scholar 

  64. D. Cherns, M. W. Finnis, M. D. Mathews: Philos. Mag. 35, 693–714 (1977)

    Google Scholar 

  65. D. E. Harrison, Jr., P. W. Kelly, B. J. Garrison, N. Winograd: Surf. Sci. 76, 311–322 (1978)

    Article  Google Scholar 

  66. S. Datz, C. Erginsoy, G. Leibfried, H.O. Lutz: Ann. Rev. Nucl. Sci. 17, 129–188 (1967)

    Article  Google Scholar 

  67. D. V. Morgan (ed.): Channeling: Theory, Observations, and Applications (John Wiley & Sons, London 1973)

    Google Scholar 

  68. D.S.Gemmel: Rev. Mod. Phys. 46,129–227 (1974)

    Article  Google Scholar 

  69. A. L. Southern, W. R. Willis, M. T. Robinson: J. Appl. Phys. 34, 153–163 (1963)

    Article  Google Scholar 

  70. J. M. Fluit, P. K. Rol, J. Kistemaker: J. Appl. Phys. 34, 690–691 (1963)

    Article  Google Scholar 

  71. G. D. Magnuson, C. E. Carlston: J. Appl. Phys. 34, 3267–3273 (1963)

    Article  Google Scholar 

  72. D.D.Odintsov: Fiz. Tverd. Tela 5, 1114–1116 (1963) [Engl. transl.: Sov. Phys.-Solid State 5, 813–815 (1963)]

    Google Scholar 

  73. Yu. V. Martynenko: Fiz. Tverd. Tela 6, 2003–2009 (1964) [Engl. transl.: Sov. Phys.-Solid State 6, 1581–1585 (1965)]

    Google Scholar 

  74. H. P. Smith, Jr.: J. Appl. Phys. 35, 2522–2524 (1964)

    Article  Google Scholar 

  75. D.Onderdelinden: Appl. Phys. Lett. 8, 189–190 (1966)

    Article  Google Scholar 

  76. D. Onderdelinden, F. W. Saris, P. K. Rol: In Proc. 7th Intern. Conf. Phenomena in Ionized Gases, Vol. 1 (Gradevinska Knjiga, Beograd 1966) pp. 157–161

    Google Scholar 

  77. D.Onderdelinden: Proc. Conf. Applications of Ion Beams to Semiconductor Technology Grenoble, ed. by P. Glotin (Editions Orphrys, Gap, France 1967) pp. 389–395

    Google Scholar 

  78. D.Onderdelinden: Can. J. Phys. 46, 739–745 (1968)

    Google Scholar 

  79. D.Onderdelinden: “Sputtering of F.C.C. Metals”; Thesis, Leiden (1968)

    Google Scholar 

  80. J. J. P. Elich, H. E. Roosendaal: Radiat. Eff. 10, 175–184 (1971)

    Google Scholar 

  81. J. J. P. Elich, H. E. Roosendaal, D. Onderdelinden: Radiat. Eff. 14, 93–100 (1972)

    Google Scholar 

  82. J. Lindhard: Phys. Lett. 12, 126–128 (1964)

    Google Scholar 

  83. J. Lindhard: K. Dan. Vidensk. Selsk. Mat. Fys. Medd. 34, No. 14 (1965)

    Google Scholar 

  84. J. D. H. Donnay, G. Donnay: In International Tables for X-Ray Crystallography, ed. by J. S. Kaspar, K. Lonsdale(InternationalUnionofCrystallography,KynochPress, Birmingham, U.K. 1959) Vol. 2, pp. 99–158

    Google Scholar 

  85. A.L.Patterson, J.S.Kaspar: In International Tables for X-ray Crystallography, ed. by J. S. Kaspar, K. Lonsdale (International Union of Crystallography, Kynoch Press, Birmingham, U.K. 1959) Vol. 2, pp. 342–354

