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Surface Imaging Using Electrons Excited by Metastable-Atom Impacts

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Nanoscale Spectroscopy and Its Applications to Semiconductor Research

Part of the book series: Lecture Notes in Physics ((LNP,volume 588))

Abstract

This article introduces our recent study on solid surfaces by metastable electron emission microscopy (MEEM) which is in principle selectively sensitive to outermost-surface electronic states. Examples of surface images by MEEM are shown for a SiO2 pattern on Si(100) and a microstructured thin film of organic semiconductor, chloroaluminum phthalocyanine (ClAlPc), on a MoS2 surface. The latter result demonstrates that very large organic molecule can diffuse on the surface. For the ClAlPc film, the results obtained by photoemission electron microscopy (PEEM) using photons near the threshold ionization energy of the target are also shown.

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Author information

Authors and Affiliations

  1. Department of Materials Technology, Faculty of Engineering, Chiba University, Inage-ku, 263-8522, Chiba, Japan

    N. Ueno, S. Kera & K. K. Okudaira

  2. Graduated School of Science and Technology, Chiba University, Inage-ku, 263-8522, Chiba, Japan

    N. Ueno, H. Yasufuku, S. Kera & K. K. Okudaira

  3. Center for Frontier Science, Chiba University, Inage-ku, 263-8522, Chiba, Japan

    N. Ueno & K. K. Okudaira

  4. Life Culture Department, Seitoku University, 271-8555, Iwase, Matsudo, Japan

    Y. Harada

Authors
  1. N. Ueno
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  2. H. Yasufuku
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  3. S. Kera
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  4. K. K. Okudaira
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  5. Y. Harada
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Editor information

Editors and Affiliations

  1. NTT Basic Research Laboratories, 3-1,Morinosato Wakamiya, 243-0198, Atsugi-shi Kanagawa, Japan

    Yoshio Watanabe

  2. Istituto MASPEC, Parco Area delle Science 37/A, 43010, Parma, Italy

    Giancarlo Salviati

  3. Sincrotrone Trieste, AREA Science Park Strada Statale 14, Km 163,5, 34012, Trieste, Basovizza, Italy

    Stefan Heun

  4. Tokyo Institute of Technology, 2-12-1 Ookayama, Meguro-ku, 152-8551, Tokyo, Japan

    Naoki Yamamoto

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© 2002 Springer-Verlag Berlin Heidelberg

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Ueno, N., Yasufuku, H., Kera, S., Okudaira, K.K., Harada, Y. (2002). Surface Imaging Using Electrons Excited by Metastable-Atom Impacts. In: Watanabe, Y., Salviati, G., Heun, S., Yamamoto, N. (eds) Nanoscale Spectroscopy and Its Applications to Semiconductor Research. Lecture Notes in Physics, vol 588. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-45850-6_12

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  • DOI: https://doi.org/10.1007/3-540-45850-6_12

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  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-540-43312-5

  • Online ISBN: 978-3-540-45850-0

  • eBook Packages: Springer Book Archive

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