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Silicon Dioxide

Part of the Microtechnology and Mems book series (MEMS)

Keywords

Deep Trap Trapping Center Oxide Charge Intrinsic Point Defect Oxide Trap 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2005

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