    Google Scholar 

  86. J. F. Nicholas: Acta Crystallogr. 21, 880–881 (1966)

    Article  Google Scholar 

  87. C. Lehmann, G. Leibfried: Z. Phys. 172, 465–487 (1963)

    Article  Google Scholar 

  88. C. Lehmann, G. Leibfried: J. Appl. Phys. 34, 2821–2836 (1963)

    Article  Google Scholar 

  89. J. Lindhard, V. Nielsen, M. Scharff: K. Dan. Vidensk. Selsk. Mat. Fys. Medd. 36, No. 10 (1968)

    Google Scholar 

  90. O. B. Firsov: Zh. Eksp. Teor. Fiz. 33,696–699 (1957) [Engl. transl.: Sov. Phys.-JETP 6, 534–537 (1958)]

    Google Scholar 

  91. J.H.Barrett: Phys. Rev. B3, 1527–1547 (1971)

    Google Scholar 

  92. M. Hou, M.T. Robinson: Appl. Phys. 17, 371–375 (1978)

    Article  Google Scholar 

  93. M. Balarin, V. A. Molchanov, V. G. Tel'kovskii: Dokl. Akad. Nauk S.S.S.R. 147, 331–333 (1962) [Engl. transl.: Sov. Phys.-Doklady 7, 1005–1007 (1963)]

    Google Scholar 

  94. M. T. Robinson, A. L. Southern: J. Appl. Phys. 38, 2696–2973 (1967)

    Article  Google Scholar 

  95. T. W. Snouse, L. C. Haughney: J. Appl. Phys. 37, 700–704 (1966)

    Article  Google Scholar 

  96. M.T.Robinson, A.L.Southern: J. Appl. Phys. 39, 3563–3475 (1968)

    Article  Google Scholar 

  97. J.H.Barrett: Phys. Rev. Lett. 31, 1542–1545 (1973)

    Article  Google Scholar 

  98. G.J.Ogilvie, J.V.Sanders, A.A.Thomson: J. Phys. Chem. Solids 24, 247–259 (1963)

    Article  Google Scholar 

  99. E.J.Zdanuk, S.P.Wolsky: J. Appl. Phys. 36, 1683–1687 (1965)

    Article  Google Scholar 

  100. T.H.Blewitt, M.A.Kirk, T.L.Scott: In Fundamental Aspects of Radiation Damage in Metals, Vol. 1, ed. by M.T.Robinson, F.W.Young, Jr. (U.S. Energy Research and Development Administration, Oak Ridge, Tenn. 1975) pp. 156–170

    Google Scholar 

  101. M.A.Kirk, T.H.Blewitt, T.L.Scott: Phys. Rev. B 15, 2914–2922 (1977)

    Article  Google Scholar 

  102. D.N.Seidman: In Radiation Damage in Metals, ed. by N.L.Peterson, S.D.Harkness (Amer. Soc. for Metals, Metals Park, Ohio 1976) pp. 28–57

    Google Scholar 

  103. K.H.Ecker: Radiat. Eff. 23,171–180 (1974)

    Google Scholar 

  104. G.Ayrault, R.S.Averback, D.N.Seidman: Scr. Metall. 12, 119–123 (1978)

    Article  Google Scholar 

  105. H.Goldstein: Classical Mechanics (Addison-Wesley, Reading, Mass. 1959) pp. 58–89

    Google Scholar 

  106. M.Born, J.E.Mayer: Z. Phys. 75, 1–18 (1932)

    Article  Google Scholar 

  107. G.Moliére: Z. Naturforsch. 2a, 133–145 (1947)

    Google Scholar 

  108. P.Gombás: In Handbuch der Physik, ed. by S.Flügge (Springer-Verlag, Berlin, 1956), Vol. 36, pp. 109–231

    Google Scholar 

  109. H.H.Andersen, P.Sigmund: Nucl. Instrum. Methods 38, 238–240 (1965)

    Article  Google Scholar 

  110. H.H.Andersen, P.Sigmund: “On the Determination of Interatomic Potentials in Metals by Electron Irradiation Experiments”, Danish Atomic Energy Commission Report Riso-103 (1965)

    Google Scholar 

  111. M.T.Robinson, I.M.Torrens: Phys. Rev. B 9, 5008–5024 (1974)

    Article  Google Scholar 

  112. D.J.O'Conner, R.J.MacDonald: Radiat. Eff. 34, 247–250 (1977)

    Google Scholar 

  113. M. T. Robinson: “Tables of Classical Scattering Integrals”, U.S. Atomic Energy Commission Report ORNL-4556 (1970)

    Google Scholar 

  114. G.Leibfried: Bestrahlungseffekte in Festkörpern (G. B.Teubner, Stuttgart 1965) pp. 46–52

    Google Scholar 

  115. G.Leibfried, O.S.Oen: J. Appl. Phys. 33, 2257–2262 (1962)

    Article  Google Scholar 

  116. C.Lehmann, M.T.Robinson: Phys. Rev. 134, A37–A44 (1964)

    Article  Google Scholar 

  117. G.Leibfried: J. Appl. Phys. 30, 1388–1396 (1959) and reference 3.113, pp. 214–244. There is an error in Eq. (7.4) of the latter which is corrected in Eq. (3.4.25) of the present text

