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Sensor Technology for Scanning Probe Microscopy and New Applications

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References

  1. Binnig G, Rohrer H, Gerber C, Weibel E (1981) Appl Phys Lett 40:178–180

    Article  Google Scholar 

  2. Binnig G, Rohrer H (1982) Helv Phys Acta 55:726

    CAS  Google Scholar 

  3. Binnig G, Rohrer H, Gerber C, Weibel E (1982) Phys Rev Lett 49:57–61

    Article  Google Scholar 

  4. Binnig G, Quate CF, Gerber C (1986) Phys Rev Lett 56:930–933

    Article  Google Scholar 

  5. Wiesendanger R (1994) Scanning probe microscopy and spectroscopy. Cambridge University Press, Cambridge

    Google Scholar 

  6. Eigler DM, Schweizer EK (1990) Nature 344:524–526

    Article  CAS  Google Scholar 

  7. Crommie MF, Lutz CP, Eigler DM (1993) Science 262:218–220

    CAS  Google Scholar 

  8. Martin Y, Williams CC, Wickramasinghe HK (1987) J Appl Phys 61(10):4723–4729

    Article  CAS  Google Scholar 

  9. Sarid D (1991) Scanning force microscopy. Oxford University Press, New York

    Google Scholar 

  10. Albrecht TR, Grutter P, Horne D, Rugar D (1991) J Appl Phys 69(2):668–673

    Article  Google Scholar 

  11. Meyer E, Heinzelmann H (1995) Scanning force microscopy. In: Wiesendanger R, Güntherodt HJ (eds) Scanning tunnelingmicroscopy II. Springer, Berlin Heidelberg New York, pp 99–149

    Google Scholar 

  12. Anczykowski B, Krüger D, Fuchs H (1996) Phys Rev B 53(23):15485–15488

    Article  CAS  Google Scholar 

  13. Schwarz UD, Zwörner O, Köster P, Wiesendanger R (1997) Phys Rev B 56(11):6997–7000

    Article  CAS  Google Scholar 

  14. Giessibl FJ, Bielefeldt H (2000) Phys Rev B 61(15):9968–9971

    Article  CAS  Google Scholar 

  15. Hölscher H, Gotsmann B, Allers W, Schwarz UD, Fuchs H, Wiesendanger R (2001) Phys Rev B 64:075402

    Article  CAS  Google Scholar 

  16. Schulz M, Blachnik R (1982) Landolt-Börnstein, vol III/17 a. Springer, Berlin Heidelberg New York, pp 61–83

    Google Scholar 

  17. Blakemore JS (1982) J Appl Phys 53:R123–R183

    Article  CAS  Google Scholar 

  18. von Münch (1982) Landolt-Börnstein, vol III/17 a. Springer, Berlin Heidelberg New York, pp 36–42

    Google Scholar 

  19. Heuberger A (1991) Mikromechanik. Springer, Berlin Heidelberg New York

    Google Scholar 

  20. Johansson S, Ericson F, Schweitz J (1989) J Appl Phys 65(1):122–128

    Article  CAS  Google Scholar 

  21. Lai J, Perazzo T, Shi Z, Majumdar A (1997) Sensor Actuat A 58:113–119

    Article  Google Scholar 

  22. Hazel JL, Tsukruk VV (1999) Thin Solid Films 339:249–257

    Article  CAS  Google Scholar 

  23. Madou M (1997) Fundamentals of microfabrication. CRC, Boca Raton, FL

    Google Scholar 

  24. Oesterschulze E (2001) Advances in imaging electron physics, vol 118. Academic, New York, pp 129–206

    Google Scholar 

  25. Wolf S, Tauber RN (1986) Silicon processing for the VLSI era, vol 1. Lattice, Sunset Beach, CA

    Google Scholar 

  26. Katz LE (1990) VLSI technology. McGraw-Hill, Englewood Cliffs, NJ, Ch 3

    Google Scholar 

  27. Wolter O, Bayer Th, Greschner J (1991) J Vac Sci Technol B 9(2):1353–1357

    Article  CAS  Google Scholar 

  28. Ravi TS, Marcus RB (1991) J Vac Sci Technol B 9(6):2733–2737

    Article  CAS  Google Scholar 

  29. Zhang Y, Zhang Y (1996) Appl Phys Lett 69(27):4260–4261

    Article  CAS  Google Scholar 

  30. Marcus RB, Ravi TS, Gmitter T, Chin K, Liu D, Orvis WJ, Ciarlo DR, Hunt CE, Trujillo J (1990) Appl Phys Lett 56:236–238

    Article  CAS  Google Scholar 

  31. Barth W, Debski T, Abedinov N, Ivanov T, Heerlein H, Volland B, Gotszalk T, Rangelow IW, Torkar K, Fritzenwallner F, Grabiec P, Studzinska K, Kostic I, Hudek P (2001) Microelectron Eng 57–58:825–831

