Advertisement

UV Laser Induced Effects at the Si-SiO2 Interface

Part of the Microtechnology and Mems book series (MEMS)

Keywords

Interface State Density Excimer Laser Irradiation Periodic Surface Structure Argon Laser Light Synthetic Quartz Glass 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Copyright information

© Springer-Verlag Berlin Heidelberg 2005

Personalised recommendations