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Electrostatic Accelerators pp 506–529Cite as

Modification of Materials by MeV Ion Beams

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Part of the book series: Particle Acceleration and Detection ((PARTICLE))

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References

  1. N. Nastasi, J.W. Mayer, J.K. Hirvonen: Ion—Solid Interactions: Fundamentals and Applications (Cambridge University Press, London 1996)

    Google Scholar 

  2. J.F. Ziegler, J.P. Biersack, U. Littmark: The Stopping and Ranges of Ions in Matter, vol. 1 (Pergamon, New York 1985); SRIM 2003.24, http://www.srim.org.

    Google Scholar 

  3. M.W. Thompson: Defects and Radiation Damage in Metals (Cambridge University Press, London 1969).

    Google Scholar 

  4. H.H. Andersen: Forelæsning over Strålningsbeskadelse i faste stoffer 1. Defektproduktion og defektkonfigurationer (Det fysiske intitut, Aarhus universitet, Aarhus 1984)

    Google Scholar 

  5. P. Sigmund: Nucl. Instr. Meth. B 135, 1 (1998)

    Article  Google Scholar 

  6. N. Bohr: Det. Kgl. Danske Videnskabernes Selskab, Mathematisk-fysiske Meddelser 18, Nr. 8 (1948)

    Google Scholar 

  7. R. Spohr: In Ion Tracks in Microtechnology, Principles and Applications, ed. by K. Bethge (Vieweg, Braunschweig 1990) p. 112

    Google Scholar 

  8. P. Sigmund: Nucl. Instr. Meth. B 164–165, 401 (2000)

    Google Scholar 

  9. P. Hovington, D. Drouin, R. Gauvin: Scanning 19, 1 (1997)

    Google Scholar 

  10. D. Drouin, P. Hovington, R. Gauvin: Scanning 19, 20 (1997)

    Google Scholar 

  11. P. Hovington, D. Drouin, R. Gauvin, D.D. Joy, N. Evans: Scanning 19, 29 (1997)

    Google Scholar 

  12. Y. Zhang, W.J. Weber, W. Jiang, A. Hallén, G. Possnert: J. Appl. Phys. 91, 6388 (2002)

    Article  Google Scholar 

  13. W. Jiang, W.J. Weber: Phys. Rev. B 64, 125206 (2001)

    Google Scholar 

  14. F. Gao, W.J. Weber: Phys. Rev. B 63, 054101 (2001)

    Google Scholar 

  15. L. Henry, M.F. Barthe, C. Corbel, P. Desgardin, G. Blondiaux, S. Arpiainen, L. Liszkay: Phys. Rev. B 67, 115210 (2003)

    Article  Google Scholar 

  16. X.D. Chen, C.C. Ling, S. Fung, C.D. Beling, M. Gong, T. Henkel, H. Tanoue, N. Kobayashi: J. Appl. Phys. 93, 3117 (2003)

    Article  Google Scholar 

  17. W.J. Weber, N. Yu, L. M. Wang: J. Nucl. Mater. 253, 53 (1998)

    Article  Google Scholar 

  18. R.E. Avila, J.J. Kopanski, C.D. Fung: J. Appl. Phys. 62, 3469 (1987)

    Article  Google Scholar 

  19. Y. Zhang, W.J. Weber, W. Jiang, C.M. Wang, A. Hallén, G. Possnert: J. Appl. Phys. 93, 1954 (2002)

    Google Scholar 

  20. H.L. Tuller: J. Phys. Chem. Solids 55, 1393 (1994)

    Article  Google Scholar 

  21. B.J. Wuensch, K.W. Eberman, C. Heremans, E.M. Ku, P. Onnerud, E.M.E. Yeo, S.M. Haile, J.K. Stalick, J.D. Jorgensen: Solid State Ionics 129, 111 (2000)

    Google Scholar 

  22. J.B. Goodenough, R.N. Castellano: Solid State Chem. 44, 109 (1982)

    Article  Google Scholar 

  23. S.J. Korf, H.J.A. Koopmans, B.C. Lippens, A.J. Burggraaf, P.J. Gellings: J. Chem. Soc. Faraday Trans. 83, 1485 (1987)

    Article  Google Scholar 

  24. K.E. Sickafus, L. Minervini, R.W. Grimes, J.A. Valdez, M. Ishimaru, F. Li, K.J. McClellan, T. Hartmann: Science 289, 748 (2000)