    Article  Google Scholar 

  32. Collins SD (1997) J Electrochem Soc 144(6):2242–2262

    Article  CAS  Google Scholar 

  33. Nakano S, Ogiso H, Yabe A (1999) Nucl Instrum Meth B 155:79–84

    Article  CAS  Google Scholar 

  34. Yang J, Ono T, Esashi M (2000) Sensor Actuat 82:102–107

    Article  Google Scholar 

  35. Itoh J, Tohma Y, Kanemaru S, Shimizu K (1995) J Vac Sci Technol B 13(2):331–334

    Article  CAS  Google Scholar 

  36. Hosaka S, Etoh K, Kikukawa A, Koyanagi H (2000) J Vac Sci Technol B 18(1):94–99

    Article  CAS  Google Scholar 

  37. MaCarthy J, Pei Z, Becker M, Atteridge D (2000) Thin Solid Films 358:146–151

    Article  Google Scholar 

  38. Albrecht TR, Akamine S, Carver TE, Quate CF (1990) J Vac Sci Technol A 8(4):3386–3396

    Article  CAS  Google Scholar 

  39. Spindt CA, Bordie I, Humphrey L, Westerberg ER (1976) J Appl Phys 47(12):5248–5262

    Article  CAS  Google Scholar 

  40. Mihalcea C, Scholz W, Werner S, Münster SM, Oesterschulze E, Kassing R (1996) Appl Phys Lett 68(25):3531–3533

    Article  CAS  Google Scholar 

  41. Hantschel T, Pape U, Slesazeck S, Niedermann P, Vandervorst W (2000) Proc SPIE 4175:62–73

    Article  CAS  Google Scholar 

  42. Scholz W, Albert D, Malavé A, Werner S, Mihalcea Ch, Kulisch W, Oesterschulze E (1997) Proc SPIE 3009-09:61–71

    Article  Google Scholar 

  43. Tortonese M, Yamada H, Barett H, Quate CF (1991) Proc IEEE Conf on Transducers 91CH2817-5:448

    Google Scholar 

  44. Minne SC, Manalis SR, Quate CF (1995) Appl Phys Lett 67(26):3918–3920

    Article  CAS  Google Scholar 

  45. Jumpertz R, von der Hart A, Ohlsson O, Saurenbach F, Schelten J (1998) Microelectron Eng 41/42:441–444

    Article  CAS  Google Scholar 

  46. Volodin A, van Haesendonck C (1998) Appl Phys A 66:S305–S308

    Article  CAS  Google Scholar 

  47. Su Y, Brunnschweiler A, Evans AGR, Ensell G (1999) Sensor Actuat 76:139–144

    Article  Google Scholar 

  48. Brugger J, Despont M, Rossel C, Rothuizen H, Vettiger P, Willemin M (1999) Sensor Actuat 73:235–242

    Article  Google Scholar 

  49. Gotszalk T, Grabiec P, Rangelow I (2000) Ultramicroscopy 82:39–48

    Article  CAS  Google Scholar 

  50. Erlandsson R, McClelland GM, Mate CM, Chiang S (1988) J Vac Sci Technol A 6:266

    Article  CAS  Google Scholar 

  51. Meyer G, Amer M (1988) Appl Phys Lett 53:1045

    Article  Google Scholar 

  52. Rugar D, Mamin HJ, Guethner P (1989) Appl Phys Lett 55:2588

    Article  CAS  Google Scholar 

  53. Putman CAJ, de Grooth BG, van Hulst N, Greve J (1991) Ultramicroscopy 42–44:1509–1513

    Google Scholar 

  54. Ruf A, Abraham M, Diebel J, Ehrfeld W, Güthner P, Lacher M, Mayr K, Reinhardt J (1997) J Vac Sci Technol B 15(3):579585

    Article  Google Scholar 

  55. Göddenhenrich TG, Lembe H, Hartmann U, Heiden C (1990) J Vac Sci Technol A 8(1):383

    Article  Google Scholar 

  56. Itoh T, Suga T (1994) J Vac Sci Technol B 12(3):1581–1585

    Article  Google Scholar 

  57. Giessibl FJ (2000) Appl Phys Lett 76(11):1470–1472

    Article  CAS  Google Scholar 

  58. Minne SC, Yaralioglu G, Manalis SR, Adams JD, Zesch J, Atalar A, Quate CF (1998) Appl Phys Lett 72(18):2340–2342

    Article  CAS  Google Scholar 

  59. Minne SC, Flueckiger Ph, Soh HT, Quate CF (1995) J Vac Sci Technol B 13(3):1380–1385

    Article  CAS  Google Scholar 

  60. Minne SC, Manalis SR, Atalar A, Quate CF (1996) J Vac Sci Technol B 14(4):2456–2461

    Article  CAS  Google Scholar 

  61. Wilder K, Soh HT, Minne SC, Manalis SR, Quate CF (1997) Nav Res Rev XXIX:35–48

    Google Scholar 

  62. Chui BW, Stowe TD, Kenny TW, Mamin HJ, Terris BJ, Rugar D (1996) Appl Phys Lett 69(18):2767

    Article  CAS  Google Scholar 

  63. Vettiger P, Despont M, Drechsler U, Dürig D, Häberle W, Lutwyche I, Rothuizen HE, Stutz R, Widmer R, Binnig GK (2000) IBM J Res Develop 44(3):323–340

