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Plasma chemistry of polymers

  • H. Biederman
  • Y. Osada
Conference paper
Part of the Advances in Polymer Science book series (POLYMER, volume 95)

Abstract

This article will describe some of the recent progress in the area of plasma polymerization and plasma treatment. It is not intended to be an exhaustive overview of the field, but instead a summary of the highlights of research studies in this field selected by the authors according to the importance.

Comprehensive reviews on basic phenomena, theory, and reaction mechanisms of plasma-assisted processing and plasma polymerization will be covered in this review. Formation of diamond and amorphous carbon which has attracted considerable attention in the last few years will also be described.

Recent advances in plasma assisted deposition of composite metal/organic (polymeric or carbon) films will be discussed including deposition configurations and processes. Suggested applications particularly in optics and microelectronics will be emphasized.

Possible trends in future research and development of plasma deposition of organic films will also be outlined.

Keywords

Methylene Blue Composite Film Plasma Treatment Glow Discharge Plasma Chemistry 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag 1990

Authors and Affiliations

  • H. Biederman
    • 1
    • 2
  • Y. Osada
    • 1
    • 2
  1. 1.Department of Polymer PhysicsCharles UniversityPraha 8Czechoslovakia
  2. 2.Department of ChemistryIbaraki UniversityMitoJapan

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