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Summary of Adaptive Optics at Stanford

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Book cover Adaptive Optics for Industry and Medicine

Part of the book series: Springer Proceedings in Physics ((SPPHY,volume 102))

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Summary

The status of adaptive optics at Stanford is summarized. Particular focus is given to the fabrication and testing of segmented, micro-mirror SLMs developed under the CCIT (Coherent Communications, Imaging, and Targeting) project [1]. Square and hexagonal “5 ß 5” and “32 ß 32” arrays have been fabricated using MEMS technology, and “5 ß 5” arrays have been characterized.

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References

  1. Coherent communications, imaging and targeting. More information at http://www.darpa.mil/tto/PROGRAMS/ccit.html

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  2. Y.A. Peter, E. Carr, O. Solgaard: Segmented deformable micro-mirror for freespace optical communication. IEEE/LEOS International Conference of Optical MEMS. Lugano, Switzerland, 2002, pp. 197–198

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  3. MUMPsê (Multi-User MEMS Processes) is offered by MEMSC-AP (formerly Cronos Integrated Microsystems)

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  4. K.W. Markus, D.A. Koester, A. Cowen, R. Mahadevan, V.R. Dhuler, D. Robertson, L. Smith: MEMS infrastructure: The multi-user MEMS processes (MUMPs). In: K.W. Markus (ed): Micromachining and Microfabrication Process Technology. Proc. SPIE 2639, Austin, TX 1995, pp. 54–63

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  5. R. Conant, J. Nee, K. Lau, R. Muller: A fast flat scanning micromirror. Solid-State Sensor and Actuator Workshop, Hilton Head, SC 2000, pp. 6–9

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  6. U. Krishnanmoorthy, O. Solgaard: Self-aligned vertical comb drive actuators for optical scanning micromirrors. Proceedings of Optical MEMS Conference, Okinawa, Japan 2001

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Author information

Authors and Affiliations

  1. Ginzton Laboratory, Stanford University, 450 Via Palou, Stanford, CA, 94305-4088, USA

    P. Lu, Y.-A. Peter, E. Carr, U. Krishnamoorty, I.-W. Jung, O. Solgaard & R. Byer

Authors
  1. P. Lu
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  2. Y.-A. Peter
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  3. E. Carr
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  4. U. Krishnamoorty
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  5. I.-W. Jung
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  6. O. Solgaard
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  7. R. Byer
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Editor information

Editors and Affiliations

  1. Dept. of Applied Physics, Photonics Laboratory, University of Applied Sciences Münster, Stegerwaldst r. 39, 48565, Steinfurt, Germany

    Ulrich Wittrock

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© 2005 Springer-Verlag Berlin Heidelberg

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Lu, P. et al. (2005). Summary of Adaptive Optics at Stanford. In: Wittrock, U. (eds) Adaptive Optics for Industry and Medicine. Springer Proceedings in Physics, vol 102. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-28867-8_7

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