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References
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© 2006 Springer-Verlag Berlin Heidelberg
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Salbut, L., Jozwik, M. (2006). Multifunctional interferometric platform specialised for active components of MEMS/MOEMS characterisation. In: Osten, W. (eds) Fringe 2005. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-29303-5_77
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DOI: https://doi.org/10.1007/3-540-29303-5_77
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-26037-0
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