    Article  PubMed  Google Scholar 

  25. S.X. Wang, B.D. Begg, L.M. Wang, R.C. Ewing, W.J. Weber, K.V. Godivan Kutty: J. Mater. Res. 14, 4470 (1990)

    Google Scholar 

  26. R. C. Ewing, W. J. Weber, and J. Lian, J. Appl. Phys. 95, 5949 (2004)

    Article  Google Scholar 

  27. R.C. Ewing, W.J. Weber, W. Lutze: In Diposal of Weapon Plutonium, ed. by E.R. Merz, C.E. Walter (Kluwer Academic Dordrecht 1996) p. 65

    Google Scholar 

  28. B.D. Begg, N.J. Hess, W.J. Weber, R. Devanathan, J.P. Icenhower, S. Thevuthasan, B.P. McGrail: J. Nucl. Mater. 288, 208 (2001)

    Google Scholar 

  29. W.J. Weber, J.W. Wald, Hj, Matzke: Mater. Lett. 3, 173 (1985)

    Article  Google Scholar 

  30. W.J. Weber, J.W. Wald, Hj, Matzke: J. Nucl. Mater. 138, 196 (1986)

    Article  Google Scholar 

  31. B.D. Begg, W.J. Weber, R. Devanathan, J.P. Icenhower, S. Thevuthasan, B.P. McGrail: Ceram. Trans. 107, 553 (2000)

    Google Scholar 

  32. R.C. Ewing, W.J. Weber, F.W. Clinard Jr.: Prog. Nucl. Energy 29, 63 (1995)

    Article  Google Scholar 

  33. W.J. Weber, R.C. Ewing, C.R.A. Catlow, T. Diaz de la Rubia, L.W. Hobbs, C. Kinoshita, Hj. Matzke, A.T. Motta, M. Nastasi, E.K.H. Salje, E.R. Vance, S.J. Zinkle: J. Mater. Res. 13, 1434 (1998)

    Google Scholar 

  34. F.W. Clinard Jr., D.E. Peterson, D.L. Rohr, L.W. Hobbs: J. Nucl. Mater. 126, 245 (1984)

    Article  Google Scholar 

  35. G.R. Lumpkin: J. Nucl. Mater. 289, 136 (2001)

    Article  Google Scholar 

  36. R.C. Ewing, L.M. Wang: Nucl. Instr. Meth. Phys. Res. B 65, 319 (1992)

    Article  Google Scholar 

  37. S.X. Wang, L.M. Wang, R.C. Ewing, G.S. Was, G.R. Lumpkin: Nucl. Instr. Meth. Phys. Res. B 148, 704 (1999)

    Article  Google Scholar 

  38. W.J. Weber, N.J. Hess: Nucl. Instr. Meth. Phys. Res. B 80–81, 1245 (1993)

    Google Scholar 

  39. B.D. Begg, N.J. Hess, D.E. McCready, S. Thevuthasan, W.J. Weber: J. Nucl. Mater. 289, 188 (2001)

    Article  Google Scholar 

  40. Y. Zhang, W.J. Weber, V. Shutthanandan, R. Devanathan, S. Thevuthasan, G. Balakrishnan, D.M. Paul: J. Appl. Phys. 95, 2866 (2004)

    Google Scholar 

  41. W.J. Weber, R.C. Ewing: In Scientific Basis for Nuclear Waste Management XXV, ed. by B.P. McGrail, G.A. Cragnolino, Mater. Res. Soc. Symp. Proc. 713, (Materials Research Society, Warrendale, PA 2002) p. 443

    Google Scholar 

  42. R.E. Williford, W.J. Weber: J. Nucl. Mater. 299, 140 (2001)

    Article  Google Scholar 

  43. K.E. Sickafus, L. Minervini, R.W. Grimes, J.A. Valdez, T. Hartmann: Radiat. Eff. Defects Solids 155, 133 (2001)

    Google Scholar 

  44. T. Winzell, I. Maximov, L. Landin, Y. Zhang, A. Gustafsson, L. Samulelsson, H.J. Whitlow: Semicond. Sci. Technol. 16, 889 (2001)

    Google Scholar 

  45. A. Steckl, P. Chen, H.E. Jackson, A.G. Choo, X. Cao, J.T. Boyd, M. Kumar: J. Vac. Sci. Technol. B 13, 2570 (1995)

    Google Scholar 

  46. J. Meyer, U. Weidenmüller, P. Baving, H. Röchen, A. Stephan, H.H. Bukow, C. Rolfs: Nucl. Instr. Meth. B 161–163, 898 (2000)

