Development of CL for Semiconductor Research, Part III: Study of Degradation Mechanisms in Compound Semiconductor-Based Devices by SEM-CL

  • G. Salviati
Conference paper
Part of the Lecture Notes in Physics book series (LNP, volume 588)


The advantages offered by the depth resolved spectral analysis of the CL technique are presented. In particular, GaAs-based heterojunction bipolar transistors and and InP-based high electron mobility transistors are studied to respectively reveal Be outdiffusion from the base and kink phenomena in the I-V characteristics after bias aging. GaAs-based solar cells are also investigated to show the correlation between dislocations and impurity gettering. Finally the limits of the technique are briefly discussed.


Thick GaAs IEDM Tech Semiconductor Research Electrical Degradation Rutherford Backscatter Spec 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer-Verlag Berlin Heidelberg 2002

Authors and Affiliations

  • G. Salviati
    • 1
  1. 1.CNR-MASPEC, Parco Area delle Scienze 37aParmaItaly

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