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Requirements of Precursors for MOCVDand ALD of Rare Earth Oxides

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Rare Earth Oxide Thin Films

Part of the book series: Topics in Applied Physics ((TAP,volume 106))

Abstract

This Chapter gives an account of the coordination chemistry of precursors for MOCVD and ALD of rare earth oxides. It opens with a brief introduction to the coordination chemistry of the rare earth elements, and then describes the strategies that have been employed to design and synthesize rare earth complexes with reasonable volatility. The chemical requirements of precursors for MOCVD and ALD are outlined, and it is shown that these requirements may be mutually exclusive. Important classes of precursors, including amides, alkoxides, diketonates and organometallics, are surveyed.

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  1. Department of Chemistry, Donnan and Robert Robinson Laboratories, University of Liverpool, Crown Street, L69 7ZD, Liverpool, United Kingdom

    Helen C. Aspinall

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  1. Helen C. Aspinall
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Marco Fanciulli Giovanna Scarel

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Aspinall, H.C. Requirements of Precursors for MOCVDand ALD of Rare Earth Oxides. In: Fanciulli, M., Scarel, G. (eds) Rare Earth Oxide Thin Films. Topics in Applied Physics, vol 106. Springer, Berlin, Heidelberg . https://doi.org/10.1007/11499893_4

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