    Article  CAS  Google Scholar 

  64. Despont M, Brugger J, Drechsler U, Dürig U, Häberle W, Lutwyche M, Rothuizen H, Stutz R, Widmer R, Binnig G, Rohrer H, Vettiger P (2000) Sensor Actuat 80:100–107

    Article  Google Scholar 

  65. Garcia N, Levanyuk AP, Minyukov SA, Binh TV (1995) Surf Sci 328:337–342

    Article  CAS  Google Scholar 

  66. Walters DA, Cleveland JP, Thomson NH, Hansma PK, Wendmann MA, Gurley G, Elings V (1996) Rev Sci Instrum 67(10):3583–3590

    Article  CAS  Google Scholar 

  67. Stowe TD, Yasumura K, Kenny TW (1997) Appl Phys Lett 71(2):288–290

    Article  CAS  Google Scholar 

  68. Wago O, Zuger K, Wegener R, Kendrick R, Yannoni CS, Rugar D (1997) Rev Sci Instrum 68(4):1823–1826

    Article  CAS  Google Scholar 

  69. T. Paloczi GT, Smith BL, Hansma PK, Walters DA (1998) Appl Phys Lett 73(12):1658–1660

    Article  CAS  Google Scholar 

  70. Kawakatsu H, Toshiyoshi H, Saya D, Fukushima K, Fujita H (2000) Appl Surf Sci 157:320–325

    Article  CAS  Google Scholar 

  71. Saya D, Fukushima K, Toshiyoshi H, Fujita H, Hashiguchi G, Kawakatsu H (2000) Jpn J Appl Phys 39:3793–3798

    Article  CAS  Google Scholar 

  72. Berger R, Lang HP, Gerber Ch, Gimzewski JK, Fabian JH, Scandella L, Meyer E, Güntherodt HJ (1998) Chem Phys Lett 294:363–369

    Article  CAS  Google Scholar 

  73. Lang HP, Berger R, Battiston FM, Ramseyer JP, Meyer C, Andreolli E, Brugger J, Vettiger P, Despont M, Mezzacasa T, Scandella L, Güntherodt HJ, Gerber Ch, Gimzewski JK (1998) Appl Phys A 66:S61–S64

    Article  CAS  Google Scholar 

  74. Bachels T, Schäfer R (1999) Chem Phys Lett 300:177–182

    Article  CAS  Google Scholar 

  75. Jung MY, Kim DW, Choi SS, Kang CJ, Kuk Y (1999) Jpn J Appl Phys 38:6555–6557

    Article  CAS  Google Scholar 

  76. Lang HP, Baller MK, Berger R, Gerber Ch, Gimzewski JK, Battiston FM, Fornaro P, Ramseyer JP, Meyer E, Güntherodt HJ (1999) Anal Chim Acta 393:59–65

    Article  CAS  Google Scholar 

  77. Baller MK, Lang HP, Fritz J, Gerber Ch, Gimzewski JK, Drechsler U, Rothuizen H, Despont M, Vettiger P, Battiston FM, Ramseyer JP, Fornaro P, Meyer E, Güntherodt HJ (2000) Ultramicroscopy 82:1–9

    Article  CAS  Google Scholar 

  78. Boisen A, Thaysen J, Jensenius H, Hansen O (2000) Ultramicroscopy 82:11–16

    Article  CAS  Google Scholar 

  79. Barnes JR, Stephenson RJ, Welland ME, Gerber Ch, Gimzewski JK (1994) Nature 372:79–81

    Article  CAS  Google Scholar 

  80. Berger R, Delamarche E, Lang HP, Gerber Ch, Gimzewski J-K, Meyer E, Güntherodt HJ (1997) Nature 276:2021–2024

    CAS  Google Scholar 

  81. Akama Y, Nishimura E, Sakai A (1990) J Vac Sci Technol A 8(1):429–433

    Article  CAS  Google Scholar 

  82. Broers AN, Molzen WN, Cuomo JJ, Wittels ND (1976) Appl Phys Lett 29(9):596–598

    Article  CAS  Google Scholar 

  83. Okayama S, Komuro M, Mitzutani W, Tokumoto H, Okano M, Shimizu K, Kobayashi Y, Matsumoto F, Wakiyama S, Shigeno M, Sakai F, Fujiwara S, Kitamura O, Ono M, Kajimura K (1988) J Vac Sci Technol A 6(2):440–444

