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Optimization of a Simulation for 300mm FAB Semiconductor Manufacturing

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Computational Science and Its Applications - ICCSA 2006 (ICCSA 2006)

Part of the book series: Lecture Notes in Computer Science ((LNTCS,volume 3984))

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Abstract

Many processes are composed of Bays with equipments. Most 300mm wafer lines use AMHS (Automated Material Handling System) for inter-bay and intra-bay lot transportation. In particular, the inter-bay AMHS moves lots between stockers, whereas intra-bay AMHS moves lots between stockers and tools, or between tools within the same bay. Most companies are trying to reduce average cycle time to increase productivity and delivery time. In this paper, we proposed simulation process standardization method in 300mm FAB semiconductor manufacturing process to propose simulation model verification method. Also we tried to prove efficiency of adopting the simulation theory in real production line.

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References

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Author information

Authors and Affiliations

  1. School of Information and Communication Engineering, SungKyunKwan University, 300, Chunchun-dong, jangan-gu, Suwon,Kyunggi-do, 440-746, S. Korea

    DongSik Park & Chilgee Lee

  2. Division of Multimedia Sungkyul University, Anyang 8 dong, Manan gu, Anyang-city, Gyeonggi-do, 430-742, S. Korea

    Youngshin Han

Authors
  1. DongSik Park
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  2. Youngshin Han
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  3. Chilgee Lee
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Editor information

Editors and Affiliations

  1. Department of Computer Science, University of Calgary,, 2500 University Drive N.W., T2N 1N4, Calgary, AB, Canada

    Marina L. Gavrilova

  2. Department of Mathematics and Computer Science, University of Perugia, via Vanvitelli, 1, I-06123, Perugia, Italy

    Osvaldo Gervasi

  3. William Norris Professor, Head of the Computer Science and Engineering Department, University of Minnesota, USA

    Vipin Kumar

  4. OptimaNumerics Ltd.,, Cathedral House 23-31 Waring Street, BT1 2DX, Belfast, UK

    C. J. Kenneth Tan

  5. Clayton School of IT, Monash University, 3800, Clayton, Australia

    David Taniar

  6. Department of Chemistry, University of Perugia, Via Elce di Sotto, 8, I-06123, Perugia, Italy

    Antonio Laganá

  7. School of Computing, Soongsil University, Seoul, Korea

    Youngsong Mun

  8. School of Information and Communication Engineering, Sungkyunkwan University, Korea

    Hyunseung Choo

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© 2006 Springer-Verlag Berlin Heidelberg

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Cite this paper

Park, D., Han, Y., Lee, C. (2006). Optimization of a Simulation for 300mm FAB Semiconductor Manufacturing. In: Gavrilova, M.L., et al. Computational Science and Its Applications - ICCSA 2006. ICCSA 2006. Lecture Notes in Computer Science, vol 3984. Springer, Berlin, Heidelberg. https://doi.org/10.1007/11751649_28

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  • DOI: https://doi.org/10.1007/11751649_28

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-540-34079-9

  • Online ISBN: 978-3-540-34080-5

  • eBook Packages: Computer ScienceComputer Science (R0)

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