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Excimer Laser Technology pp 221–277Cite as

F2-Laser Microfabrication for Photonics and Biophotonics

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    Dirk Basting

  2. Laser-Laboratorium Göttingen e.V., Hans-Adolf-Krebs-Weg, 137077, Göttingen, Germany

    Gerd Marowsky

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Herman, P.R. (2005). F2-Laser Microfabrication for Photonics and Biophotonics. In: Basting, D., Marowsky, G. (eds) Excimer Laser Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-26667-4_18

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