    Article  CAS  Google Scholar 

  84. Ichihashi T, Matsui Sh (1988) J Vac Sci Technol B 6(6):1869–1872

    Article  CAS  Google Scholar 

  85. Dai H, Hafner JH, Rinzler AG, Colbert DT, Smalley RE (1996) Nature 384:147–150

    Article  CAS  Google Scholar 

  86. Iiiji S (1991) Nature 354:56–58

    Article  Google Scholar 

  87. Dresselhaus MS, Dresselhaus G, Eklund PC (1996) Science of fullerenes carbon nanotubes. Academic, New York

    Google Scholar 

  88. Harris TD, Gershoni D, Grober RD, Pfeiffer L, West P, Chand N (1996) Appl Phys Lett 68(7):988–990

    Article  CAS  Google Scholar 

  89. Nagy G, Scarmozzino R, Osgood H, Dai RM, Smalley RE, Michaels CA, Flynn GW, McLane GF (1998) Appl Phys Lett 73(4):529–531

    Article  CAS  Google Scholar 

  90. Wong SS, Woolley AT, Odon TW, Huang JL, Kim Ph, Vezenov DV, Lieber ChM (1998) Appl Phys Lett 73(23):3465–3467

    Article  CAS  Google Scholar 

  91. Dai H, Franklin N, Han J (1998) Appl Phys Lett 73(11):1508–1510

    Article  CAS  Google Scholar 

  92. Teacy MM, Ebbesen TW, Gibson JM (1996) Nature 381:678–680

    Article  Google Scholar 

  93. Wong EW, Sheehan PE, Lieber ChM (1992) Science 277:1971–1975

    Article  Google Scholar 

  94. Salvetat JP, Briggs AD, Bonard JM, Basca RR, Kulik AJ, Stöckli Th, Burnham NA, Forro L (1999) Phys Rev Lett 82(5):944–947

    Article  CAS  Google Scholar 

  95. Falvo MR, Clary GJ, Taylor RM, Chi V, Brooks FP, Washburn S, Superfine R (1997) Nature 389:582–584

    Article  CAS  Google Scholar 

  96. Nardelli MB, Yakobsen BI, Bernhole J (1998) Phys Rev Lett 81(21):4656–4659

    Article  CAS  Google Scholar 

  97. Falvo MR, Clary GJ, Paulson S, Taylor RM, Chi V, Brooks FP, Washburn S, Superfine R (1999) Microsc Microanal 4:504–512

    Google Scholar 

  98. Ru CQ (2000) Phys Rev B 62(15):9973–9976

    Article  CAS  Google Scholar 

  99. Wong SS, Joselevich E, Woolley AT, Cheung ChC, Lieber ChM (1998) Nature 394:52–55

    Article  CAS  Google Scholar 

  100. Terrones M, Hsu WK, Schilder A, Terrones H, Grobert N, Hare JP, Zhu Q, Schwoerer M, Prassides K, Kroto HW, Walton DRM (1998) Appl Phys A 66:307–317

    Article  CAS  Google Scholar 

  101. Nishijima H, Kamo S, Akita S, Nakayama Y, Hohmura KI, Yoshimura ShH, Takeyasu K (1999) Appl Phys Lett 74(26):4061–4063

    Article  CAS  Google Scholar 

  102. Akita S, Nishijima H, Nakayama Y, Tokumasu F, Takeyasu K (1999) J Phys D Appl Phys 32:1044–1048

    Article  CAS  Google Scholar 

  103. Barwich V, Bammerlin M, Baratoff A, Bennewitz R, Guggisberg M, Loppacher C, Pfeiffer O, Meyer E, Güntherodt HJ, Salvetat JP, Bonard JM, Forro L (2000) Appl Surf Sci 157:269–273

    Article  CAS  Google Scholar 

  104. Kulisch W (1999) Deposition of diamond-like superhard materials (Springer Tracts in Modern Physics, vol 157). Springer, Berlin Heidelberg New York

    Google Scholar 

  105. Kulisch W, Malavé A, Lippold G, Scholz W, Mihalcea C, Oesterschulze E (1997) Diamond Relat Mater 6:906

    Article  CAS  Google Scholar 

  106. Malavé A, Oesterschulze E, Kulisch W, Trenkler T, Hantschel T, Vandervorst W (1999) Diamond Relat Mater 8:283–287

    Article  Google Scholar 

  107. Hantschel T, Trenkler T, Vandervorst W, Malavé A, Büchel D, Kulisch W, Oesterschulze E (1999) Microelectr Eng 46:113–116

