Skip to main content
SpringerLink
Log in

Fluids for Sensor Systems

  • Chapter
  • First Online:
Microsystem Technology in Chemistry and Life Science

Part of the book series: Topics in Current Chemistry ((4143,volume 194))

Abstract

Several techniques for miniaturization of simple chemical and medical analysis systems are described. Miniaturization of total analysis systems realizes a small sample volume, a fast response and reduction of reagents. These features are useful in chemical and medical analysis. During the last decade many micro flow control devices, as well as the micro chemical sensors fabricated by three dimensional microfabrication technologies based on photofabrication, termed micromachining, have been developed. Miniaturized total analysis systems (μTAS) have been studied and some prototypes developed. In microfabricated systems, “microfluidics”, which represent the behavior of fluids in small sized channels, are considered and are very important in the design of micro elements used in μTAS. In this chapter microfluidics applied flow devices, micro flow control devices of active and passive microvalves, mechanical and non-mechanical micropumps and micro flow sensors fabricated by micromachining are reviewed.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 129.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 169.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 169.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

6 References

  1. Shoji S, Esashi M (1994) J Micromech Microeng 4:157

    Article  CAS  Google Scholar 

  2. Lammerink TSJ, Elwenspoek M, Fluitman JHJ (1993) Proc Micro Electro Mechan Syst Workshop, p 254

    Google Scholar 

  3. Gass V, van der Schoot BH, de Rooij NF (1993) Tech Dig Int Conf Solid-State Sens Actuators Transducers’ 93, p 1048

    Google Scholar 

  4. Shoji S, Nakagawa S, Esashi M (1990) Syst Sens Actuators A21–A23:189

    Article  Google Scholar 

  5. Van der Schoot BH, Verpoorte EMJ, Jeanneret S, Manz A, de Rooij NF (1995) Micro Total Analysis Systems, Kluwer, The Netherlands, p 181

    Google Scholar 

  6. Van den Berg A, Bergveld P (1996) Proc 2nd Int Symp on Miniaturized Total Analysis Systems μTAS-96, p 9

    Google Scholar 

  7. Shoji S, Esashi M (1995) Bonding and Assembling Methods for Realizing a μTAS, Micro Total Analysis Systems, Kluwer, The Netherlands, p 165

    Google Scholar 

  8. Gravesen P, Branebjerg J, Jensen OS (1993) J Micromech Microeng 3:169

    Article  Google Scholar 

  9. Manz A, Verpoorte E, Raymond DE, Effenhauser CS, Burggraf N, Widmer HM (1995) Micro Total Analysis Systems, Kluwer, The Netherlands, p 5

    Google Scholar 

  10. Ocvirk G, Verpoorte E, Manz A, Widmer HM (1995) Analytical Methods and Instrumentation 2:74

    CAS  Google Scholar 

  11. Harrison DJ, Fluri K, Chiem N, Tang T (1995) Tech Dig Int Conf Solid-State Sensors and Actuators Transducers’ 95, 1, p 752

    Article  Google Scholar 

  12. Shoji S, Esashi M, Matsuo T (1988) Sens Actuators 14:101

    Article  CAS  Google Scholar 

  13. Shoji S, Esashi M (1988) Chemical Sensor Technology, Kodansha, Tokyo, 1:179

    CAS  Google Scholar 

  14. Shoji S, van der Shoot BH, de Rooij NF, Esashi M (1991) Tech Dig Int Conf Solid-State Sensors and Actuators Transducers’ 91, p 1052

    Google Scholar 

  15. Ohori T, Shoji S, Miura K, Yotsumoto T (1997) Proc Micro Electro Mechanical Systems Workshop, to be presented.

    Google Scholar 

  16. Branebjerg J, Gravesen P, Krog JP, Nielsen R (1996) Proc Micro Electro Mechanical Systems Workshop, p 441

    Google Scholar 

  17. Branebjerg J, Fabius B, Gravesen P (1994) Micro Total Analysis Systems. Kluwer, The Netherlands, p 141

    Google Scholar 

  18. Miyake R, Lammerink TSJ, Elwenspooek M, Fluitman JHJ (1993) Proc Micro Electro Mechanical Systems Workshop, p 248

    Google Scholar 

  19. Mensinger H, Richter T, Hessel V, Dopper J, Ehrfeld W (1994) Micro Total Analysis Systems, Kluwer, The Netherlands, p 237

    Google Scholar 

  20. Larsen UD, Branebjerg J, Blankenstein G (1996) Proc 2nd Int Symp on Miniaturized Total Analysis Systems μTAS-96, p 228

    Google Scholar 

  21. Blankenstein G, Scampavia, Branebjerg J, Larsen UD, Ruzica J, (1996) Proc 2nd Int Symp on Miniaturized Total Analysis Systems μTAS-96, p 82

    Google Scholar 

  22. Brody JP, Osborn TD, Forster FK, Yager P (1995) Tech Dig Int Conf on Solid-State Sensors and Actuators Transducers’ 95, p 779

