Abstract
The paper describes the operation of a high-precision wide scale three-dimensional nanopositioning and nanomeasuring machine (NPM-Machine) having a resolution of 0,1 nm over the positioning and measuring range of 25 mm × 25 mm × 5 mm. The NPM-Machine has been developed by the Technische Universität Ilmenau and manufactured by the SIOS Meßtechnik GmbH Ilmenau. The machines are operating successfully in several German and foreign research institutes including the Physikalisch-Technische Bundesanstalt (PTB).
The integration of several, optical and tactile probe systems and scanning force microscopes makes the NPM-Machine suitable for various tasks, such as large-area scanning probe microscopy, mask and water inspection, circuit testing as well as measuring optical and mechanical precision work pieces such as micro lens arrays, concave lenses, mm-step height standards.
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References
G. Jäger, E. Manske, T. Hausotte, W. Schott: Operation and analysis of a nanopositioning and nanomeasuring machine, Proceedings of the 17th Annual Meeting of the ASPE, St. Louis, Missouri, USA, 2002, S. 299–304
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© 2006 Springer-Verlag Berlin Heidelberg
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Jäger, G. et al. (2006). Progress on the wide scale Nano-positioning and Nanomeasuring Machine by Integration of Optical-Nanoprobes. In: Osten, W. (eds) Fringe 2005. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-29303-5_39
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DOI: https://doi.org/10.1007/3-540-29303-5_39
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-26037-0
Online ISBN: 978-3-540-29303-3
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