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Oxide Reliability Issues

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High Dielectric Constant Materials

Part of the book series: Springer Series in Advanced Microelectronics ((MICROELECTR.,volume 16))

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  1. R. Degraeve
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Degraeve, R. (2005). Oxide Reliability Issues. In: Huff, H., Gilmer, D. (eds) High Dielectric Constant Materials. Springer Series in Advanced Microelectronics, vol 16. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-26462-0_4

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