    Article  CAS  Google Scholar 

  108. Binnig G, Rohrer H (1986) IBM J Res Develop 30:355

    CAS  Google Scholar 

  109. Marti O, Drake B, Hansma PK (1987) Appl Phys Lett 51(7):484–486

    Article  CAS  Google Scholar 

  110. Visser EP, Gerritsen JW, van Enckevort WJP, van Kempen H (1992) Appl Phys Lett 60(26):3232–3234

    Article  Google Scholar 

  111. Kang WP, Davidson JL, Howell M, Bhuva B, Kinser DL, Kerns DV (1996) J Vac Sci Technol B 14(3):2068–2071

    Article  CAS  Google Scholar 

  112. Germann GJ, McClelland GM, Mitsuda Y, Buck M, Seki H (1990) Rev Sci Instrum 63(9):4053–4055

    Article  Google Scholar 

  113. Liu N, Ma Z, Chu X, Hu T, Xue Z, Jiang X, Pang S (1994) J Vac Sci Technol B 12(3):1712–1715

    Article  CAS  Google Scholar 

  114. Niedermann Ph, Hänni W, Blanc N, Christoph R, Burger J (1996) J Vac Sci Technol A 14(3):1233–1236

    Article  CAS  Google Scholar 

  115. Oesterschulze E, Scholz W, Mihalcea C, Albert D, Sobisch B, Kulisch W (1997) Appl Phys Lett 70(4):435–437

    Article  CAS  Google Scholar 

  116. Niedermann Ph, Hänni W, Morel D, Perret A, Skinner N, Indermühle PF, de Rooij NF, Buffat PA (1998) Appl Phys A 66:S31–S34

    Article  CAS  Google Scholar 

  117. Mihalcea C, Scholz W, Malavé A, Albert D, Kulisch W, Oesterschulze E (1998) Appl Phys A 66:S87–S90

    Article  CAS  Google Scholar 

  118. Trenkler T, Hantschel T, Stephenson R, De Wolf P, Vandervorst W, Hellemans L, Malavé A, Büchel DB, Oesterschulze E, Kulisch W, Niedermann P, Sulzbach T, Ohlsson O (2000) J Vac Sci Technol B 18(1):418–427

    Article  CAS  Google Scholar 

  119. Beuret C, Akiyama T, Staufer U, de Rooij NF, Niedermann P, Hänni WH (1998) Appl Phys Lett 76(12):1621–1623

    Article  Google Scholar 

  120. Malavé A, Ludolph K, Leinhos T, Lehrer Ch, Frey L, Oesterschulze E (2001) Appl Phys A (accepted)

    Google Scholar 

  121. Oesterschulze E, Malavé A, Keyser UF, Haug RJ (2002) Diamond Related Mater 11:667

    Article  CAS  Google Scholar 

  122. Yuan G, Jin Y, Jin C, Zhang B, Song H, Ning Y, Zhou T, Jiang H, Li S, Tian T, Gu C (1998) J Cryst Growth 186:382–385

    Article  CAS  Google Scholar 

  123. Howes MJ, Morgan DV (eds)(1986) Gallium arsenide — materials, devices, circuits. Wiley, New York

    Google Scholar 

  124. Prins MWJ, Groenveld RHM, Abraham DL, van Kempen H (1995) Appl Phys Lett 66(9):1141–1143

    Article  CAS  Google Scholar 

  125. Prins MWJ, van der Wielen MCMM, Jansen R, Abraham DL, van Kempen H (1994) Appl Phys Lett 64(10):1207–1209

    Article  CAS  Google Scholar 

  126. Heisig S, Rudow O, Oesterschulze E (2000) J Vac Sci Technol B 18(31):1134–1137

    Article  CAS  Google Scholar 

  127. Heisig S, Rudow O, Oesterschulze E (2000) Appl Phys Lett 77(8):1071–1073

    Article  CAS  Google Scholar 

  128. Goodman JW (1968) Introduction to Fourier optics. McGraw-Hill, Englewood Cliffs, NJ

    Google Scholar 

  129. Hecht E (1989) Optik, 3rd edn. Addison-Wesley, Reading, MA

    Google Scholar 

  130. Fischer UCh (1998) Scanning near-field optical microscopy. In: Wiesendanger R (ed) Scanning probe microscopy. Springer, Berlin Heidelberg New York, pp 161–209

    Google Scholar 

  131. Novotny L (1996) Light propagation and light confinement in near-field optics. PhD thesis, Swiss Federal Institute of Technology, Zürich

    Google Scholar 

  132. Fillard JP (1996) Near-field optics and nanoscopy. World Scientific, Singapore

    Google Scholar 

  133. Paesler MA, Moyer PJ (1996) Near-field optics — theory, instrumentation, and applications. Wiley, New York

    Google Scholar 

  134. Ohtsu M (1998) Near-field nano/atom optics and technology. Springer, Berlin Heidelberg New York

    Google Scholar 

  135. Vollkopf A, Rudow O, Oesterschulze E (2001) J Electrochem Soc 148(10):G587–G591

    Article  CAS  Google Scholar 

  136. G. Ruiter AG, Moers MHP, van Hulst NF, de Boer M (1996) J Vac Sci Technol B 14(2):597–601

    Article  CAS  Google Scholar 

  137. T. Ruiter AGT, Moers MHP, Jalocha A, van Hulst NF (1995) Ultramicroscopy 61:139–143

    Article  CAS  Google Scholar 

  138. Mihalcea C, Vollkopf A, Oesterschulze E (2000) J Electrochem Soc 147(5):1970

    Article  CAS  Google Scholar 

  139. Law ME, Tasch A (2002) Homepage for FLOOPS: Florida Object Oriented Processing Simulator. See http://www.swamp.tec.ufl.edu (last accessed July 2005)

