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Dynamics of Au Adatoms on Electron-Irradiated Rough Si Surfaces

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Microscopy of Semiconducting Materials

Part of the book series: Springer Proceedings in Physics ((SPPHY,volume 107))

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Abstract

We have examined the dynamics of Au adatoms on Si surfaces with surface roughness introduced by electron irradiation. Observing the areal distribution of Au nanoparticles on inhomogeneous rough surfaces by transmission electron microscopy, we have found that Au adatoms were preferentially assembled not on flat regions but on rough regions. We have proposed that the peculiar distribution of Au adatoms is formed since a rough surface acts as a sink for adatoms and the diffusion constant of adatoms on the rough surface is smaller than that on the unirradiated one.

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© 2005 Springer-Verlag Berlin Heidelberg

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Torigoe, K., Ohno, Y., Ichihashi, T., Takeda, S. (2005). Dynamics of Au Adatoms on Electron-Irradiated Rough Si Surfaces. In: Cullis, A.G., Hutchison, J.L. (eds) Microscopy of Semiconducting Materials. Springer Proceedings in Physics, vol 107. Springer, Berlin, Heidelberg . https://doi.org/10.1007/3-540-31915-8_84

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