    Article  Google Scholar 

  118. W.Hume-Rothery, K.Lonsdale: In International Tables for X-Ray Crystallography, ed. by C.H.MacGillavry, G.D.Rieck (Intern. Union of Crystallography, Kynoch Press, Birmingham, U.K. 1968) Vol. 3, pp. 277–285

    Google Scholar 

  119. R.S.Nelson, M.W.Thompson: Proc. Roy. Soc. (London) A259, 458–470 (1961)

    Google Scholar 

  120. C.Erginsoy, G.H.Vineyard, A.Englert: Phys. Rev. 133, A595–A606 (1964)

    Article  Google Scholar 

  121. V.M.Agranovich, V.V.Kirsanov: Fiz. Tverd. Tela 12, 2671–2682 (1970) [Engl. transl.: Sov. Phys.-Solid State 12, 2147–2155 (1971)]

    Google Scholar 

  122. D. K. Holmes, M. T. Robinson: Solid State Division Ann. Prog. Report Dec. 31, 1975, U. S. Energy Research and Development Administration Report ORNL-5135 (1976) pp. 16–18

    Google Scholar 

  123. H. H. Andersen, P. Sigmund: K. Dan. Vidensk. Selsk. Mat. Fys. Medd. 34, No. 15 (1966)

    Google Scholar 

  124. M. Hou, M. T. Robinson: Nucl. Instrum. Methods 132, 641–645 (1976)

    Article  Google Scholar 

  125. R. S. Nelson, M. W. Thompson, H. Montgomery: Philos. Mag. 7,1385–1405 (1962)

    Google Scholar 

  126. J. B. Sanders, J. M. Fluit: Physica 30, 129–143 (1964)

    Article  Google Scholar 

  127. T.S.Pugacheva: Fiz. Tverd. Tela 9, 102–105 (1967) [Engl. transl.: Sov. Phys.-Solid State 9, 75–77 (1967)]

    Google Scholar 

  128. A.Tenenbaum: Phys. Lett. 63A, 155–157 (1977)

    Google Scholar 

  129. A.Tenenbaum: Philos. Mag. A37, 731–748 (1978)

    Google Scholar 

  130. R. von Jan, R. S. Nelson: Philos. Mag. 17, 1017–1032 (1968)

    Google Scholar 

  131. M. T. Robinson: J. Appl. Phys. 40,4982–4983 (1969)

    Article  Google Scholar 

  132. K.B.Winterbon: Ion Implantation Range and Energy Deposition Distributions, Vol. 2, Low Incident Ion Energies (IFI/Plenum, New York 1975)

    Google Scholar 

  133. R.J.MacDonald: Philos. Mag. 21, 519–553 (1970)

    Google Scholar 

  134. B.Perovic: Proc. 5th Intern. Conf. Ionization Phenomena in Gases, Vol. 2, ed. by H.Maecker (North-Holland, Amsterdam 1962) pp. 1172–1178

    Google Scholar 

  135. W.O. Hofer: Radiat. Eff. 19, 263–270 (1973)

    Google Scholar 

  136. O.S.Oen: Phys. Lett. 19, 358–359 (1965)

    Article  Google Scholar 

  137. O.S.Oen: Proc. 7th Intern. Conf. Atomic Collisions in Solids (Moscow, 1977) to be published

    Google Scholar 

  138. T.Lenskjaer, F.Nyholm, S.D.Pedersen, N.B.Petersen: Phys. Lett. 47A, 63–65 (1974)

    Google Scholar 

  139. N. T.Olson, H. P. Smith, Jr.: Phys. Rev. 157, 241–245 (1967)

    Article  Google Scholar 

  140. R. G. Musket, H.P. Smith, Jr.: J. Appl. Phys. 39, 3579–3586 (1968)

    Article  Google Scholar 

  141. R. S. Nelson: J. Appl. Phys. 40, 3859 (1969)

    Article  Google Scholar 

  142. H.P.Smith, Jr., R.G.Musket: J. Appl. Phys. 40, 3859–3860 (1969)

    Article  Google Scholar 

  143. M.J.Stott: J. Nucl. Mater. 69/70, 157–175 (1978)

    Article  Google Scholar 

  144. R. A.Johnson: J. Phys. F3, 295–321 (1973)

    Article  Google Scholar 

  145. R. A. Johnson: In Computer Simulation for Materials Applications, ed. by R. J. Arsenault, J. R. Beeler, Jr., J. A. Simmons, Nuclear Metallurgy 20, 1–38 (1976)

