Abstract
The study of the physical quantities that are involved in electron—solid interaction (backscattering coefficient, energy and angular distribution of backscattered electrons, electron penetration in thin solid films, electron implantation profiles in bulk targets, secondary-electron energy distribution, etc.) requires approximations and approaches which are valid only for limited ranges of energy and angle and for selected materials. All the analytical approaches we have proposed involve approximations and have been deduced using semi-empirical models.
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References
H.A. Bethe, in Handbuch der Physik (Springer, Berlin, 1933), 24, 519
K. Kanaya and S. Okayama, J. Phys. D 5, 43 (1972)
M. Dapor, Phys. Rev. B 46, 618 (1992)
M. Dapor, Appl. Surf. Sci. 70/71, 327 (1993)
J. Baró, J. Sempau, J.M. Fernández-Varea, F. Salvat, Nucl. Instrum. Methods Phys. Res. B 84, 465 (1994)
J. Baró, J. Sempau, J.M. Fernández-Varea, F. Salvat, Nucl. Instrum. Methods Phys. Res. B 100, 31 (1995)
A. Miotello, M. Dapor, Phys. Rev. B 56, 2241 (1997)
M. Dapor, Nucl. Instrum. Methods Phys. Res. B 95, 470 (1995); Nucl. Instrum. Methods Phys. Res. B 108, 363 (1996)
M. Dapor, J. Appl. Phys. 77, 2840 (1995)
M. Dapor, J. Appl. Phys. 79, 8406 (1996)
M. Dapor, Scanning Microsc. 9, 939 (1995)
V.E. Cosslett, R.N. Thomas, Br. J. Appl. Phys. 16, 779 (1965)
M. Dapor, Eur. Phys. J.: Appl. Phys. 18, 155 (2002)
H.E. Bishop, Proc. 4ème Congrès International d’Optique des Rayons X et de Microanalyse (Hermann, Paris, 1967), pp. 153–158
H.-J. Hunger, L. KĂĽchler, Phys. Status Solidi A 56, K45 (1979)
M. Dapor, A. Miotello, in Advanced Monte Carlo for Radiation Physics, Particle Transport Simulation and Applications, ed. by A. Kling, F. Barão, M. Nakagawa, L. Távora, P. Vaz, (Springer, Berlin, Heidelberg, 2001), pp. 43–47
N. Overton, P.G. Coleman, Phys. Rev. Lett. 79, 305 (1997)
M. Dapor, D. Zari, A. Miotello, Phys. Rev. B 61, 5979 (2000)
E.N. Sickafus, Phys. Rev. B 16, 1436 (1977)
E.N. Sickafus, Phys. Rev. B 16, 1448 (1977)
E.N. Sickafus, C. Kukla, Phys. Rev. B 19, 4056 (1979)
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(2003). Monte Carlo Simulations. In: Dapor, M. (eds) Electron-Beam Interactions with Solids. Springer Tracts in Modern Physics, vol 186. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-36507-9_6
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DOI: https://doi.org/10.1007/3-540-36507-9_6
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