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Sputtering by ion bombardment theoretical concepts

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Sputtering by Particle Bombardment I

Part of the book series: Topics in Applied Physics ((TAP,volume 47))

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  1. Peter Sigmund
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Sigmund, P. (1981). Sputtering by ion bombardment theoretical concepts. In: Behrisch, R. (eds) Sputtering by Particle Bombardment I. Topics in Applied Physics, vol 47. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3540105212_7

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