    Google Scholar 

  23. Brody JP, Yager P (1996) Tech Dig Solid-State Sens Actuator Workshop, p 105

    Google Scholar 

  24. Terry SC, Jerman JH, Angell JB (1979) IEEE Trans Electron Device, ED-26:1880

    Article  CAS  Google Scholar 

  25. Barth PW (1995) Tech Dig Int Conf on Solid-State Sens Actuators Transducers’ 95, p 276

    Google Scholar 

  26. Esashi M (1990) Sens Actuators A21–A23:161

    Article  Google Scholar 

  27. Zdeblick MJ, Anderson R, Jankowski J, Kline-Schoder B, Christel L, Miles R, Weber W (1994) Tech Digest of Solid-State Sens Actuators Workshop, p 251

    Google Scholar 

  28. Van Lintel HTG, van de Pol FCM and Bouwstra S (1988) Sens Actuators 15:153

    Article  Google Scholar 

  29. Tiren J, Tenerz L, Hok B, (1989) Sens Actuators 18:389

    Article  Google Scholar 

  30. Mobius H, Ehrfeld W, Hessel V, Richter T (1995) Tech Dig Int Conf on Solid-State Sens Actuators Transducers’ 95 1:775

    Article  Google Scholar 

  31. Esashi M, Shoji S, Nakano A (1989) Sens Actuators 20:163

    Article  Google Scholar 

  32. Smith L and Hok B (1991) Tech Dig Int Conf on Solid-State Sensors and Actuators Transducers’ 91:1049

    Google Scholar 

  33. Schomburg KW, Scherrer B (1992) J Micromech Microeng 2:184

    Article  CAS  Google Scholar 

  34. Shoji S, van der Schoot BH, de Rooij NF, Esashi M (1992) Sens Actuators A, 32:335

    Article  Google Scholar 

  35. Steme E, Steme G (1993) Tech Dig Int Conf on Solid-State Sens Actuators Transducers’ 93, p 110

    Google Scholar 

  36. Olsson A, Enoksson P, Steme G, Steme E (1996) Proc Micro Electro Mechanical Systems Workshop, p 479

    Google Scholar 

  37. Zengerle R, Geigel W, Richter A, Ulrich Y, Kliige S, Richter A (1994) Proc Actuator’ 94, p 25

    Google Scholar 

  38. Rapp R, Schomburg WK, Maas D, Schulz J, Stark W (1994) Sens Actuators A, 40: 57

    Article  CAS  Google Scholar 

  39. Bustgens B, Bacher W, Menz W, Schomburg WK (1994) Proc Micro Electro Mechanical Systems Workshop, p 18

    Google Scholar 

  40. Richter A, Sandmaier H (1991) Proc Micro Electro Mechanical Systems Workshop, p 99

    Google Scholar 

  41. Furuya A, Shimokawa F, Matsuura T, Sawada R (1996) J Micromech Microeng 6:310

    Article  CAS  Google Scholar 

  42. Bart SF, Travrow LS, Mehregany M, Lang JH (1990) Sens Actuators, A21–A23:193

    Article  Google Scholar 

  43. Fuhr G, Hagedorn R, Muller T, Benecke W, Wangner B (1992) Proc Micro Electro Mechanical Systems Workshop, p 25

    Google Scholar 

  44. Moroney RM, White RM, Howe RT (1991) Proc Micro Electro Mechanical Systems Workshop, p 277

    Google Scholar 

  45. Miyazaki S, Kawai T, Araragi M (1991) Proc Micro Electro Mechanical Systems Workshop, p 283

    Google Scholar 

  46. Harrison DJ, Seiler K, Manz A, Fan Z (1992) Tech Digest of Solid-State Sensors and Actuator Workshop, p 110

    Google Scholar 

  47. Sammarco TS, Fields YD, Johnson BN, Jones DK, Burke DT, Mastrangelo CH, Burns MA, Proc 2nd Int Symp on Miniaturized Total Analysis Systems μTAS-96, p 150

    Google Scholar 

  48. Van Oudheusen BW (1992) Sens Actuators A 31:9

    Article  Google Scholar 

  49. Yang C and Soeberg H (1992) Sens Actuators A 33:143

    Article  Google Scholar 

  50. Boillat MA, van der Wiel AJ, Hoogerwerf AC, de Rooij NF (1995) Proc Micro Electro Mechanical Systems Workshop, p 350

    Google Scholar 

  51. Gass V, van der Schoot BH, de Rooij NF, (1993), Proc Micro Electro Mechanical Systems Workshop, p 167

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Electronics, Information and Communication Engineering, Waseda University, 3-4-1, Ohkubo, Shinjuku-ku, Tokyo, 169, Japan

    Shuichi Shoji

Authors
  1. Shuichi Shoji
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. Department of Chemistry Imperial College of Science and Technology, Zeneca/Smithkline Beecham Centre for Analytical Sciences, South Kensington London, SW7 2AY

    Andreas Manz  & Holger Becker  & 

Rights and permissions

Reprints and permissions

Copyright information

© 1998 Springer Verlag Berlin Heidelberg

About this chapter

Cite this chapter

Shoji, S. (1998). Fluids for Sensor Systems. In: Manz, A., Becker, H. (eds) Microsystem Technology in Chemistry and Life Science. Topics in Current Chemistry, vol 194. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-69544-3_7

Download citation

  • DOI: https://doi.org/10.1007/3-540-69544-3_7

  • Published:

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-540-63424-9

  • Online ISBN: 978-3-540-69544-8

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation