Surface Imaging Using Electrons Excited by Metastable-Atom Impacts

  • N. Ueno
  • H. Yasufuku
  • S. Kera
  • K. K. Okudaira
  • Y. Harada
Conference paper
Part of the Lecture Notes in Physics book series (LNP, volume 588)


This article introduces our recent study on solid surfaces by metastable electron emission microscopy (MEEM) which is in principle selectively sensitive to outermost-surface electronic states. Examples of surface images by MEEM are shown for a SiO2 pattern on Si(100) and a microstructured thin film of organic semiconductor, chloroaluminum phthalocyanine (ClAlPc), on a MoS2 surface. The latter result demonstrates that very large organic molecule can diffuse on the surface. For the ClAlPc film, the results obtained by photoemission electron microscopy (PEEM) using photons near the threshold ionization energy of the target are also shown.


Resonance Ionization Metastable Atom Outermost Surface Surface Electronic State Preparation Chamber 
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Copyright information

© Springer-Verlag Berlin Heidelberg 2002

Authors and Affiliations

  • N. Ueno
    • 1
    • 2
    • 3
  • H. Yasufuku
    • 2
  • S. Kera
    • 1
    • 2
  • K. K. Okudaira
    • 1
    • 2
    • 3
  • Y. Harada
    • 4
  1. 1.Department of Materials Technology, Faculty of EngineeringChiba UniversityChibaJapan
  2. 2.Graduated School of Science and TechnologyChiba UniversityChibaJapan
  3. 3.Center for Frontier ScienceChiba UniversityChibaJapan
  4. 4.Life Culture DepartmentSeitoku UniversityIwaseJapan

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