5 Summary
Statistical methods applied to semiconductor manufacturing process are normally viewed. An example with L16(215) orthogonal array is presented including split-unit design and estimation of one missing value. The result of this experiment was extraordinarily effective to improve the yield beyond expectation. Dynamic and statistical characteristics about consuming time in the manufacturing process are studied by computer simulation, in particular, under the condition that the working time is larger than arrival time interval with gamma random variables. The study will be useful to assure quality in manufacturing process for preventing quality deterioration in accordance with time.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
Similar content being viewed by others
References
Wadsworth, H., K. S. Stephens and A. B. Godfrey: Modem Methods for Quality Control and Improvement, John Wiley & Sons, Inc., 1986.
Montgomery, D. C: Introduction to Statistical Quality Control, John Wiley & Sons, Inc., 2004.
Beck, J. V. and K. J. Arnold: Parameter Estimation in Engineering and Science, John Wiley & Sons, Inc., 1977.
Logothetis, N. and H. P. Wynn: Quality Through Design, Oxford Science Publications, 1989.
ditto, p. 385.
ditto, p. 419.
Papadopoulos, H. T., C. Heavy and J. Browne: Queuing Theory in Manufacturing Systems Analysis and Design, Chapman & Hall, 1993.
Gross, D.: Fundamentals of Queueing Theory, John Wiley & Sons, Inc., 2000.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2006 Physica-Verlag Heidelberg
About this chapter
Cite this chapter
Koyama, T. (2006). Statistical Methods Applied to a Semiconductor Manufacturing Process. In: Lenz, HJ., Wilrich, PT. (eds) Frontiers in Statistical Quality Control 8. Physica-Verlag HD. https://doi.org/10.1007/3-7908-1687-6_20
Download citation
DOI: https://doi.org/10.1007/3-7908-1687-6_20
Publisher Name: Physica-Verlag HD
Print ISBN: 978-3-7908-1686-0
Online ISBN: 978-3-7908-1687-7
eBook Packages: Mathematics and StatisticsMathematics and Statistics (R0)