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5 References
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Küppers, D., Lydtin, H. (1980). Preparation of optical waveguides with the aid of plasma-activated chemical vapour deposition at low pressures. In: Vepřek, S., Venugopalan, M. (eds) Plasma Chemistry I. Topics in Current Chemistry, vol 89. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3540098259_6
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