    Google Scholar 

  146. P. H. Dederichs, C. Lehmann, H. R. Schober, A. Scholz, R. Zeller: J. Nucl. Mater. 69/70,176–199 (1978)

    Article  Google Scholar 

  147. F. C.Gehlen, J. R. Beeler, Jr., R.I.Jaffee (eds.): Interatomic Potentials and Simulation of Lattice Defects, (Plenum, New York 1972)

    Google Scholar 

  148. D. P. Jackson, D. V.Morgan: Contemp. Phys. 14, 25–48 (1974)

    Google Scholar 

  149. D.P.Jackson: In Atomic Collisions in Solids, Vol. 1, ed. by S.Datz, B. R. Appleton, C. D.Moak (Plenum, New York 1975) pp. 185–197

    Google Scholar 

  150. V. E. Yurasova: Physics of Ionized Gases 1974, ed. by V. Vujnovic (Inst. of Phys., Univ. of Zagreb, Yugoslavia, 1974) pp. 427–476

    Google Scholar 

  151. V. M. Agranovich, V.V. Kirsanov: Usp. Fiz. Nauk. 118, 3–51 (1976) [Engl. transl.: Sov. Phys.Usp. 19, 1-25 (1976)]

    Google Scholar 

  152. C. Erginsoy, G. H. Vineyard, A. Shimizu: Phys. Rev. 139, A118–A125 (1965)

    Article  Google Scholar 

  153. R.O.Jackson, H.P.Leighly, Jr., D.R.Edwards: Philos. Mag. 25,1169–1193 (1972)

    Google Scholar 

  154. L. T. Chadderton, D. V. Morgan, I. M. Torrens: Phys. Lett. 20, 329–331 (1966)

    Article  Google Scholar 

  155. L. T.Chadderton, I. M. Torrens: Proc. R. Soc. (London) A294, 93–111 (1966)

    Google Scholar 

  156. I. M. Torrens, L. T. Chadderton: Phys. Rev. 159, 671–682 (1967)

    Article  Google Scholar 

  157. L.T.Chadderton, I.M.Torrens: Fission Damage in Crystals (Methuen, London 1969) pp. 144–189

    Google Scholar 

  158. A. Scholz, C. Lehmann: Phys. Rev. B6, 813–826 (1972)

    Google Scholar 

  159. P. H. Dederichs, C. Lehmann, A. Scholz: Phys. Rev. Lett. 31, 1130–1132 (1973)

    Article  Google Scholar 

  160. P.H.Dederichs, C.Lehmann, A.Scholz: Z. Phys. B20, 155–163 (1975)

    Google Scholar 

  161. J. R. Beeler, Jr., M. F. Beeler: Atomic Collisions in Solids, Vol. 1, ed. by S. Datz, B. R. Appleton, C. D. Moak (Plenum, New York 1975) pp. 105–114

    Google Scholar 

  162. J. R. Beeler, Jr., M. F. Beeler: Fundamental Aspects of Radiation Damage in Metals, Vol. 1, ed. by M.T. Robinson, F.W.Young, Jr. (U.S.E.R.D.A. Report CONF-751006, 1975) pp. 21–27

    Google Scholar 

  163. R. N. Stuart, M. W. Guinan, R. J. Borg: Radiat. Eff. 30, 129–133 (1976)

    Google Scholar 

  164. M. W. Guinan, R. N. Stuart, R. J. Borg: Phys. Rev. B15, 699–710 (1977)

    Google Scholar 

  165. J.O. Schiffgens, K. E. Garrison: J. Appl. Phys. 43, 3240–3254 (1972)

    Article  Google Scholar 

  166. J. O. Schiffgens, D. H. Ashton: J. Appl. Phys. 45, 1023–1039 (1974)

    Article  Google Scholar 

  167. J.O. Schiffgens, R. D. Borquin: J. Nucl. Mater. 69/70, 790–796 (1978)

    Article  Google Scholar 

  168. J.O. Schiffgens, to be published

    Google Scholar 

  169. A. Tenenbaum, N. V. Doan: J. Nucl. Mater. 69/70, 771–775 (1978)

    Article  Google Scholar 

  170. C. W. Gear: Numerical Initial Value Problems in Ordinary Differential Equations (Prentice-Hall, Englewood Cliffs, N. J. 1971)

