Abstract
Surface coatings and thin films can be easily and rapidly produced by irradiation of materials with short laser pulses in reactive gas atmospheres, where laser-plasma-surface interactions play an important role for the process. As examples for this Laser-Plasma Synthesis, the preparation of Fe-N, Fe-C, AlN, TiN, TiC, SiC, and Si3N4 coatings are presented as achieved by employing an Excimer-Laser, a Nd:YAG Laser, a Free Electron Laser and a femtosecond Ti:sapphire laser. This implies laser pulse durations from the nanosecond to the femtosecond regime and wavelengths from UV to IR. The resulting surfaces, thin films, coatings and their properties are investigated by combining Mössbauer Spectroscopy, X-ray diffraction, X-ray absorption spectroscopy, Nanoindentation, Nuclear Reaction Analysis, and Rutherford Backscattering Spectroscopy.
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Schaaf, P., Carpene, E., Kahle, M., Han, M. (2002). Rapidly Produced Thin Films: Laser-Plasma Induced Surface Reactions. In: Kramer, B. (eds) Advances in Solid State Physics. Advances in Solid State Physics, vol 42. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-45618-X_17
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DOI: https://doi.org/10.1007/3-540-45618-X_17
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