Conclusions
Scanning probe microscopes allow to resolve small structures with very high resolution. Therefore, these instruments are essential for dimensional metrology from micro to atomic scale. The image obtained, however, is more than a morphological operation linking tip and sample geometry. To achieve high accuracy a detailed knowledge of the interaction between sample and tip is necessary. First approaches have been published, however, SPM techniques need more appropriate and more quantitative models.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
Similar content being viewed by others
References
Binning G, Rohrer H, Gerber Ch and Weibel E (1982) Phys.Rev. Lett. 49:57
Binning G, Quate C F, Gerber Ch (1986) Phys. Rev. Lett 56:930
Dai G, Koenders L, Pohlenz F (2005) Meas. Sci. Technol. 16:1241
Meli F. (2005) in Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro-and Nanometer Range. Edited by G. Wilkening and L. Koenders, Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, Germany, p. 361
Czerkas S, Dziomba T, Bosse H (2005) in Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro-and Nanometer Range. Edited by G. Wilkening and L. Koenders, Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, Germany, p. 311
Keller D J (1991) Surf. Sci. 253:353
Villarrubia J S (1994) Surf. Sci. 321:287
Williams P M, Shakesheff K M, Davies M C, Jackson D E, Roberts C J, Tendler S J B (1996) J. Vac. Sci. Technol. B 14:1557
Tersoff J, Hamann D R (1985) Phys. Rev. B31:805
Giessibl F J (2003) Rev. Mod. Phys. 75:949
Tsukada M, Sasaki M, Gauthier M, Tagami K, Watanabe S (2002) in Noncontact Atomic Force Microscopy, ed. S Morita, R Wiesendanger, E Meyer (Springer, Berlin) Chap. 15, pp. 257
Hartmann U (1991) Theory of van der Waals microscopy J. Vac. Sci. Technol. B 9:465
Burnham N A, Kulik A J, Oulevey F, Mayencourt C, Gourdon D, Dupas E, Gremaud G in B. Bhushan (ed.) Micro/Nanotribology and Its Applications (1997) 421
Hertz H (1881) J. Reine Angew. Math. 92:156
Johnson K L, Kendall K, Roberts A D (1971) Proc. R. Soy. A 324:301
Sperling G (1964) Eine Theorie der Haftung von Feststoffteilchen an festen Körpern, PhD Thesis, T. H. Karlsruhe
Derjaguin B V, Muller V M, Toporov Y P J (1975) Coll. Interface Sci. 53:314
Maugis D J (1992) Coll. Interface Sci. 150:243
Carpick R W, Ogletree D F, Salmeron M (1999) J. Coll Interface Sci. 211:395
Burnham N A, Behrend O P, Oulevey F, Gremaud G, Gallo P-J, Gourdon D, Dupas E, Kulik A J, Pollock H M, Briggs G A D (1997) Nanotechnology 8:67
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2006 Springer-Verlag Berlin Heidelberg
About this paper
Cite this paper
Koenders, L., Yacoot, A. (2006). Tip Geometry and Tip-Sample Interactions in Scanning Probe Microscopy (SPM). In: Osten, W. (eds) Fringe 2005. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-29303-5_61
Download citation
DOI: https://doi.org/10.1007/3-540-29303-5_61
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-26037-0
Online ISBN: 978-3-540-29303-3
eBook Packages: EngineeringEngineering (R0)