    Google Scholar 

  140. Deal BE, Grove AS (1965) J Appl Phys 36(12):3770–3778

    Article  CAS  Google Scholar 

  141. EerNisse EP (1979) Appl Phys Lett 35(1):810

    Article  Google Scholar 

  142. Wilson LO, Marcus RB (1987) J Electrochem Soc 134(2):481–491

    Article  CAS  Google Scholar 

  143. Kobeda E, Irene EA (1988) J Vac Sci Technol B 6(2):574–578

    Article  CAS  Google Scholar 

  144. Kao DH, McVittie JP, Nix WD, Krishna CS (1987) IEEE T Electron Dev ED-34(5):1008–1017

    CAS  Google Scholar 

  145. Kao DH, McVittie JP, Nix WD, Krishna CS (1988) IEEE T Electron Dev ED-35(1):25–37

    Article  CAS  Google Scholar 

  146. Senez V, Collard D, Baccus B (1994) J Appl Phys 76(6):3285–3296

    Article  CAS  Google Scholar 

  147. Georgiev G, Oesterschulze E (2003) J Vac Sci Technol B 21(4):1361–1363

    Article  CAS  Google Scholar 

  148. Grober RD, Schoelkopf RJ, Prober DE (1997) Appl Phys Lett 70(11):1354–1356

    Article  CAS  Google Scholar 

  149. Keilmann F (1991) Scanning tip for optical radiation. US patent 4,994,818

    Google Scholar 

  150. Fischer UCh, Zapletal M (1992) Ultramicroscopy 42–44:393–398

    Article  Google Scholar 

  151. Leinhos T, Rudow O, Stopka M, Vollkopf A, Oesterschulze E (1999) J Microscopy 194(2/3):349–352

    Article  CAS  Google Scholar 

  152. Grober RD, Schoelkopf RJ, Prober DE (1997) High efficiency near-field electromagnetic probe having a bowtie antenna structure. US patent 5,696,372

    Google Scholar 

  153. Oesterschulze E, Georgiev G, Vollkopf A, Rudow O (2001) J Microscopy 202(1):39–44

    Article  CAS  Google Scholar 

  154. Rudow O, Vollkopf A, Müller-Wiegand M, Georgiev G, Oesterschulze E (2001) Opt Commun 189:187–192

    Article  CAS  Google Scholar 

  155. Shinada S, Koyama F, Nishiyama N, Arai M, Goto K, Iga K (1999) Jpn J Appl Phys 38(11B):L1327–L1329

    Article  CAS  Google Scholar 

  156. Weiss S, Ogletree DF, Botkin D, Salmeron M, Chemala DS (1993) Appl Phys Lett 63:2567

    Article  CAS  Google Scholar 

  157. Botkin DA (1995) Ultrafast tunneling microscopy. PhD thesis, UC Berkeley, CA

    Google Scholar 

  158. Ketchen MB, Grischkowsky D, Chen CC, Chi CC, Duling IN, J Halas NJ, Halbout JM, Kash A, Li GP (1986) Appl Phys Lett 48(12):751–753

    Article  Google Scholar 

  159. Heiliger HM, Pfeiffer T, Roskos HG, Kurz H (1996) Microelectron Eng 31:415–426

    Article  CAS  Google Scholar 

  160. Jensen RJ, Keil UD, Hvam JH (1997) Appl Phys Lett 70(20):2762–2764

    Article  CAS  Google Scholar 

  161. Auston DH (1975) Appl Phys Lett 26:101–103

    Article  CAS  Google Scholar 

  162. Kroekel D, Grischkowsky D, Ketchen MB (1989) Appl Phys Lett 54(18):1046–1047

    Article  Google Scholar 

  163. Kim J, Williamson St, Nees J, Wakana ShI, Whitaker J (1993) Appl Phys Lett 62(18):2268–2270

    Article  CAS  Google Scholar 

  164. Steffens WM, Heisig S, Keil U, Oesterschulze E (1999) Appl Phys B 69:455–458

    Article  CAS  Google Scholar 

  165. Keil UD, Jensen JR, Hvam JM (1998) Appl Phys A 66:S23–S26

    Article  CAS  Google Scholar 

  166. Steffens WM, Oesterschulze E (1999) Electron Lett 35(13):1106–1108

    Article  Google Scholar 

  167. Oesterschulze E, Steffens WM (2001) J Vac Sci Technol B 19(1):107–110

    Article  CAS  Google Scholar 

  168. Keil UD, Jensen JR, Hvam JM (1997) J Appl Phys 81:2929–2934

    Article  CAS  Google Scholar 

  169. Steffens W (1999) Detektion von ultrakurzen elektrischen Signalen mit hoher Ortsauflösung. PhD thesis, Universität Gesamthochschule Kassel, Germany

