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© 2005 Springer-Verlag Berlin Heidelberg
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(2005). Silicon Dioxide. In: CCD Image Sensors in Deep-Ultraviolet. Microtechnology and Mems. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-27412-X_5
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DOI: https://doi.org/10.1007/3-540-27412-X_5
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-22680-2
Online ISBN: 978-3-540-27412-4
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