    Google Scholar 

  171. L. F. Shampine, M. K. Gordon: Computer Solution of Ordinary Differential Equations: The Initial Value Problem (W. H. Freeman, San Francisco 1975)

    Google Scholar 

  172. H. B. Huntington, F. Seitz: Phys. Rev. 61, 315–325 (1942)

    Article  Google Scholar 

  173. P. Ehrhart: J. Nucl. Mater. 69/70, 200–214 (1978)

    Article  Google Scholar 

  174. W. Schilling: J. Nucl. Mater. 69/70, 465–489 (1978)

    Article  Google Scholar 

  175. F. Seitz: Discuss. Faraday Soc. 5, 271–282 (1949)

    Article  Google Scholar 

  176. G. H. Kinchin, R. S. Pease: Rep. Prog. Phys. 18, 1–51 (1955)

    Article  Google Scholar 

  177. H. B. Huntington: Phys. Rev. 93, 1414–1415 (1954)

    Article  Google Scholar 

  178. P. Jung: In Atomic Collisions in Solids, Vol. 1, ed. by S. Datz, B. R. Appleton, C. D. Moak (Plenum, New York 1975) pp. 87–104

    Google Scholar 

  179. P. Lucasson: Fundamental Aspects of Radiation Damage in Metals, Vol. 1, ed. by M. T. Robinson, F. W. Young, Jr. (U. S. Energy Research and Development Administration Report CONF-751006, 1975) pp. 42–65

    Google Scholar 

  180. P. Vajda: Rev. Mod. Phys. 49, 481–521 (1977)

    Article  Google Scholar 

  181. D. E. Harrison, Jr., W. L. Moore, Jr., H. T. Holcombe: Radiat. Eff. 17, 167–183 (1973)

    Google Scholar 

  182. D. E. Harrison, C. B. Delaplain: J. Appl. Phys. 47, 2252–2259 (1976)

    Article  Google Scholar 

  183. N. Winograd, B. J. Garrison, D. E. Harrison, Jr.: Phys. Rev. Lett. 41, 1120–1124 (1978)

    Article  Google Scholar 

  184. B. M. Garrison, N. Winograd, D. E. Harrison, Jr.: J. Chem. Phys. 69,1440–1444 (1978)

    Article  Google Scholar 

  185. N. Winograd, D. E. Harrison, Jr., B. J. Garrison: Surf. Sci. 78, 467–477 (1978)

    Article  Google Scholar 

  186. B. J. Garrison, N. Winograd, D. E. Harrison, Jr.: Phys. Rev. B18, 6000–6010 (1978)

    Google Scholar 

  187. N. S. Bespalova, L. G. Gurvich: Dokl. Akad. Nauk SSSR 202, 804–806 (1972) [Engl. transl. Soviet Physics-Doklady 17, 123–125 (1972)]

    Google Scholar 

  188. D. Cherns, F. J. Minter, R. S. Nelson: Nucl. Instrum. Methods 132, 369–376 (1976)

    Article  Google Scholar 

  189. D.E.Harrison, Jr., J.P.Johnson, II, N.S.Levy: Appl. Phys. Lett. 8, 33–36 (1966)

    Article  Google Scholar 

  190. D. E. Harrison, Jr.: J. Appl. Phys. 40, 3870–3872 (1969)

    Article  Google Scholar 

  191. D. E. Harrison, Jr., W. L. Gay, H. M. Effron: J. Math. Phys. 10, 1179–1184 (1969)

    Article  Google Scholar 

  192. P. V. Mundkur: “Computer Simulation of Sputtering”, U. S. Atomic Energy Commission Report LBL-3172 (1974)

    Google Scholar 

  193. A. Anderman: “Computer Investigation of Radiation Damage in Crystals”, Air Force Cambridge Research Laboratory Report AFCRL-66–688 (1966) [also known as Atomics International Report AI-66-252 (1966)]