    Google Scholar 

  170. Gupta S, Frankel MY, Valdmanis JA, Whitaker GA, Mourou JF (1991) Appl Phys Lett 59(25):3276–3278

    Article  CAS  Google Scholar 

  171. Harmon ES, Melloch MR, Woodall JM, Nolte DD, Otsuka N, Chang CL (1991) Appl Phys Lett 63(16):2248–2250

    Article  Google Scholar 

  172. Smith FW (1992) Device applications of low temperature-grown GaAs. In: Witt GL, Calawa AR, Mishra UK, Weber ER (eds) Low temperature (LT) GaAs related materials. Materials Research Society, Warrendale, PA, pp 3–11

    Google Scholar 

  173. Liu X, Prasad A, Chen WM, Kurpiewski A, Stoschek A, Liliental-Weber Z, Weber ER (1994) Appl Phys Lett 59(25):3276–3278

    Google Scholar 

  174. Keil UD, Jensen JR, Hvam JM (1998) Appl Phys Lett 72(13):1644–1646

    Article  CAS  Google Scholar 

  175. Hinterdorfer P (2004) Molecular recognition force microscopy. In: Bhushan B (ed) Handbook of nanotechnology. Springer, Berlin Heidelberg New York

    Google Scholar 

  176. Hooton JC, German CS, Allen S, Davies MC, Roberts CJ, Tendler SJB, Williams PM (2004) Pharmaceut Res 21(6):953–961

    Article  CAS  Google Scholar 

  177. Friedsam C, Wehle AK, Kühner F, Gaub HE (2003) J Phys—Condens Mat 15(18):S1709–S1723

    Article  CAS  Google Scholar 

  178. Mondon M, Berger S, Ziegler C (2003) Anal Bianal Chem 375(7):849–855

    CAS  Google Scholar 

  179. Then D (2002) Miniariturisierte massensensitive Sensoren und deren Anwendung in der Gas-und Flüssigkeitsensorik. PhD thesis, TU Kaiserslautern, Fachbereich Physik, Germany

    Google Scholar 

  180. Then D, Ziegler C (2004) J Nanosci Nanotechnol 1:499–516

    CAS  Google Scholar 

  181. Ziegler C (2004) Anal Bioanal Chem 379:946–959

    CAS  Google Scholar 

  182. Sader JE (1998) J Appl Phys 84(1):64–76

    Article  CAS  Google Scholar 

  183. Engstrom RC, Weber M, Wunder DJ, Burges R, Winquist S (1986) Anal Chem 58:844

    Article  CAS  Google Scholar 

  184. Bard AJ, Fan FRF, Kwak J, Lev O (1989) Anal Chem 61:132

    Article  CAS  Google Scholar 

  185. Kwak J, Bard AJ (1989) Anal Chem 61:1794

    Article  CAS  Google Scholar 

  186. Bard AJ, Mirkin MV, Unwin PR, Wipf DO (1992) J Phys Chem 96:1861

    Article  CAS  Google Scholar 

  187. Bard AJ, Mirkin MV (2001) Scanning electrochemical microscopy. Marcel Dekker, New York

    Google Scholar 

  188. Wittstock G (2003) Solid—liquid interfaces, macroscopic phenomena — microscopic understanding. Springer, Berlin Heidelberg New York, pp 335–364

    Google Scholar 

  189. Wipf D (2005) Bibliography for SECM papers and closely related material. Published online at http://www.msstate.edu/dept/Chemistry/dow1/secm/secm_bib.html (last accessed July 2005)

