Abstract
We propose a tuning method for MEMS gyroscopes based on evolutionary computation to efficiently increase the sensitivity of MEMS gyroscopes through tuning. The tuning method was tested for the second generation JPL/Boeing Post-resonator MEMS gyroscope using the measurement of the frequency response of the MEMS device in open-loop operation We also report on the development of a hardware platform for integrated tuning and closed-loop operation of MEMS gyroscopes. The control of this device is implemented through a digital design on a Field Programmable Gate Array (FPGA). The hardware platform easily transitions to an embedded solution that allows for the miniaturization of the system to a single chip.
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Keymeulen, D. et al. (2005). Hardware Platforms for MEMS Gyroscope Tuning Based on Evolutionary Computation Using Open-Loop and Closed-Loop Frequency Response. In: Moreno, J.M., Madrenas, J., Cosp, J. (eds) Evolvable Systems: From Biology to Hardware. ICES 2005. Lecture Notes in Computer Science, vol 3637. Springer, Berlin, Heidelberg. https://doi.org/10.1007/11549703_21
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DOI: https://doi.org/10.1007/11549703_21
Publisher Name: Springer, Berlin, Heidelberg
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