    Google Scholar 

  194. G. D. Magnuson, C. E. Carlston: J. Appl. Phys. 34, 3267–3273 (1963)

    Article  Google Scholar 

  195. O. S.Oen, M.T. Robinson: J. Appl. Phys. 46, 5069–5071 (1975)

    Article  Google Scholar 

  196. M. T. Robinson: J. Appl. Phys. 40, 2670 (1969)

    Article  Google Scholar 

  197. D. E. Harrison,., C. E. Carlston, G. D. Magnuson: Phys. Rev. 139, A737–A745 (1965)

    Article  Google Scholar 

  198. R. Sizmann, C. Varelas: Nucl. Instrum. Methods 132, 633–638 (1976)

    Article  Google Scholar 

  199. I. M. Torrens: J. Phys. F3, 1771–1780 (1973)

    Article  Google Scholar 

  200. D. M. Schwartz, J.O. Schiffgens, D. G. Doran, G. R.Odette, R. G. Ariyasu:In Computer Simulation for Materials Applications, ed. by R. J. Arsenault, J. R. Beeler, Jr., J. A. Simmons, Nucl. Metall. 20, 75–88 (1976)

    Google Scholar 

  201. H. L. Heinisch, J.O. Schiffgens, D. M. Schwartz: J. Nucl. Mater. 85/86,607–610 (1979)

    Article  Google Scholar 

  202. A. van Veen, J.Haak: Phys. Lett. 40A, 378–380 (1972)

    Google Scholar 

  203. B.Poelsma, L. K. Verhey, A. L. Boers: Surf. Sci. 55, 445–466 (1976)

    Article  Google Scholar 

  204. M. Yoshida: J. Phys. Soc. Jpn. 16, 44–50 (1961)

    Article  Google Scholar 

  205. M.T.Robinson, D.K.Holmes, O.S.Oen: Le Bombardement Ionique (Centre Nat. Rech. Sci., Paris 1962) pp. 105–117

    Google Scholar 

  206. O. S.Oen, D. K. Holmes, M. T. Robinson: J. Appl. Phys. 34, 302–312 (1963)

    Article  Google Scholar 

  207. O. S.Oen, M. T. Robinson: J. Appl. Phys. 34, 2515–2521 (1964)

    Article  Google Scholar 

  208. J. R. Beeler, Jr., D. G. Besco: Radiation Damage in Solids, Vol. 1, (Intern. Atomic Energy Agency, Vienna 1962) pp. 43–63

    Google Scholar 

  209. J. R. Beeler, Jr., D. G. Besco: J. Phys. Soc. Jpn. 18, Suppl. 111, 159–164 (1963)

    Google Scholar 

  210. J. R. Beeler, Jr., D. G. Besco: J. Appl. Phys. 34, 2873–2878 (1963)

    Article  Google Scholar 

  211. J. R. Beeler, Jr., D. G. Besco: Phys. Rev. 134, A530–A532 (1964)

    Article  Google Scholar 

  212. J. R. Beeler, Jr.: J. Appl. Phys. 37, 3000–3009 (1966)

    Article  Google Scholar 

  213. J. R. Beeler, Jr.: Phys. Rev. 150, 470–487 (1966)

    Article  Google Scholar 

  214. I. M. Torrens, M. T. Robinson: Interatomic Potentials and Simulation of Lattice Defecta, ed. by P. C. Gehlen, J. R. Beeler, Jr., R. I. Jaffee (Plenum, New York 1972) pp. 423–438

    Google Scholar 

  215. I. M. Torrens, M. T. Robinson: Radiation-Induced Voids in Metals, ed. by J. W. Corbett, L. C. Ianniello (U. S. Atomic Energy Commission, Oak Ridge, Tenn. 1972) pp. 397–429

    Google Scholar 

  216. M. T. Robinson, K. Rössler, I. M. Torrens: J. Chem. Phys. 60, 680–688 (1974)

    Article  Google Scholar 

  217. O. S.Oen, M. T. Robinson: Application of Ion Beams to Materials 1975, ed. by G. Carter, J. S. Colligon, W. A. Grant (Institute of Physics, London 1976) pp. 329–333