    Google Scholar 

  190. Mandler D (2001) Scanning electrochemical microscopy. Marcel Dekker, New York, pp 593

    Google Scholar 

  191. Saito Y (1968) Rev Polarogr (Jpn) 15:177

    CAS  Google Scholar 

  192. Sklyar O, Wittstock G (2002) J Phys Chem B 106:7499

    Article  CAS  Google Scholar 

  193. Amphlett JL, Denuault G (1998) J Phys Chem B 102:9946

    Article  CAS  Google Scholar 

  194. Nann T, Heinze J (2003) Electrochim Acta 48:3975

    Article  CAS  Google Scholar 

  195. Wittstock G (2001) J Anal Chem 370:303

    Article  CAS  Google Scholar 

  196. Wei C, Bard AJ, Mirkin MV (1995) J Phys Chem 99:16033

    Article  CAS  Google Scholar 

  197. Wilhelm T, Wittstock G (2002) Langmuir 18:9485

    Article  CAS  Google Scholar 

  198. Wilhelm T, Wittstock G (2001) Electrochim Acta 47:275

    Article  CAS  Google Scholar 

  199. Wilhelm T, Wittstock G (2003) Angew Chem Int Ed 42:2247

    Article  CAS  Google Scholar 

  200. Hengstenberg A, Kranz C, Schuhmann W (2000) Chem Eur J 6:1547

    Article  CAS  Google Scholar 

  201. Büchler M, Kelley SC, Smyrl WH (1999) Electrochem Solid State Lett 3:35

    Article  Google Scholar 

  202. Ludwig M, Kranz C, Schuhmann W, Gaub HE (1995) Rev Sci Instrum 66:285

    Article  Google Scholar 

  203. Barker AL, Unwin PR, Gardner W, Rieley H (2004) Electrochem Commun 6:91

    Article  CAS  Google Scholar 

  204. Oyamatsu D, Kanaya N, Shiku H, Nishizawa M, Matsue T (2003) Sensor Actuat B B91:199

    Article  CAS  Google Scholar 

  205. Cannan S, Macklam ID, Unwin PR (2002) Electrochem Commun 4:886

    Article  CAS  Google Scholar 

  206. Kueng A, Kranz C, Lugstein A, Bertagnolli E, Mizaikoff B (2003) Angew Chem Int Edit 42:3238

    Article  CAS  Google Scholar 

  207. Macpherson JV, Unwin PR (2002) Anal Chem 73:550

    Article  CAS  Google Scholar 

  208. Kranz C, Friedbacher G, Mizaikoff B, Lugstein A, Smolier J, Bertagnolli E (2001) Anal Chem 73:2491

    Article  CAS  Google Scholar 

  209. Porthun S, Abelmann L, Vellekoop SJL, Lodder JC, Hug HJ (1998) Appl Phys A 66(Suppl 2):S1185–S1189

    Article  CAS  Google Scholar 

  210. Saito H, van den Bos AG, Abelmann L, Lodder JC (2003) IEEE T Magn 39(5):3447–3449

    Article  Google Scholar 

  211. Martin Y, Wickramasinghe HK (1987) Appl Phys Lett 50(20):1455–1457

    Article  Google Scholar 

  212. Rugar D, Mamin HJ, Guethner P, Lambert SE, Stern JE, McFadyen I, Yogi T (1990) J Appl Phys 68(3):1169–1183

    Article  CAS  Google Scholar 

  213. Fischer PB, Wei MS, Chou SY (1993) J Vac Sci Technol B 11(6):2570–2573

    Article  CAS  Google Scholar 

  214. Ruhrig M, Porthun S, Lodder JC (1994) Rev Sci Instrum 65(10):3224–3228

    Article  Google Scholar 

  215. Ruhrig M, Porthun S, Lodder JC, McVitie S, Heyderman LJ, Johnston AB, Chapman JN (1996) J Appl Phys 79(6):2913–2919

    Article  Google Scholar 

  216. Skidmore GD, Dahlberg ED (1997) Appl Phys Lett 71(22):3293–3295

    Article  CAS  Google Scholar 

  217. Memmert U, Muller AN, Hartmann U (2000) Meas Sci Technol 11(9):1342–1347

    Article  CAS  Google Scholar 

  218. Folks L, Best ME, Rice PM, Terris BD, Weller D, Chapman JN (2000) Appl Phys Lett 76(7):909–911

    Article  CAS  Google Scholar 

  219. Phillips GN, Eisenberg M, Persat N, Draaisma EA, Abelmann L, Lodder JC (2000) IEEE T Magn 38(5):3528–3535

    Article  CAS  Google Scholar 

  220. Phillips GN, Abelmann L, Siekman M, Lodder JC (2002) Appl Phys Lett 81(5):865–867

    Article  CAS  Google Scholar 

  221. Grutter P, Rugar D, Mamin HJ (1990) Appl Phys Lett 57(17):1820–1822

    Article  Google Scholar 

  222. Grutter P, Rugar D, Mamin HJ, Castillo G, Lin C-J, MacFadyen IR, Valletta RM, Wolter O, Bayer T, Greschner J (1991) J Appl Phys 69(8):5883–5885

    Article  Google Scholar 

  223. Sueoka K, Okuda K, Matsubara N, Sai F (1991) J Vac Sci Technol B 9(2):1313–1317

    Article  CAS  Google Scholar 

  224. Hopkins PF, Moreland J, Malhotra SS, Liou SH (1996) J Appl Phys 79(8 Part 2B):6448–6450

    Article  CAS  Google Scholar 

  225. Teschke O (2001) Appl Phys Lett 79(17):2773–2775

    Article  CAS  Google Scholar 

  226. van den Bos A, Heskamp I, Siekman M, Abelmann L, Lodder C (2002) IEEE T Magn 38:2441–2443

    Article  CAS  Google Scholar 

  227. van den Bos A (2003) CantiClever planar fabrication of probes for magnetic imaging. Twente University Press, the Netherlands

    Google Scholar 

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Oesterschulze, E. et al. (2006). Sensor Technology for Scanning Probe Microscopy and New Applications. In: Bhushan, B., Fuchs, H. (eds) Applied Scanning Probe Methods II. NanoScience and Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-27453-7_6

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