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Spectro-microscopy by TEM-SEM

  • K. Yagi
  • Y. Tanishiro
  • H. Minoda
Conference paper
Part of the Lecture Notes in Physics book series (LNP, volume 588)

Abstract

Microscope study is one of the basic research methods in materials science. Electron microscopy has been widely used in many fields for many years. There have been various kinds of electron microscopes as shown in Table 1. Except for special cases with use of divergent electric or magnetic field for image magnification system, most of electron microscopes get images either by magnification lenses or by a micro- or nano-probe and its scanning technique. Some instruments can have two or more types of imaging technique (TEM /STEM /SEM, STEM /SEM /SAM, LEEM /PEEM /MEM). The present paper overviews only spectro-microscopy by microscopes underlined in Table 1 (where an incident electron energy is a few tens to a few hundred keV): conventional transmission electron microscope (CTEM, when a nano-probe and its scanning technique is combined, it is called TEM/STEM), STEM (or dedicated STEM), SEM and scanning Auger microscope (SAM). Spectro-microscopy means microscopy where an image is made with use of a part of spectral signals obtained from a specimen.

It is well known that TEM and STEM are equivalent with each other by the reciprocity law as far as we are concerned with elastically scattered electrons. However, it is not so in other cases including inelastically scattered ones. TEM/STEM can be operated ineither mode.

Keywords

Lattice Fringe Incident Electron Conventional Transmission Electron Microscope Energy Dispersive Spectroscopic Aberration Correction 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2002

Authors and Affiliations

  • K. Yagi
    • 1
  • Y. Tanishiro
    • 1
  • H. Minoda
    • 1
  1. 1.Physics DepartmentTokyo Institute of TechnologyTokyoJapan

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