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Fringe 2005 pp 299–307Cite as

Through-Focus Point-Spread Function Evaluation for Lens Metrology using the Extended Nijboer-Zernike Theory

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References

  1. Malacara, D (1992) Optical Shop Testing, 2nd edition, Wiley, Hoboken NJ (USA).

    Google Scholar 

  2. Gerchberg, R W, Saxton, W O (1971) Phase determination from image and diffraction plane pictures in electron-microscope. Optik 34:277–286

    Google Scholar 

  3. Gerchberg, R W, Saxton, W O (1972) Practical algorithm for determination of phase from image and diffraction pictures. Optik 35:237–246

    Google Scholar 

  4. Fienup, JR (1982) Phase retrieval algorithms — a comparison. Appl. Opt. 21:2758–2769

    Article  Google Scholar 

  5. Born, M, Wolf, E (1970) Principles of Optics, 4th rev. ed., Pergamon Press, New York (USA)

    Google Scholar 

  6. Janssen, A J E M (2002) Extended Nijboer-Zernike approach for the computation of optical point-spread functions. J. Opt. Soc. Am. A 19:849–857

    Google Scholar 

  7. Braat, J J M, Dirksen, P, Janssen, A J E M (2002) Assessment of an extended Nijboer-Zernike approach for the computation of optical point-spread functions. J. Opt. Soc. Am. A 19:858–870

    Google Scholar 

  8. Braat, J J M, Dirksen, P, Janssen, A J E M, van de Nes, A S (2003) Extended Nijboer-Zernike representation of the vector field in the focal region of an aberrated high-aperture optical system. J. Opt. Soc. Am. A 20:2281–2292

    Google Scholar 

  9. Dirksen, P, Braat, J J M, Janssen, A J E M, Leeuwestein, A (2005) Aberration retrieval for high-NA optical systems using the extended Nijboer-Zernike theory. To appear in Proc. SPIE 5754, Conference on Microlithography 2005, San Jose, USA, February 26–March 4

    Google Scholar 

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Authors and Affiliations

  1. Optics Research Group, Department of Imaging Science and Technology, Faculty of Applied Sciences, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands

    Joseph J.M. Braat

  2. Philips Research Laboratories, Kapeldreef 75, B-3001, Leuven, Belgium

    Peter Dirksen

  3. Philips Research Laboratories, Professor Holstlaan 4, 5656 AA, Eindhoven, The Netherlands

    Augustus J.E.M. Janssen

Authors
  1. Joseph J.M. Braat
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  2. Peter Dirksen
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  3. Augustus J.E.M. Janssen
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Editor information

Editors and Affiliations

  1. Institut für Technische Optik, Universität Stuttgart, Pfaffenwaldring 9, 70569, Stuttgart, Germany

    Wolfgang Osten

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© 2006 Springer-Verlag Berlin Heidelberg

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Braat, J.J., Dirksen, P., Janssen, A.J. (2006). Through-Focus Point-Spread Function Evaluation for Lens Metrology using the Extended Nijboer-Zernike Theory. In: Osten, W. (eds) Fringe 2005. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-29303-5_40

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  • DOI: https://doi.org/10.1007/3-540-29303-5_40

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-540-26037-0

  • Online ISBN: 978-3-540-29303-3

  • eBook Packages: EngineeringEngineering (R0)

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