    Google Scholar 

  47. M. Hattori, Y. Ohki, M. Fujimaki, T. Souno, H. Nishikawa, E. Watanabe, M. Oikawa, T. Kamiya, K. Arakawa: Nucl. Instr. Meth. B 210, 272 (2003)

    Article  Google Scholar 

  48. I. Rajta, I. Gómez-Morilla, M.H. Abraham, Á.Z. Kiss: Nucl. Instr. Meth. B 210, 260 (2003)

    Article  Google Scholar 

  49. T. Souno, H. Nishikawa, M. Hattori, Y. Ohki, E. Watanabe, M. Oikawa, T. Kamiya, K. Arakawa: Nucl. Instr. Meth. B 210, 277 (2003)

    Article  Google Scholar 

  50. A. Chapiro: Nucl. Instr. Meth. B 32, 111 (1988)

    Article  Google Scholar 

  51. R. Compañó: Technology Roadmap for Nanoelectronics, 2nd ed., European Commission IST program Future and Emerging Technologies (2000)

    Google Scholar 

  52. Micro Chem, 1254 Chestnut Street, Newton, MA 02464, USA: http://www.microchem.com/products/su_eight.htm

    Google Scholar 

  53. J.A. van Kan, T.C. Sum, T. Osipowiz, F. Watt: Nucl. Instr. Meth. B 161–163, 366 (2000)

    Google Scholar 

  54. T. Osipowicz, J.A. van Kan, T.C. Sum, J.L. Sanchez, F. Watt: Nucl. Instr. Meth. B 161–163, 83 (2000)

    Article  Google Scholar 

  55. J.A. van Kan, J.L. Sanchez, T. Osipowicz, F. Watt: Microsyst. Technol. 6, 82 (2000)

    Article  Google Scholar 

  56. J.A. van Kan, A.A. Betiol, F. Watt: Appl. Phys. Lett. 83, 1629 (2003)

    Article  Google Scholar 

  57. H.J. Whitlow, M.L. Ng, V. Auželyté, I. Maximov, L. Montelius, J.A. van Kan, A. Bettiol, F. Watt: Nanotechnology 15, 223 (2003).

    Article  Google Scholar 

  58. A.A. Betiol, T.C. Sum, J.A. van Kan, F. Watt: Nucl. Instr. Meth. B 210, 250 (2003)

    Article  Google Scholar 

  59. T.C. Sum, A.A. Betiol, H.L. Seng, I. Rajta, J.A. van Kan, F. Watt: Nucl. Instr. Meth. B 210, 266 (2003)

    Article  Google Scholar 

  60. ICRU Report 33, Radiation Quantities and Units (International Commission on Radiation Units and Measurements, 1980)

    Google Scholar 

  61. http://www.npl.co.uk/ionrad/quantities.html

    Google Scholar 

  62. Bureau International des Poids et Mesures, Pavillon de Breteuil, 92312 Sèvres Cedex, France: http://www.bipm.fr/enus/

    Google Scholar 

  63. http://rkb.home.cern.ch/rkb/PH14pp/node154.html#153

    Google Scholar 

  64. A.D. McNaught, A. Wilkinson; Compendium of Chemical Terminology: The Gold Book, 2nd edn. (International Union of Pure and Applied Chemistry), Internet edition, http://www.iupac.org/publications/compendium/index.html

    Google Scholar 

  65. P. Sigmund: ICRU News, June 2000, p. 5

    Google Scholar 

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Author information

Authors and Affiliations

  1. Pacific Northwest National Laboratory, P O Box 999, Richland, WA, 99352, USA

    Y. Zhang

  2. Department of Physics, University of Jyväskylä, P.O. Box 35 (YFL), FIN-40014, Finland

    H.J. Whitlow

  3. School of Technology and Society, Malmö högskola, 206 05, Malmö, Sweden

    H.J. Whitlow

Authors
  1. Y. Zhang
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Editor information

Editors and Affiliations

  1. Department of Physics, Lund University, Sölvegatan 14, 22362, Lund, Sweden

    Ragnar Hellborg

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Zhang, Y., Whitlow, H. (2005). Modification of Materials by MeV Ion Beams. In: Hellborg, R. (eds) Electrostatic Accelerators. Particle Acceleration and Detection. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-27095-7_39

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