    Google Scholar 

  218. O. S.Oen, M. T. Robinson: Nucl. Instrum. Methods 132, 647–653 (1976)

    Article  Google Scholar 

  219. O. S.Oen, M. T. Robinson: J. Nuci. Mater. 63, 210–214 (1976)

    Google Scholar 

  220. M. Hou, M. T. Robinson: Appl. Phys. 17, 295–301 (1978)

    Article  Google Scholar 

  221. M. Hou, M. T. Robinson: Appl. Phys. 18, 381–389 (1979)

    Article  Google Scholar 

  222. R. Behrisch, G. Maderlechner, B. M. U. Scherzer, M. T. Robinson: Appl. Phys. 18, 391–398 (1979)

    Article  Google Scholar 

  223. D. V. Morgan, D. van Viiet: Can. J. Phys. 46, 503–516 (1968)

    Google Scholar 

  224. D. V.Morgan, D.P.Jackson: Nucl. Instrum. Methods 132, 153–161 (1976)

    Article  Google Scholar 

  225. H.J.Pabst: Radiat. Eff. 31, 197–202 (1977)

    Google Scholar 

  226. O. B. Firsov: Zh. Eksp. Teor. Fiz. 36, 1517–1523 (1959) [Engl. transl.: Sov. Phys.-JETP 36, 1076–1080 (1959)]

    Google Scholar 

  227. J. Lindhard, M. Scharff: Phys. Rev. 124, 128–130 (1961)

    Article  Google Scholar 

  228. M. T. Robinson: Radiation Damage in Metals, ed. by N. L. Peterson, S. D. Harkness (Amer. Soc. Metals, Metals Park, Ohio 1976) pp. 1–57

    Google Scholar 

  229. M. Blackman: “The Specific Heat of Solids”, in Crystal Physics I, ed. by S. Flügge, Encyclopedia of Physics, Vol. 7/1 (Springer, Berlin, Göttingen, Heidelberg 1955) p. 377

    Google Scholar 

  230. D. P. Jackson, J. H. Barrett: Comput. Phys. Commun. 13, 157–166 (1977)

    Article  Google Scholar 

  231. H.Goldstein: Classical Mechanics (Addison-Wesley, Reading, Mass. 1959) pp. 107–109

    Google Scholar 

  232. E. Taglauer, W. Heiland: Surf. Sci. 33, 27–34 (1972)

    Article  Google Scholar 

  233. E. S. Mashkova, V. A. Molchanov: Radiat. Eff. 16, 143–187 (1972); 23, 215–270 (1974)

    Google Scholar 

  234. W. Heiland, E. Taglauer: Surf. Sci. 68, 96–107 (1977)

    Article  Google Scholar 

  235. W. Heiland, E. Taglauer, M. T. Robinson: Nucl. Instrum. Methods 132, 655–660 (1976)

    Article  Google Scholar 

  236. C.Kittel: Introduction to Solid State Physics (Wiley, New York 1953) p. 57

    Google Scholar 

  237. W. L. Gay, D. E. Harrison, Jr.: Phys. Rev. 135, A1780–A1790 (1964)

    Article  Google Scholar 

  238. M. T. Robinson, I. M. Torrens: “A Computer Simulation of Sputtering in the Binary Collision Approximation”, unpublished paper presented at Intern. Conf. on Ion-Surface Interaction, Sputtering, and Related Phenomena, Garching bei München, West Germany, 24–27 Sept. 1972

    Google Scholar 

  239. M. T. Robinson: unpublished research

    Google Scholar 

  240. K. Lonsdale: International Tables for X-Ray Crystallography, ed. by C. H. MacGillavry, G. D. Rieck (Intern. Union of Crystallography, Kynoch Press, Birmingham, U. K.1968) Vol. 3, p. 237

    Google Scholar 

  241. G. K. Wehner, R. V. Stuart, D. Rosenberg: unpublished data cited by R. Behrisch, Ergeb. Exakten Naturwiss. 35, 319 (1964)

    Google Scholar 

  242. E. Hotston: Nucl. Fusion 15, 544–547 (1976)

    Google Scholar 

  243. L.L.Tongson, C.B.Cooper: Radiat. Eff. 24, 187–193 (1975).

    Google Scholar 

Download references

Authors
  1. Mark T. Robinson
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Rainer Behrisch

Rights and permissions

Reprints and permissions

Copyright information

© 1981 Springer-Verlag

About this chapter

Cite this chapter

Robinson, M.T. (1981). Theoretical aspects of monocrystal sputtering. In: Behrisch, R. (eds) Sputtering by Particle Bombardment I. Topics in Applied Physics, vol 47. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3540105212_8

Download citation

  • DOI: https://doi.org/10.1007/3540105212_8

  • Published:

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-540-10521-3

  • Online ISBN: 978-3-540-38514-1

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation