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Structure and properties of the Si-SiO2 interregion

  • Part V. Implantation, Annealing and Radiation Effects
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Defect Complexes in Semiconductor Structures

Part of the book series: Lecture Notes in Physics ((LNP,volume 175))

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References

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Authors and Affiliations

  1. Sektion Physik der Wilhelm-Pieck-Universität Rostock, Universitätsplatz 3, 2500, Rostock 1, Germany

    K. Hübner

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  1. K. Hübner
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Editor information

J. Giber F. Beleznay I. C. Szép J. László

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© 1983 Springer-Verlag

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Hübner, K. (1983). Structure and properties of the Si-SiO2 interregion. In: Giber, J., Beleznay, F., Szép, I.C., László, J. (eds) Defect Complexes in Semiconductor Structures. Lecture Notes in Physics, vol 175. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-11986-8_22

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  • DOI: https://doi.org/10.1007/3-540-11986-8_22

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  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-540-11986-9

  • Online ISBN: 978-3-540-39456-3

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